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Structurally controlled deposition of silicon onto nanowires

Patent ·
OSTI ID:1429075
; ; ; ;

Provided herein are nanostructures for lithium ion battery electrodes and methods of fabrication. In some embodiments, a nanostructure template coated with a silicon coating is provided. The silicon coating may include a non-conformal, more porous layer and a conformal, denser layer on the non-conformal, more porous layer. In some embodiments, two different deposition processes, e.g., a PECVD layer to deposit the non-conformal layer and a thermal CVD process to deposit the conformal layer, are used. Anodes including the nanostructures have longer cycle lifetimes than anodes made using either a PECVD or thermal CVD method alone.

Research Organization:
Amprius, Inc., Sunnyvale, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
EE0005474
Assignee:
Amprius, Inc. (Sunnyvale, CA)
Patent Number(s):
9,923,201
Application Number:
14/710,103
OSTI ID:
1429075
Country of Publication:
United States
Language:
English

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