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Title: Illumination Source for Flat Panel Display Final Report CRADA No. TC-320-92-1

Abstract

The overall technical objective of this project was to collaboratively design, construct and integrate a prototype solid state UV laser into a flat panel lithography system.

Authors:
 [1];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. MRS Technology Inc., Chelmsford, MA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1431001
Report Number(s):
LLNL-TR-748439
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 97 MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE

Citation Formats

Hackel, Lloyd, and Lucas, Mark. Illumination Source for Flat Panel Display Final Report CRADA No. TC-320-92-1. United States: N. p., 2018. Web. doi:10.2172/1431001.
Hackel, Lloyd, & Lucas, Mark. Illumination Source for Flat Panel Display Final Report CRADA No. TC-320-92-1. United States. doi:10.2172/1431001.
Hackel, Lloyd, and Lucas, Mark. Thu . "Illumination Source for Flat Panel Display Final Report CRADA No. TC-320-92-1". United States. doi:10.2172/1431001. https://www.osti.gov/servlets/purl/1431001.
@article{osti_1431001,
title = {Illumination Source for Flat Panel Display Final Report CRADA No. TC-320-92-1},
author = {Hackel, Lloyd and Lucas, Mark},
abstractNote = {The overall technical objective of this project was to collaboratively design, construct and integrate a prototype solid state UV laser into a flat panel lithography system.},
doi = {10.2172/1431001},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {3}
}

Technical Report:

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