Attenuation of spurious responses in electromechanical filters

Olsson, Roy H.; Hietala, Vincent M.

Attenuation of spurious responses in electromechanical filters

Patent · 10 April 2018

OSTI ID:1433842

Olsson, Roy H.; Hietala, Vincent M.

A spur cancelling, electromechanical filter includes a first resonator having a first resonant frequency and one or more first spurious responses, and it also includes, electrically connected to the first resonator, a second resonator having a second resonant frequency and one or more second spurious responses. The first and second resonant frequencies are approximately identical, but the first resonator is physically non-identical to the second resonator. The difference between the resonators makes the respective spurious responses different. This allows for filters constructed from a cascade of these resonators to exhibit reduced spurious responses.

Research Organization:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Number(s):: 9,941,857

Application Number:: 15/072,611

OSTI ID:: 1433842

Country of Publication:: United States

Language:: English

References (10)

A Method for Attenuating the Spurious Responses of Aluminum Nitride Micromechanical Filters Olsson, Roy H.; Nguyen, Janet; Pluym, Tammy Journal of Microelectromechanical Systems, Vol. 23, Issue 5, p. 1198-1207 https://doi.org/10.1109/JMEMS.2014.2308544	journal	October 2014
VHF and UHF mechanically coupled aluminum nitride MEMS filters Olsson, Roy H.; Washburn, Cody M.; Stevens, James E. 2008 IEEE International Frequency Control Symposium https://doi.org/10.1109/FREQ.2008.4623077	conference	May 2008
Temperature-compensated aluminum nitride lamb wave resonators Ling, Chih-ming; Yen, Ting-ta; Lai, Yun-ju IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 57, Issue 3, p. 524-532 https://doi.org/10.1109/TUFFC.2010.1443	journal	March 2010
Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators Zuo, Chengjie; Sinha, Nipun; Piazza, Gianluca Sensors and Actuators A: Physical, Vol. 160, Issue 1-2, p. 132-140 https://doi.org/10.1016/j.sna.2010.04.011	journal	May 2010
Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering Gong, Songbin; Piazza, Gianluca IEEE Transactions on Microwave Theory and Techniques, Vol. 61, Issue 1, p. 403-414 https://doi.org/10.1109/TMTT.2012.2228671	journal	January 2013
Electrically coupled MEMS bandpass filters Pourkamali, Siavash; Ayazi, Farrokh Sensors and Actuators A: Physical, Vol. 122, Issue 2, p. 307-316 https://doi.org/10.1016/j.sna.2005.03.038	journal	August 2005
Origins and mitigation of spurious modes in aluminum nitride microresonators Olsson, Roy H.; Wojciechowski, Kenneth E.; Branch, Darren W. 2010 IEEE International Ultrasonics Symposium https://doi.org/10.1109/ULTSYM.2010.5935667	conference	October 2010
Parallel Lattice Filters Utilizing Aluminum Nitride Contour mode Resonators Wojciechowski, K. E.; Olsson III, R. H. 2010 Solid-State, Actuators, and Microsystems Workshop Technical Digest https://doi.org/10.31438/trf.hh2010.17	conference	June 2010
AlN Microresonator-Based Filters With Multiple Bandwidths at Low Intermediate Frequencies Kim, Bongsang; Olsson, Roy H.; Wojciechowski, Ken E. Journal of Microelectromechanical Systems, Vol. 22, Issue 4, p. 949-961 https://doi.org/10.1109/JMEMS.2013.2251414	journal	August 2013
AlN contour-mode resonators for narrow-band filters above 3 GHz Rinaldi, Matteo; Zuniga, Chiara; Zuo, Chengjie 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum https://doi.org/10.1109/FREQ.2009.5168144	conference	April 2009

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