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Title: New Photolithography Stepping Machine Close Out Report CRADA No. TSB-842-94

Abstract

The semiconductor industry, due to performance driven competition, continues to achieve unprecedented technological advancements. For example, the memory density of DRAM chips increases four fold every three years or so. Advances in integrated circuit technology drive the producers of processing equipment to achieve commensurate advances, or conversely, advances in manufacturing technology allow advances in integrated circuits. A vital U.S. technology addressed by this project is step-and-repeat photolithography. It demands motion control to tens of nanometers, nearly perfect optical systems and competitive throughput of product. The failure to keep this domestic technology competitive and profitable places the whole U.S. semiconductor industry at risk to foreign interests.

Authors:
 [1];  [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1432975
Report Number(s):
LLNL-TR-748957
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 47 OTHER INSTRUMENTATION

Citation Formats

Hale, Layton, and Markle, David. New Photolithography Stepping Machine Close Out Report CRADA No. TSB-842-94. United States: N. p., 2018. Web. doi:10.2172/1432975.
Hale, Layton, & Markle, David. New Photolithography Stepping Machine Close Out Report CRADA No. TSB-842-94. United States. doi:10.2172/1432975.
Hale, Layton, and Markle, David. Thu . "New Photolithography Stepping Machine Close Out Report CRADA No. TSB-842-94". United States. doi:10.2172/1432975. https://www.osti.gov/servlets/purl/1432975.
@article{osti_1432975,
title = {New Photolithography Stepping Machine Close Out Report CRADA No. TSB-842-94},
author = {Hale, Layton and Markle, David},
abstractNote = {The semiconductor industry, due to performance driven competition, continues to achieve unprecedented technological advancements. For example, the memory density of DRAM chips increases four fold every three years or so. Advances in integrated circuit technology drive the producers of processing equipment to achieve commensurate advances, or conversely, advances in manufacturing technology allow advances in integrated circuits. A vital U.S. technology addressed by this project is step-and-repeat photolithography. It demands motion control to tens of nanometers, nearly perfect optical systems and competitive throughput of product. The failure to keep this domestic technology competitive and profitable places the whole U.S. semiconductor industry at risk to foreign interests.},
doi = {10.2172/1432975},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {3}
}

Technical Report:

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