High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Growth Fundamentals

Winkler, Robert; Lewis, Brett B.; Fowlkes, Jason Davidson; Rack, Philip D.; Plank, Harald

doi:10.1021/acsanm.8b00158

Title: High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Growth Fundamentals

Journal Article · Wed Feb 14 00:00:00 EST 2018 · ACS Applied Nano Materials

DOI:https://doi.org/10.1021/acsanm.8b00158· OSTI ID:1439951

Winkler, Robert ^[1]; Lewis, Brett B. ^[2];

^[2];

^[3]

Graz Centre for Electron Microscopy, Graz (Austria)
Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Graz Centre for Electron Microscopy, Graz (Austria); Graz Univ. of Technology, Graz (Austria)

While 3D-printing is currently experiencing significant growth and having a significant impact on science and technology, the expansion into the nanoworld is still a highly challenging task. Among the increasing number of approaches, focused electron-beam-induced deposition (FEBID) was recently demonstrated to be a viable candidate toward a generic direct-write fabrication technology with spatial nanometer accuracy for complex shaped 3D-nanoarchitectures. In this comprehensive study, we explore the parameter space for 3D-FEBID and investigate the implications of individual and interdependent parameters on freestanding nanosegments, which act as a fundamental building block for complex 3D-structures. In particular, the study provides new basic insights such as precursor transport limitations and angle dependent growth rates, both essential for high-fidelity fabrication. In conclusion, complemented by practical aspects, we provide both basic insights in 3D-growth dynamics and technical guidance for specific process adaption to enable predictable and reliable direct-write synthesis of freestanding 3D-nanoarchitectures.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1439951

Journal Information:: ACS Applied Nano Materials, Vol. 1, Issue 3; ISSN 2574-0970

Country of Publication:: United States

Language:: English

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Cited by: 48 works

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