skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Three Dimensional Microlithography Final Report CRADA No. TC-0174-91

Authors:
;
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1430953
Report Number(s):
LLNL-TR-747883
DOE Contract Number:
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Beat, T, and Cotter, R. Three Dimensional Microlithography Final Report CRADA No. TC-0174-91. United States: N. p., 2018. Web. doi:10.2172/1430953.
Beat, T, & Cotter, R. Three Dimensional Microlithography Final Report CRADA No. TC-0174-91. United States. doi:10.2172/1430953.
Beat, T, and Cotter, R. Wed . "Three Dimensional Microlithography Final Report CRADA No. TC-0174-91". United States. doi:10.2172/1430953. https://www.osti.gov/servlets/purl/1430953.
@article{osti_1430953,
title = {Three Dimensional Microlithography Final Report CRADA No. TC-0174-91},
author = {Beat, T and Cotter, R},
abstractNote = {},
doi = {10.2172/1430953},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Mar 14 00:00:00 EDT 2018},
month = {Wed Mar 14 00:00:00 EDT 2018}
}

Technical Report:

Save / Share: