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Title: Defect Recognition In Regularly Patterned Substrates Using Optical Fourier Transform Techniques Final Report CRADA No. TSB-1164-95

Abstract

The project is a relationship between the Lawrence Livermore National Laboratory (LLNL) and Pixel Systems, Inc.

Authors:
 [1];  [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1430944
Report Number(s):
LLNL-TR-747817
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 97 MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE

Citation Formats

Glass, R., and Hendler, L.. Defect Recognition In Regularly Patterned Substrates Using Optical Fourier Transform Techniques Final Report CRADA No. TSB-1164-95. United States: N. p., 2018. Web. doi:10.2172/1430944.
Glass, R., & Hendler, L.. Defect Recognition In Regularly Patterned Substrates Using Optical Fourier Transform Techniques Final Report CRADA No. TSB-1164-95. United States. doi:10.2172/1430944.
Glass, R., and Hendler, L.. Tue . "Defect Recognition In Regularly Patterned Substrates Using Optical Fourier Transform Techniques Final Report CRADA No. TSB-1164-95". United States. doi:10.2172/1430944. https://www.osti.gov/servlets/purl/1430944.
@article{osti_1430944,
title = {Defect Recognition In Regularly Patterned Substrates Using Optical Fourier Transform Techniques Final Report CRADA No. TSB-1164-95},
author = {Glass, R. and Hendler, L.},
abstractNote = {The project is a relationship between the Lawrence Livermore National Laboratory (LLNL) and Pixel Systems, Inc.},
doi = {10.2172/1430944},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 13 00:00:00 EDT 2018},
month = {Tue Mar 13 00:00:00 EDT 2018}
}

Technical Report:

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