One-dimensional angular-measurement-based stitching interferometry

Huang, Lei; Xue, Junpeng; Gao, Bo; Idir, Mourad

doi:10.1364/OE.26.009882

Title: One-dimensional angular-measurement-based stitching interferometry

Journal Article · Thu Apr 05 00:00:00 EDT 2018 · Optics Express

DOI:https://doi.org/10.1364/OE.26.009882· OSTI ID:1431400

; Xue, Junpeng; Gao, Bo; Idir, Mourad

In this paper, we present one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1431400

Alternate ID(s):: OSTI ID: 1438320

Report Number(s):: BNL-205680-2018-JAAM; OPEXFF

Journal Information:: Optics Express, Journal Name: Optics Express Vol. 26 Journal Issue: 8; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 18 works

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References (19)

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