Electrochemical Fabrication of Flat, Polymer‐Embedded Porous Silicon 1D Gradient Refractive Index Microlens Arrays
Abstract
Gradient refractive index (GRIN) optics has attracted considerable interest due to the ability to decouple optical performance from optical element shape. However, despite the utility of GRIN optical components, it remains challenging to fabricate arbitrary GRIN profiles and the available refractive index contrast remains small, particularly at the microscale. Here, using mathematical transformations that the authors developed, the electrochemical waveform required to electrochemically etch arrays of bulk Si microstructures into 1D porous Si (PSi) GRIN microlens arrays (MLAs) is determined. This waveform is then used to form high refractive index contrast MLAs containing precisely‐defined, arbitrary refractive index profiles. The MLAs are then embedded in a transparent optical polymer, mechanically detached from the host Si substrate, and planarized via simple polishing. Cylindrical microlenses and 1D axicons are demonstrated and characterized, and the optical behavior is found to be in agreement with theory. These MLAs could find applications in displays, photodetectors, and optical microscopy.
- Authors:
-
- Department of Materials Science and Engineering Department of Chemistry Frederick Seitz Materials Research Laboratory, and Beckman Institute University of Illinois at Urbana‐Champaign Urbana Illinois 61801 USA
- Geballe Laboratory for Advanced Materials Stanford University Stanford California 94305 USA
- Department of Bio and Brain Engineering Korea Advanced Institute of Science and Technology (KAIST) 291 Daehak‐ro Yuseong‐gu Daejeon 34141 Republic of Korea
- The Dow Chemical Company 2301 N. Brazosport Blvd., B‐1470 Freeport Texas 77541 USA
- Department of Mechanical Science and Engineering University of Illinois at Urbana‐Champaign Urbana Illinois 61801 USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1434554
- Resource Type:
- Journal Article: Publisher's Accepted Manuscript
- Journal Name:
- Physica Status Solidi. A, Applications and Materials Science
- Additional Journal Information:
- Journal Name: Physica Status Solidi. A, Applications and Materials Science Journal Volume: 215 Journal Issue: 13; Journal ID: ISSN 1862-6300
- Publisher:
- Wiley Blackwell (John Wiley & Sons)
- Country of Publication:
- Germany
- Language:
- English
Citation Formats
Krueger, Neil A., Holsteen, Aaron L., Zhao, Qiujie, Kang, Seung‐Kyun, Ocier, Christian R., Zhou, Weijun, Mensing, Glennys, Rogers, John A., Brongersma, Mark L., and Braun, Paul V. Electrochemical Fabrication of Flat, Polymer‐Embedded Porous Silicon 1D Gradient Refractive Index Microlens Arrays. Germany: N. p., 2018.
Web. doi:10.1002/pssa.201800088.
Krueger, Neil A., Holsteen, Aaron L., Zhao, Qiujie, Kang, Seung‐Kyun, Ocier, Christian R., Zhou, Weijun, Mensing, Glennys, Rogers, John A., Brongersma, Mark L., & Braun, Paul V. Electrochemical Fabrication of Flat, Polymer‐Embedded Porous Silicon 1D Gradient Refractive Index Microlens Arrays. Germany. https://doi.org/10.1002/pssa.201800088
Krueger, Neil A., Holsteen, Aaron L., Zhao, Qiujie, Kang, Seung‐Kyun, Ocier, Christian R., Zhou, Weijun, Mensing, Glennys, Rogers, John A., Brongersma, Mark L., and Braun, Paul V. 2018.
"Electrochemical Fabrication of Flat, Polymer‐Embedded Porous Silicon 1D Gradient Refractive Index Microlens Arrays". Germany. https://doi.org/10.1002/pssa.201800088.
@article{osti_1434554,
title = {Electrochemical Fabrication of Flat, Polymer‐Embedded Porous Silicon 1D Gradient Refractive Index Microlens Arrays},
author = {Krueger, Neil A. and Holsteen, Aaron L. and Zhao, Qiujie and Kang, Seung‐Kyun and Ocier, Christian R. and Zhou, Weijun and Mensing, Glennys and Rogers, John A. and Brongersma, Mark L. and Braun, Paul V.},
abstractNote = {Gradient refractive index (GRIN) optics has attracted considerable interest due to the ability to decouple optical performance from optical element shape. However, despite the utility of GRIN optical components, it remains challenging to fabricate arbitrary GRIN profiles and the available refractive index contrast remains small, particularly at the microscale. Here, using mathematical transformations that the authors developed, the electrochemical waveform required to electrochemically etch arrays of bulk Si microstructures into 1D porous Si (PSi) GRIN microlens arrays (MLAs) is determined. This waveform is then used to form high refractive index contrast MLAs containing precisely‐defined, arbitrary refractive index profiles. The MLAs are then embedded in a transparent optical polymer, mechanically detached from the host Si substrate, and planarized via simple polishing. Cylindrical microlenses and 1D axicons are demonstrated and characterized, and the optical behavior is found to be in agreement with theory. These MLAs could find applications in displays, photodetectors, and optical microscopy.},
doi = {10.1002/pssa.201800088},
url = {https://www.osti.gov/biblio/1434554},
journal = {Physica Status Solidi. A, Applications and Materials Science},
issn = {1862-6300},
number = 13,
volume = 215,
place = {Germany},
year = {Wed Apr 25 00:00:00 EDT 2018},
month = {Wed Apr 25 00:00:00 EDT 2018}
}
Web of Science
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