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Title: One-dimensional angular-measurement-based stitching interferometry

Abstract

In this paper, we present one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less.

Authors:
ORCiD logo [1];  [2];  [3];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Sichuan Univ., Chengdu (China)
  3. Chinese Academy of Sciences, Shanghai (China); Univ. of Chinese Academy of Sciences, Beijing (China)
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1438320
Report Number(s):
BNL-205680-2018-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:
SC0012704
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 26; Journal Issue: 8; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; instrumentation, measurement, and metrology; metrology; mirrors; interferometry

Citation Formats

Huang, Lei, Xue, Junpeng, Gao, Bo, and Idir, Mourad. One-dimensional angular-measurement-based stitching interferometry. United States: N. p., 2018. Web. doi:10.1364/OE.26.009882.
Huang, Lei, Xue, Junpeng, Gao, Bo, & Idir, Mourad. One-dimensional angular-measurement-based stitching interferometry. United States. doi:10.1364/OE.26.009882.
Huang, Lei, Xue, Junpeng, Gao, Bo, and Idir, Mourad. Thu . "One-dimensional angular-measurement-based stitching interferometry". United States. doi:10.1364/OE.26.009882. https://www.osti.gov/servlets/purl/1438320.
@article{osti_1438320,
title = {One-dimensional angular-measurement-based stitching interferometry},
author = {Huang, Lei and Xue, Junpeng and Gao, Bo and Idir, Mourad},
abstractNote = {In this paper, we present one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less.},
doi = {10.1364/OE.26.009882},
journal = {Optics Express},
number = 8,
volume = 26,
place = {United States},
year = {Thu Apr 05 00:00:00 EDT 2018},
month = {Thu Apr 05 00:00:00 EDT 2018}
}

Journal Article:
Free Publicly Available Full Text
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