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Title: Soft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92

Abstract

Develop a compact and efficient x-ray illumination system (i.e., a "front end") for a practical soft­ x-ray projection lithography (SXPL) exposure tool.

Authors:
 [1];  [2];  [3];  [4]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Intel Corp., Santa Clara, CA (United States)
  3. Ultratech Stepper, San Jose, CA (United States)
  4. JAMAR Technology Co., San Diego, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1432981
Report Number(s):
LLNL-TR-748705
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Kania, Don, Salvador, Jack, Markle, David, and Foster, Richard. Soft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92. United States: N. p., 2018. Web. doi:10.2172/1432981.
Kania, Don, Salvador, Jack, Markle, David, & Foster, Richard. Soft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92. United States. doi:10.2172/1432981.
Kania, Don, Salvador, Jack, Markle, David, and Foster, Richard. Thu . "Soft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92". United States. doi:10.2172/1432981. https://www.osti.gov/servlets/purl/1432981.
@article{osti_1432981,
title = {Soft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92},
author = {Kania, Don and Salvador, Jack and Markle, David and Foster, Richard},
abstractNote = {Develop a compact and efficient x-ray illumination system (i.e., a "front end") for a practical soft­ x-ray projection lithography (SXPL) exposure tool.},
doi = {10.2172/1432981},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {3}
}

Technical Report:

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