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Title: Application of an Innovative Manufacturing Concept to Process Control—A Neural Network Approach Final Report CRADA No. TC-0342-93

Abstract

The scope of this project is to develop a radically new process-controller system that uses artificial neural networks, which mimic parts of human intelligence. The heart of this controller is a low-cost neural network chip. Such a controller is to be integrated with a new cluster-tools semiconductor-processing system from our industrial partner to construct "smart" sputtering processing equipment for the semi conductor, mass-storage, and display industries.

Authors:
 [1];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Sputtered Films Inc., Santa Barbara, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1431002
Report Number(s):
LLNL-TR-748438
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 99 GENERAL AND MISCELLANEOUS; 97 MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE

Citation Formats

Fu, Chi Yung, and Clarke, Peter. Application of an Innovative Manufacturing Concept to Process Control—A Neural Network Approach Final Report CRADA No. TC-0342-93. United States: N. p., 2018. Web. doi:10.2172/1431002.
Fu, Chi Yung, & Clarke, Peter. Application of an Innovative Manufacturing Concept to Process Control—A Neural Network Approach Final Report CRADA No. TC-0342-93. United States. doi:10.2172/1431002.
Fu, Chi Yung, and Clarke, Peter. Thu . "Application of an Innovative Manufacturing Concept to Process Control—A Neural Network Approach Final Report CRADA No. TC-0342-93". United States. doi:10.2172/1431002. https://www.osti.gov/servlets/purl/1431002.
@article{osti_1431002,
title = {Application of an Innovative Manufacturing Concept to Process Control—A Neural Network Approach Final Report CRADA No. TC-0342-93},
author = {Fu, Chi Yung and Clarke, Peter},
abstractNote = {The scope of this project is to develop a radically new process-controller system that uses artificial neural networks, which mimic parts of human intelligence. The heart of this controller is a low-cost neural network chip. Such a controller is to be integrated with a new cluster-tools semiconductor-processing system from our industrial partner to construct "smart" sputtering processing equipment for the semi conductor, mass-storage, and display industries.},
doi = {10.2172/1431002},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {3}
}

Technical Report:

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