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Title: Three Dimensional Microlithography Final Report CRADA No. TC-0174-91

Abstract

The project is a relationship between the Lawrence Livermore National Laboratory (LLNL) and microScape (formerly AEtek Corporation).

Authors:
 [1];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. microScape (formerly AEtek Corporation), Palo Alto, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1430953
Report Number(s):
LLNL-TR-747883
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Beat, Thomas, and Cotter, Raymond. Three Dimensional Microlithography Final Report CRADA No. TC-0174-91. United States: N. p., 2018. Web. doi:10.2172/1430953.
Beat, Thomas, & Cotter, Raymond. Three Dimensional Microlithography Final Report CRADA No. TC-0174-91. United States. doi:10.2172/1430953.
Beat, Thomas, and Cotter, Raymond. Wed . "Three Dimensional Microlithography Final Report CRADA No. TC-0174-91". United States. doi:10.2172/1430953. https://www.osti.gov/servlets/purl/1430953.
@article{osti_1430953,
title = {Three Dimensional Microlithography Final Report CRADA No. TC-0174-91},
author = {Beat, Thomas and Cotter, Raymond},
abstractNote = {The project is a relationship between the Lawrence Livermore National Laboratory (LLNL) and microScape (formerly AEtek Corporation).},
doi = {10.2172/1430953},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Mar 14 00:00:00 EDT 2018},
month = {Wed Mar 14 00:00:00 EDT 2018}
}

Technical Report:

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