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Title: Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1]
  1. Physical and Life Sciences Directorate, Lawrence Livermore National Laboratory, Livermore, California 94550
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Org.:
DOE - BASIC ENERGY SCIENCES
OSTI Identifier:
1427850
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 36; Journal Issue: 2; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society/AIP
Country of Publication:
United States
Language:
ENGLISH

Citation Formats

Martin, Aiden A., Depond, Philip J., Bagge-Hansen, Michael, Lee, Jonathan R. I., Yoo, Jae-Hyuck, Elhadj, Selim, Matthews, Manyalibo J., and van Buuren, Tony. Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction. United States: N. p., 2018. Web. doi:10.1116/1.5019742.
Martin, Aiden A., Depond, Philip J., Bagge-Hansen, Michael, Lee, Jonathan R. I., Yoo, Jae-Hyuck, Elhadj, Selim, Matthews, Manyalibo J., & van Buuren, Tony. Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction. United States. doi:10.1116/1.5019742.
Martin, Aiden A., Depond, Philip J., Bagge-Hansen, Michael, Lee, Jonathan R. I., Yoo, Jae-Hyuck, Elhadj, Selim, Matthews, Manyalibo J., and van Buuren, Tony. Thu . "Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction". United States. doi:10.1116/1.5019742.
@article{osti_1427850,
title = {Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction},
author = {Martin, Aiden A. and Depond, Philip J. and Bagge-Hansen, Michael and Lee, Jonathan R. I. and Yoo, Jae-Hyuck and Elhadj, Selim and Matthews, Manyalibo J. and van Buuren, Tony},
abstractNote = {},
doi = {10.1116/1.5019742},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
issn = {2166-2746},
number = 2,
volume = 36,
place = {United States},
year = {2018},
month = {3}
}