Large Photothermal Effect in Sub-40 nm h-BN Nanostructures Patterned Via High-Resolution Ion Beam

López, Josué J.; Ambrosio, Antonio; Dai, Siyuan; Huynh, Chuong; Bell, David C.; Lin, Xiao; Rivera, Nicholas; Huang, Shengxi; Ma, Qiong; Eyhusen, Soeren; Kaminer, Ido E.; Watanabe, Kenji; Taniguchi, Takashi; Kong, Jing; Basov, Dimitri N.; Jarillo-Herrero, Pablo; Soljačić, Marin

doi:10.1002/smll.201800072

Title: Large Photothermal Effect in Sub-40 nm h-BN Nanostructures Patterned Via High-Resolution Ion Beam

Journal Article · Tue Apr 24 00:00:00 EDT 2018 · Small

DOI:https://doi.org/10.1002/smll.201800072· OSTI ID:1470540

^[1]; Ambrosio, Antonio ^[2]; Dai, Siyuan ^[3]; Huynh, Chuong ^[4]; Bell, David C. ^[2]; Lin, Xiao ^[5]; Rivera, Nicholas ^[6]; Huang, Shengxi ^[7]; Ma, Qiong ^[6]; Eyhusen, Soeren ^[4]; Kaminer, Ido E. ^[6]; Watanabe, Kenji ^[8]; Taniguchi, Takashi ^[8]; Kong, Jing ^[1]; Basov, Dimitri N. ^[9]; Jarillo-Herrero, Pablo ^[6]; Soljačić, Marin ^[6]

Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Dept. of Electrical Engineering and Computer Science
Harvard Univ., Cambridge MA (United States). Center for Nanoscale Systems
Univ. of California, San Diego, CA (United States). Dept. of Physics
Carl Zeiss Microscopy, LLC, Peabody, MA (United States)
Nanyang Technological Univ., Singapore (Singapore). School of Physical and Mathematical Sciences, Division of Physics and Applied Physics
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Dept. of Physics
The Pennsylvania State Univ., University Park, PA (United States). Dept. of Electrical Engineering
National Inst. for Materials Science, Ibaraki (Japan)
Columbia Univ., New York, NY (United States). Dept. of Physics

The controlled nanoscale patterning of 2D materials is a promising approach for engineering the optoelectronic, thermal, and mechanical properties of these materials to achieve novel functionalities and devices. Herein, high-resolution patterning of hexagonal boron nitride (h-BN) is demonstrated via both helium and neon ion beams and an optimal dosage range for both ions that serve as a baseline for insulating 2D materials is identified. Through this nanofabrication approach, a grating with a 35 nm pitch, individual structure sizes down to 20 nm, and additional nanostructures created by patterning crystal step edges are demonstrated. Raman spectroscopy is used to study the defects induced by the ion beam patterning and is correlated to scanning probe microscopy. Photothermal and scanning near-field optical microscopy measure the resulting near-field absorption and scattering of the nanostructures. These measurements reveal a large photothermal expansion of nanostructured h-BN that is dependent on the height to width aspect ratio of the nanostructures. This effect is attributed to the large anisotropy of the thermal expansion coefficients of h-BN and the nanostructuring implemented. Finally, the photothermal expansion should be present in other van der Waals materials with large anisotropy and can lead to applications such as nanomechanical switches driven by light.

View Accepted Manuscript (DOE)

View Accepted Manuscript (Publisher)

Cite

Export

Save

Research Organization:: Energy Frontier Research Centers (EFRC), Washington D.C. (United States). Center for Excitonics (CE)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001088

OSTI ID:: 1470540

Alternate ID(s):: OSTI ID: 1434374

Journal Information:: Small, Vol. 14, Issue 22; Related Information: CE partners with Massachusetts Institute of Technology (lead); Brookhaven National Laboratory; Harvard University; ISSN 1613-6810

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 11 works

Citation information provided by
Web of Science

References (63)

The nature of negative linear expansion in layer crystals C, Bn, GaS, GaSe and InSe Belenkii, G. L.; Salaev, E. Yu.; Suleimanov, R. A. Solid State Communications, Vol. 53, Issue 11 https://doi.org/10.1016/0038-1098(85)90470-3	journal	March 1985
Synthesis of large-area multilayer hexagonal boron nitride for high material performance Kim, Soo Min; Hsu, Allen; Park, Min Ho Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms9662	journal	October 2015
Synthesis of large single-crystal hexagonal boron nitride grains on Cu–Ni alloy Lu, Guangyuan; Wu, Tianru; Yuan, Qinghong Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms7160	journal	January 2015
Analysis of the vibrational mode spectra of amorphous SiO ₂ films Martinet, C.; Devine, R. A. B. Journal of Applied Physics, Vol. 77, Issue 9 https://doi.org/10.1063/1.359459	journal	May 1995
Enhanced resistance of single-layer graphene to ion bombardment Lopez, J. J.; Greer, F.; Greer, J. R. Journal of Applied Physics, Vol. 107, Issue 10 https://doi.org/10.1063/1.3428466	journal	May 2010
A model for surface damage in ion‐irradiated solids Averback, R. S.; Ghaly, Mai Journal of Applied Physics, Vol. 76, Issue 6 https://doi.org/10.1063/1.357398	journal	September 1994
Continuous Growth of Hexagonal Graphene and Boron Nitride In-Plane Heterostructures by Atmospheric Pressure Chemical Vapor Deposition Han, Gang Hee; Rodríguez-Manzo, Julio A.; Lee, Chan-Woo ACS Nano, Vol. 7, Issue 11 https://doi.org/10.1021/nn404331f	journal	October 2013
Precision cutting and patterning of graphene with helium ions Bell, D. C.; Lemme, M. C.; Stern, L. A. Nanotechnology, Vol. 20, Issue 45 https://doi.org/10.1088/0957-4484/20/45/455301	journal	October 2009
Sub-diffractional volume-confined polaritons in the natural hyperbolic material hexagonal boron nitride Caldwell, Joshua D.; Kretinin, Andrey V.; Chen, Yiguo Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms6221	journal	October 2014
Non-linear excitation of quantum emitters in hexagonal boron nitride multiplayers Schell, Andreas W.; Tran, Toan Trong; Takashima, Hideaki APL Photonics, Vol. 1, Issue 9 https://doi.org/10.1063/1.4961684	journal	September 2016
Tip-enhanced infrared nanospectroscopy via molecular expansion force detection Lu, Feng; Jin, Mingzhou; Belkin, Mikhail A. Nature Photonics, Vol. 8, Issue 4 https://doi.org/10.1038/nphoton.2013.373	journal	January 2014
Imaging of Anomalous Internal Reflections of Hyperbolic Phonon-Polaritons in Hexagonal Boron Nitride Giles, Alexander J.; Dai, Siyuan; Glembocki, Orest J. Nano Letters, Vol. 16, Issue 6 https://doi.org/10.1021/acs.nanolett.6b01341	journal	May 2016
Hyperbolic phonon-polaritons in boron nitride for near-field optical imaging and focusing Li, Peining; Lewin, Martin; Kretinin, Andrey V. RWTH Aachen University https://doi.org/10.18154/rwth-2015-03454	text	January 2015
Tunable Phonon Polaritons in Atomically Thin van der Waals Crystals of Boron Nitride Dai, S.; Fei, Z.; Ma, Q. Science, Vol. 343, Issue 6175 https://doi.org/10.1126/science.1246833	journal	March 2014
Nonlinear Optical Properties and Temperature Dependent Photoluminescence in hBN-GO Heterostructure 2D Material Biswas, Subrata; Tiwary, Chandra S.; Vinod, Soumya The Journal of Physical Chemistry C, Vol. 121, Issue 14 https://doi.org/10.1021/acs.jpcc.6b12834	journal	March 2017
2D materials and van der Waals heterostructures Novoselov, K. S.; Mishchenko, A.; Carvalho, A. Science, Vol. 353, Issue 6298 https://doi.org/10.1126/science.aac9439	journal	July 2016
Atomic-scale photonic hybrids for mid-infrared and terahertz nanophotonics Caldwell, Joshua D.; Vurgaftman, Igor; Tischler, Joseph G. Nature Nanotechnology, Vol. 11, Issue 1 https://doi.org/10.1038/nnano.2015.305	journal	January 2016
SRIM – The stopping and range of ions in matter (2010) Ziegler, James F.; Ziegler, M. D.; Biersack, J. P. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 11-12 https://doi.org/10.1016/j.nimb.2010.02.091	journal	June 2010
The Prospects of a Subnanometer Focused Neon Ion Beam: The prospects of a subnanometer Rahman, F. H. M.; McVey, Shawn; Farkas, Louis Scanning, Vol. 34, Issue 2 https://doi.org/10.1002/sca.20268	journal	July 2011
Hyperbolic phonon-polaritons in boron nitride for near-field optical imaging and focusing Li, Peining; Lewin, Martin; Kretinin, Andrey V. Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms8507	journal	June 2015
Light scattering study of boron nitride microcrystals Nemanich, R. J.; Solin, S. A.; Martin, Richard M. Physical Review B, Vol. 23, Issue 12, p. 6348-6356 https://doi.org/10.1103/PhysRevB.23.6348	journal	June 1981
The anisotropic thermal expansion of boron nitride: I. experimental results and their analysis Yates, B.; Overy, M. J.; Pirgon, O. Philosophical Magazine, Vol. 32, Issue 4 https://doi.org/10.1080/14786437508221624	journal	October 1975
Probing Layer Number and Stacking Order of Few-Layer Graphene by Raman Spectroscopy Hao, Yufeng; Wang, Yingying; Wang, Lei Small, Vol. 6, Issue 2 https://doi.org/10.1002/smll.200901173	journal	January 2010
Raman study of damage extent in graphene nanostructures carved by high energy helium ion beam Hang, Shuojin; Moktadir, Zakaria; Mizuta, Hiroshi Carbon, Vol. 72 https://doi.org/10.1016/j.carbon.2014.01.071	journal	June 2014
Tunable and high-purity room temperature single-photon emission from atomic defects in hexagonal boron nitride Grosso, Gabriele; Moon, Hyowon; Lienhard, Benjamin Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/s41467-017-00810-2	journal	September 2017
Helium bubbles in silicon: Structure and optical properties Siegele, R.; Weatherly, G. C.; Haugen, H. K. Applied Physics Letters, Vol. 66, Issue 11 https://doi.org/10.1063/1.113228	journal	March 1995
Defect Control and n -Doping of Encapsulated Graphene by Helium-Ion-Beam Irradiation Nanda, Gaurav; Goswami, Srijit; Watanabe, Kenji Nano Letters, Vol. 15, Issue 6 https://doi.org/10.1021/acs.nanolett.5b00939	journal	May 2015
Tunable Light–Matter Interaction and the Role of Hyperbolicity in Graphene–hBN System Kumar, Anshuman; Low, Tony; Fung, Kin Hung Nano Letters, Vol. 15, Issue 5 https://doi.org/10.1021/acs.nanolett.5b01191	journal	April 2015
Focused Ion Beam Microscopy and Micromachining Volkert, C. A.; Minor, A. M. MRS Bulletin, Vol. 32, Issue 5 https://doi.org/10.1557/mrs2007.62	journal	May 2007
Nanopatterning and Electrical Tuning of MoS ₂ Layers with a Subnanometer Helium Ion Beam Fox, Daniel S.; Zhou, Yangbo; Maguire, Pierce Nano Letters, Vol. 15, Issue 8 https://doi.org/10.1021/acs.nanolett.5b01673	journal	July 2015
Van der Waals heterostructures Geim, A. K.; Grigorieva, I. V. Nature, Vol. 499, Issue 7459, p. 419-425 https://doi.org/10.1038/nature12385	journal	July 2013
Hunting for Monolayer Boron Nitride: Optical and Raman Signatures Gorbachev, Roman V.; Riaz, Ibtsam; Nair, Rahul R. Small, Vol. 7, Issue 4, p. 465-468 https://doi.org/10.1002/smll.201001628	journal	January 2011
Observation of a Luttinger-liquid plasmon in metallic single-walled carbon nanotubes Shi, Zhiwen; Hong, Xiaoping; Bechtel, Hans A. Nature Photonics, Vol. 9, Issue 8 https://doi.org/10.1038/nphoton.2015.123	journal	July 2015
Neon Ion Beam Lithography (NIBL) Winston, Donald; Manfrinato, Vitor R.; Nicaise, Samuel M. Nano Letters, Vol. 11, Issue 10 https://doi.org/10.1021/nl202447n	journal	October 2011
Etching of Graphene Devices with a Helium Ion Beam Lemme, Max C.; Bell, David C.; Williams, James R. ACS Nano, Vol. 3, Issue 9 https://doi.org/10.1021/nn900744z	journal	August 2009
Two-dimensional atomic crystals Novoselov, K. S.; Jiang, D.; Schedin, F. Proceedings of the National Academy of Sciences, Vol. 102, Issue 30, p. 10451-10453 https://doi.org/10.1073/pnas.0502848102	journal	July 2005
One-Dimensional Electrical Contact to a Two-Dimensional Material Wang, L.; Meric, I.; Huang, P. Y. Science, Vol. 342, Issue 6158 https://doi.org/10.1126/science.1244358	journal	October 2013
Effects of ion bombardment on a two-dimensional target: Atomistic simulations of graphene irradiation Lehtinen, O.; Kotakoski, J.; Krasheninnikov, A. V. Physical Review B, Vol. 81, Issue 15, Article No. 153401 https://doi.org/10.1103/PhysRevB.81.153401	journal	April 2010
Hybrid Surface-Phonon-Plasmon Polariton Modes in Graphene/Monolayer h-BN Heterostructures Brar, Victor W.; Jang, Min Seok; Sherrott, Michelle Nano Letters, Vol. 14, Issue 7 https://doi.org/10.1021/nl501096s	journal	June 2014
Optical nano-imaging of gate-tunable graphene plasmons Chen, Jianing; Badioli, Michela; Alonso-González, Pablo Nature, Vol. 487, Issue 7405 https://doi.org/10.1038/nature11254	journal	June 2012
Gate-tuning of graphene plasmons revealed by infrared nano-imaging Fei, Z.; Rodin, A. S.; Andreev, G. O. Nature, Vol. 487, Issue 7405 https://doi.org/10.1038/nature11253	journal	June 2012
Two-dimensional van der Waals materials Ajayan, Pulickel; Kim, Philip; Banerjee, Kaustav Physics Today, Vol. 69, Issue 9 https://doi.org/10.1063/PT.3.3297	journal	September 2016
Mechanical Detection and Imaging of Hyperbolic Phonon Polaritons in Hexagonal Boron Nitride Ambrosio, Antonio; Jauregui, Luis A.; Dai, Siyuan ACS Nano, Vol. 11, Issue 9 https://doi.org/10.1021/acsnano.7b02323	journal	September 2017
Graphene on hexagonal boron nitride as a tunable hyperbolic metamaterial Dai, S.; Ma, Q.; Liu, M. K. Nature Nanotechnology, Vol. 10, Issue 8 https://doi.org/10.1038/nnano.2015.131	journal	June 2015
Infrared hyperbolic metasurface based on nanostructured van der Waals materials Li, Peining; Dolado, Irene; Alfaro-Mozaz, Francisco Javier Science, Vol. 359, Issue 6378 https://doi.org/10.1126/science.aaq1704	journal	February 2018
Raman Spectrum of Graphene and Graphene Layers Ferrari, A. C.; Meyer, J. C.; Scardaci, V. Physical Review Letters, Vol. 97, Issue 18, Article No. 187401 https://doi.org/10.1103/PhysRevLett.97.187401	journal	October 2006
Resonant Raman scattering in cubic and hexagonal boron nitride Reich, S.; Ferrari, A. C.; Arenal, R. Physical Review B, Vol. 71, Issue 20 https://doi.org/10.1103/PhysRevB.71.205201	journal	May 2005
Subdiffractional focusing and guiding of polaritonic rays in a natural hyperbolic material Dai, S.; Ma, Q.; Andersen, T. Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms7963	journal	April 2015
Polaritons in van der Waals materials Basov, D. N.; Fogler, M. M.; Garcia de Abajo, F. J. Science, Vol. 354, Issue 6309 https://doi.org/10.1126/science.aag1992	journal	October 2016
Patterning, Characterization, and Chemical Sensing Applications of Graphene Nanoribbon Arrays Down to 5 nm Using Helium Ion Beam Lithography Abbas, Ahmad N.; Liu, Gang; Liu, Bilu ACS Nano, Vol. 8, Issue 2 https://doi.org/10.1021/nn405759v	journal	January 2014
WSXM : A software for scanning probe microscopy and a tool for nanotechnology Horcas, I.; Fernández, R.; Gómez-Rodríguez, J. M. Review of Scientific Instruments, Vol. 78, Issue 1 https://doi.org/10.1063/1.2432410	journal	January 2007
Nanomachining with a focused neon beam: A preliminary investigation for semiconductor circuit editing and failure analysis Tan, Shida; Livengood, Richard; Hack, Paul Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6 https://doi.org/10.1116/1.3660797	journal	November 2011
Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams Stanford, Michael G.; Lewis, Brett B.; Mahady, Kyle Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 35, Issue 3 https://doi.org/10.1116/1.4981016	journal	May 2017
Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications Tan, Shida; Livengood, Richard; Shima, Darryl Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 6 https://doi.org/10.1116/1.3511509	journal	November 2010
Isospin Pomeranchuk effect in twisted bilayer graphene Saito, Yu; Yang, Fangyuan; Ge, Jingyuan Nature, Vol. 592, Issue 7853 https://doi.org/10.1038/s41586-021-03409-2	journal	April 2021
Hunting for Monolayer Boron Nitride: Optical and Raman Signatures Gorbachev, R. V.; Riaz, I.; Nair, R. R. arXiv https://doi.org/10.48550/arxiv.1008.2868	text	January 2010
Sub-diffractional, volume-confined polaritons in a natural hyperbolic material: hexagonal boron nitride Caldwell, Joshua D.; Kretinin, Andrey; Chen, Yiguo arXiv https://doi.org/10.48550/arxiv.1404.0494	text	January 2014
Subdiffractional focusing and guiding of polaritonic rays in a natural hyperbolic material Dai, S.; Ma, Q.; Andersen, T. arXiv https://doi.org/10.48550/arxiv.1502.04094	text	January 2015
Tunable light-matter interaction and the role of hyperbolicity in graphene-hBN system Kumar, Anshuman; Low, Tony; Fung, Kin Hung arXiv https://doi.org/10.48550/arxiv.1502.04672	text	January 2015
Imaging of anomalous internal reflections of hyperbolic phonon-polaritons in hexagonal boron nitride Giles, Alexander J.; Dai, Siyuan; Glembocki, Orest J. arXiv https://doi.org/10.48550/arxiv.1604.07251	text	January 2016
2D materials and van der Waals heterostructures Novoselov, K. S.; Mishchenko, A.; Carvalho, A. arXiv https://doi.org/10.48550/arxiv.1608.03059	text	January 2016
Tunable and high purity room-temperature single photon emission from atomic defects in hexagonal boron nitride Grosso, Gabriele; Moon, Hyowon; Lienhard, Benjamin arXiv https://doi.org/10.48550/arxiv.1611.03515	text	January 2016
Two Dimensional Atomic Crystals Novoselov, K. S.; Jiang, D.; Booth, T. arXiv https://doi.org/10.48550/arxiv.cond-mat/0503533	text	January 2005

Cited By (5)

A Review of Recent Applications of Ion Beam Techniques on Nanomaterial Surface Modification: Design of Nanostructures and Energy Harvesting Li, Wenqing; Zhan, Xueying; Song, Xianyin Small, Vol. 15, Issue 31 https://doi.org/10.1002/smll.201901820	journal	June 2019
Time-effective strategies for the fabrication of poly- and single-crystalline gold nano-structures by focused helium ion beam milling Laible, Florian; Dreser, Christoph; Kern, Dieter P. Nanotechnology, Vol. 30, Issue 23 https://doi.org/10.1088/1361-6528/ab0506	journal	March 2019
Selective excitation and imaging of ultraslow phonon polaritons in thin hexagonal boron nitride crystals Ambrosio, Antonio; Tamagnone, Michele; Chaudhary, Kundan Light: Science & Applications, Vol. 7, Issue 1 https://doi.org/10.1038/s41377-018-0039-4	journal	June 2018
Plasmon-enhanced light–matter interactions and applications Yu, Huakang; Peng, Yusi; Yang, Yong npj Computational Materials, Vol. 5, Issue 1 https://doi.org/10.1038/s41524-019-0184-1	journal	April 2019
Selective excitation and imaging of ultraslow phonon polaritons in thin hexagonal boron nitride crystals Ambrosio, Antonio; Tamagnone, Michele; Chaudhary, Kundan arXiv https://doi.org/10.48550/arxiv.1711.04324	preprint	January 2017

Similar Records

Polarization Control via He-Ion Beam Induced Nanofabrication in Layered Ferroelectric Semiconductors

Journal Article · Tue Feb 23 00:00:00 EST 2016 · ACS Applied Materials and Interfaces · OSTI ID:1470540

Belianinov, Alex; Iberi, Vighter; Tselev, Alexander; +7 more

In situ mitigation of subsurface and peripheral focused ion beam damage via simultaneous pulsed laser heating

Journal Article · Tue Feb 16 00:00:00 EST 2016 · Small · OSTI ID:1470540

Stanford, Michael G.; Lewis, Brett B.; Iberi, Vighter O.; +4 more

Spontaneous organization of columnar nanoparticles in Fe-BN nanocomposite films

Journal Article · Sat Jan 15 00:00:00 EST 2005 · Physical Review. B, Condensed Matter and Materials Physics · OSTI ID:1470540

Babonneau, D; Pailloux, F; Eymery, J -P; +4 more

Related Subjects

42 ENGINEERING
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY
solar (photovoltaic)
solid state lighting
photosynthesis (natural and artificial)
charge transport
optics
synthesis (novel materials)
synthesis (self-assembly)
synthesis (scalable processing)
2D materials
helium and neon ion beam fabrication
hexagonal boron nitride (h-BN)
near-field imaging
photothermal effect

Title: Large Photothermal Effect in Sub-40 nm h-BN Nanostructures Patterned Via High-Resolution Ion Beam

Citation Formats

References (63)

Cited By (5)

Similar Records

Related Subjects