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Title: Development of Critical Technologies of Soft X-Ray Lithography Final Report CRADA No. TC-0503-93

Authors:
; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1430945
Report Number(s):
LLNL-TR-747753
DOE Contract Number:
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION; 42 ENGINEERING

Citation Formats

Kania, D, Kyser, D, Meisburger, D, Suzuki, H, Bruning, J, and Economou, N. Development of Critical Technologies of Soft X-Ray Lithography Final Report CRADA No. TC-0503-93. United States: N. p., 2018. Web. doi:10.2172/1430945.
Kania, D, Kyser, D, Meisburger, D, Suzuki, H, Bruning, J, & Economou, N. Development of Critical Technologies of Soft X-Ray Lithography Final Report CRADA No. TC-0503-93. United States. doi:10.2172/1430945.
Kania, D, Kyser, D, Meisburger, D, Suzuki, H, Bruning, J, and Economou, N. Tue . "Development of Critical Technologies of Soft X-Ray Lithography Final Report CRADA No. TC-0503-93". United States. doi:10.2172/1430945. https://www.osti.gov/servlets/purl/1430945.
@article{osti_1430945,
title = {Development of Critical Technologies of Soft X-Ray Lithography Final Report CRADA No. TC-0503-93},
author = {Kania, D and Kyser, D and Meisburger, D and Suzuki, H and Bruning, J and Economou, N},
abstractNote = {},
doi = {10.2172/1430945},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 13 00:00:00 EDT 2018},
month = {Tue Mar 13 00:00:00 EDT 2018}
}

Technical Report:

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