Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface

MoberlyChan, Warren J.; Adams, David P.; Aziz, Michael J.; Hobler, Gerhard; Schenkel, Thomas

doi:10.1557/mrs2007.66

Title: Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface

Journal Article · Tue May 01 00:00:00 EDT 2007 · MRS Bulletin

DOI:https://doi.org/10.1557/mrs2007.66· OSTI ID:1427016

MoberlyChan, Warren J. ^[1]; Adams, David P. ^[2]; Aziz, Michael J. ^[3]; Hobler, Gerhard ^[4]; Schenkel, Thomas ^[5]

Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Harvard Univ., Cambridge, MA (United States)
Univ. Wien (Austria)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

This paper considers the fundamentals of what happens in a solid when it is impacted by a medium-energy gallium ion. The study of the ion/sample interaction at the nanometer scale is applicable to most focused ion beam (FIB)–based work even if the FIB/sample interaction is only a step in the process, for example, micromachining or microelectronics device processing. Whereas the objective in other articles in this issue is to use the FIB tool to characterize a material or to machine a device or transmission electron microscopy sample, the goal of the FIB in this article is to have the FIB/sample interaction itself become the product. To that end, the FIB/sample interaction is considered in three categories according to geometry: below, at, and above the surface. First, the FIB ions can penetrate the top atom layer(s) and interact below the surface. Ion implantation and ion damage on flat surfaces have been comprehensively examined; however, FIB applications require the further investigation of high doses in three-dimensional profiles. Second, the ions can interact at the surface, where a morphological instability can lead to ripples and surface self-organization, which can depend on boundary conditions for site-specific and compound FIB processing. Third, the FIB may interact above the surface (and/or produce secondary particles that interact above the surface). Such ion beam–assisted deposition, FIB–CVD (chemical vapor deposition), offers an elaborate complexity in three dimensions with an FIB using a gas injection system. Finally, at the nanometer scale, these three regimes—below, at, and above the surface—can require an interdependent understanding to be judiciously controlled by the FIB.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Harvard Univ., Cambridge, MA (United States); Univ. Wien (Austria)

Sponsoring Organization:: USDOE; Harvard Univ. (United States); US Army Research Office (ARO); Austrian Science Fund (FWF)

Grant/Contract Number:: AC04-94AL85000; W-7405-Eng-48; AC02-05CH11231; 5108379-01; MOD707501; 15872-N08

OSTI ID:: 1427016

Report Number(s):: SAND2007-0183J; 524271

Journal Information:: MRS Bulletin, Vol. 32, Issue 5; ISSN 0883-7694

Publisher:: Materials Research SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 79 works

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References (106)

A silicon-based nuclear spin quantum computer Kane, B. E. Nature, Vol. 393, Issue 6681 https://doi.org/10.1038/30156	journal	May 1998
Shocks in Ion Sputtering Sharpen Steep Surface Features Chen, H. H. Science, Vol. 310, Issue 5746 https://doi.org/10.1126/science.1117219	journal	October 2005
Focused ion beam stimulated deposition of aluminum from trialkylamine alanes Gross, M. E.; Harriott, L. R.; Opila, R. L. Journal of Applied Physics, Vol. 68, Issue 9 https://doi.org/10.1063/1.346140	journal	November 1990
Roughening and ripple instabilities on ion-bombarded Si Carter, G.; Vishnyakov, V. Physical Review B, Vol. 54, Issue 24 https://doi.org/10.1103/PhysRevB.54.17647	journal	December 1996
Nanometer-Scale Arrangement of Human Serum Albumin by Adsorption on Defect Arrays Created with a Finely Focused Ion Beam Bergman, Anna A.; Buijs, Jos; Herbig, Jens Langmuir, Vol. 14, Issue 24 https://doi.org/10.1021/la980642o	journal	November 1998
Reliable performance Schenkel, Thomas Nature Materials, Vol. 4, Issue 11 https://doi.org/10.1038/nmat1514	journal	November 2005
Ion and electron beam assisted growth of nanometric SimOn structures for near-field microscopy Sánchez, E. J.; Krug, J. T.; Xie, X. S. Review of Scientific Instruments, Vol. 73, Issue 11 https://doi.org/10.1063/1.1511801	journal	November 2002
Dissipative continuum model for self-organized pattern formation during ion-beam erosion Facsko, S.; Bobek, T.; Stahl, A. Physical Review B, Vol. 69, Issue 15 https://doi.org/10.1103/PhysRevB.69.153412	journal	April 2004
Theory of ripple topography induced by ion bombardment Bradley, R. Mark; Harper, James M. E. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 6, Issue 4 https://doi.org/10.1116/1.575561	journal	July 1988
Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters Ozkan, A. M.; Malshe, A. P.; Railkar, T. A. Applied Physics Letters, Vol. 75, Issue 23 https://doi.org/10.1063/1.125439	journal	December 1999
Submicron Mask Repair Using Focused Ion Beam Technology Yamamoto, Masahiro; Sato, Mitsuyoshi; Kyogoku, Hideaki 1986 Microlithography Conferences, SPIE Proceedings https://doi.org/10.1117/12.963674	conference	June 1986
Strategies for integration of donor electron spin qubits in silicon Schenkel, T.; Liddle, J. A.; Bokor, J. Microelectronic Engineering, Vol. 83, Issue 4-9 https://doi.org/10.1016/j.mee.2006.01.234	journal	April 2006
Controlled shallow single-ion implantation in silicon using an active substrate for sub-20‐keV ions Jamieson, D. N.; Yang, C.; Hopf, T. Applied Physics Letters, Vol. 86, Issue 20 https://doi.org/10.1063/1.1925320	journal	May 2005
Formation of a few nanometer wide holes in membranes with a dual beam focused ion beam system Schenkel, T.; Radmilovic, V.; Stach, E. A. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1622935	journal	January 2003
Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams Gamo, Kenji; Takakura, Nobuyuki; Samoto, Norihiko Japanese Journal of Applied Physics, Vol. 23, Issue Part 2, No. 1 https://doi.org/10.1143/JJAP.23.L293	journal	May 1984
Lateral growth of focused ion beam deposited platinum for stencil mask repair DeMarco, Anthony J.; Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue 6 https://doi.org/10.1116/1.590971	journal	January 1999
Method to characterize the three-dimensional distribution of focused ion beam induced damage in silicon after 50 keV Ga+ irradiation Lugstein, A.; Brezna, W.; Hobler, G. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 21, Issue 5 https://doi.org/10.1116/1.1590964	journal	September 2003
Comparison of Transmission Electron Microscope Cross Sections of Amorphous Regions in Ion Implanted Silicon with Point-Defect Density Calculations Cerva, H. Journal of The Electrochemical Society, Vol. 139, Issue 12 https://doi.org/10.1149/1.2069134	journal	January 1992
Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition Morita, Takahiko; Kometani, Reo; Watanabe, Keiichiro Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1630329	journal	January 2003
Evidence for acoustic waves induced by focused ion beams Teichert, Jochen; Bischoff, Lothar; Köhler, Bernd Applied Physics Letters, Vol. 69, Issue 11 https://doi.org/10.1063/1.117999	journal	September 1996
Nanostructuring surfaces by ion sputtering Valbusa, U.; Boragno, C.; Mongeot, F. Buatier de Journal of Physics: Condensed Matter, Vol. 14, Issue 35 https://doi.org/10.1088/0953-8984/14/35/301	journal	August 2002
Lateral templating of self-organized ripple morphologies during focused ion beam milling of Ge Ichim, Stefan; Aziz, Michael J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 3 https://doi.org/10.1116/1.1897711	journal	January 2005
Development of focused ion beam systems with various ion species Ji, Qing; Leung, Ka-Ngo; King, Tsu-Jae Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 241, Issue 1-4 https://doi.org/10.1016/j.nimb.2005.07.039	journal	December 2005
Modeling of sputtering and redeposition in focused‐ion‐beam trench milling Ishitani, Tohru; Ohnishi, Tsuyoshi Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 9, Issue 6 https://doi.org/10.1116/1.577177	journal	November 1991
Electrical conductivity of individual carbon nanotubes Ebbesen, T. W.; Lezec, H. J.; Hiura, H. Nature, Vol. 382, Issue 6586 https://doi.org/10.1038/382054a0	journal	July 1996
Focused ion beam-induced fabrication of tungsten structures Ishida, M.; Fujita, J.; Ichihashi, T. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1627806	journal	January 2003
Implanted gallium-ion concentrations of focused-ion-beam prepared cross sections Ishitani, T. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 4 https://doi.org/10.1116/1.590106	journal	July 1998
Spontaneous Pattern Formation on Ion Bombarded Si(001) Erlebacher, Jonah; Aziz, Michael J.; Chason, Eric Physical Review Letters, Vol. 82, Issue 11 https://doi.org/10.1103/PhysRevLett.82.2330	journal	March 1999
Focused ion beam induced deposition of opaque carbon films Harriott, L. R. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 6, Issue 3 https://doi.org/10.1116/1.584344	journal	May 1988
Focused ion beam induced deposition of low-resistivity gold films Blauner, Patricia G. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 7, Issue 6 https://doi.org/10.1116/1.584465	journal	November 1989
Selective area nucleation for metal chemical vapor deposition using focused ion beams Kubena, R. L. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 6, Issue 6 https://doi.org/10.1116/1.584189	journal	November 1988
Cell wall cutting tool and nano-net fabrication by FIB-CVD for subcellular operations and analysis Kometani, Reo; Funabiki, Ryoko; Hoshino, Takayuki Microelectronic Engineering, Vol. 83, Issue 4-9 https://doi.org/10.1016/j.mee.2006.01.217	journal	April 2006
Secondary ion yield changes in Si and GaAs due to topography changes during O ⁺ ₂ or Cs ⁺ ion bombardment Stevie, F. A.; Kahora, P. M.; Simons, D. S. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 6, Issue 1 https://doi.org/10.1116/1.574972	journal	January 1988
The effects of surface ripples on sputtering erosion rates and secondary ion emission yields Carter, G. Journal of Applied Physics, Vol. 85, Issue 1 https://doi.org/10.1063/1.369408	journal	January 1999
Self-Organized Ordering of Nanostructures Produced by Ion-Beam Sputtering Castro, Mario; Cuerno, Rodolfo; Vázquez, Luis Physical Review Letters, Vol. 94, Issue 1 https://doi.org/10.1103/PhysRevLett.94.016102	journal	January 2005
Focused ion beam technology and applications Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 5, Issue 2 https://doi.org/10.1116/1.583937	journal	March 1987
Ion channeling effects in scanning ion microscopy with a 60 keV Ga+ probe Levi-Setti, Riccardo; Fox, Timothy R.; Lam, Kin Nuclear Instruments and Methods in Physics Research, Vol. 205, Issue 1-2 https://doi.org/10.1016/0167-5087(83)90201-6	journal	January 1983
Focused ion beam sputter yield change as a function of scan speed Santamore, D. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6 https://doi.org/10.1116/1.589643	journal	November 1997
Study of femtosecond laser interaction with wafer-grade silicon Coyne, Edward; Magee, Jonathan; Mannion, Paul OPTO Ireland, SPIE Proceedings https://doi.org/10.1117/12.463752	conference	March 2003
Electrical activation and electron spin coherence of ultralow dose antimony implants in silicon Schenkel, T.; Liddle, J. A.; Persaud, A. Applied Physics Letters, Vol. 88, Issue 11 https://doi.org/10.1063/1.2182068	journal	March 2006
Ripple propagation and velocity dispersion on ion-beam-eroded silicon surfaces Habenicht, S.; Lieb, K. P.; Koch, J. Physical Review B, Vol. 65, Issue 11 https://doi.org/10.1103/PhysRevB.65.115327	journal	March 2002
Focused ion beam induced deposition of platinum Tao, Tao Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 8, Issue 6 https://doi.org/10.1116/1.585167	journal	November 1990
Accurate focused ion beam sculpting of silicon using a variable pixel dwell time approach Adams, D. P.; Vasile, M. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 2 https://doi.org/10.1116/1.2184325	journal	January 2006
Classical and quantum transport in focused-ion-beam-deposited Pt nanointerconnects Lin, J. -F.; Bird, J. P.; Rotkina, L. Applied Physics Letters, Vol. 82, Issue 5 https://doi.org/10.1063/1.1541940	journal	February 2003
Progress in silicon-based quantum computing Clark, R. G.; Brenner, R.; Buehler, T. M. Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences, Vol. 361, Issue 1808 https://doi.org/10.1098/rsta.2003.1221	journal	July 2003
Cryo FIB Applications: Metallographic Etching of Biological Materials; Cryolithography with Ice as an Environmentally Friendly Photoresist MoberlyChan, Wj; Reyntjens, S.; Minor, Am Microscopy and Microanalysis, Vol. 12, Issue S02 https://doi.org/10.1017/S1431927606064063	journal	July 2006
Chemically and geometrically enhanced focused ion beam micromachining Russell, P. E. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 4 https://doi.org/10.1116/1.590197	journal	July 1998
Fib Mask Repair With Microtrim Kaufmann, Henry C.; Thompson, William B.; Dunn, Gregory J. 1986 Microlithography Conferences, SPIE Proceedings https://doi.org/10.1117/12.963669	conference	June 1986
Focused ion beam induced deposition of gold Shedd, G. M.; Lezec, H.; Dubner, A. D. Applied Physics Letters, Vol. 49, Issue 23 https://doi.org/10.1063/1.97287	journal	December 1986
Ion channeling effects on the focused ion beam milling of Cu Kempshall, B. W.; Schwarz, S. M.; Prenitzer, B. I. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 3 https://doi.org/10.1116/1.1368670	journal	January 2001
Microfocused ion beam applications in microelectronics Harriott, L. R. Applied Surface Science, Vol. 36, Issue 1-4 https://doi.org/10.1016/0169-4332(89)90939-2	journal	January 1989
Hierarchical Self-Assembly of Epitaxial Semiconductor Nanostructures Gray, Jennifer L.; Atha, Surajit; Hull, Robert Nano Letters, Vol. 4, Issue 12 https://doi.org/10.1021/nl048443e	journal	December 2004
Lateral Templating for Guided Self-Organization of Sputter Morphologies Cuenat, A.; George, H. B.; Chang, K. -C. Advanced Materials, Vol. 17, Issue 23 https://doi.org/10.1002/adma.200500717	journal	December 2005
Reducing FIB Damage Using Low Energy Ions Giannuzzi, La Microscopy and Microanalysis, Vol. 12, Issue S02 https://doi.org/10.1017/S1431927606065469	journal	July 2006
A phenomenological model of ion-bombardment-induced amorphization and re-crystallization in Si Carter, G. Vacuum, Vol. 80, Issue 5 https://doi.org/10.1016/j.vacuum.2005.08.020	journal	January 2006
Characterization of damage in ion implanted Ge Appleton, B. R.; Holland, O. W.; Narayan, J. Applied Physics Letters, Vol. 41, Issue 8 https://doi.org/10.1063/1.93643	journal	October 1982
Laser‐induced surface structures on diamond films Tosin, P.; Blatter, A.; Lüthy, W. Journal of Applied Physics, Vol. 78, Issue 6 https://doi.org/10.1063/1.359893	journal	September 1995
Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering Facsko, S. Science, Vol. 285, Issue 5433 https://doi.org/10.1126/science.285.5433.1551	journal	September 1999
Focused ion beam fabrication of submicron gold structures Blauner, Patricia G. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 7, Issue 4 https://doi.org/10.1116/1.584803	journal	July 1989
Fabrication of bipolar transistors by maskless ion implantation Reuss, Robert H. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 4, Issue 1 https://doi.org/10.1116/1.583315	journal	January 1986
Selected Area Processing Mayer, Thomas M.; Allen, Susan D. Thin Film Processes https://doi.org/10.1016/B978-0-08-052421-4.50017-4	book	January 1991
The NanoPirani—an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping Puers, R.; Reyntjens, S.; De Bruyker, D. Sensors and Actuators A: Physical, Vol. 97-98 https://doi.org/10.1016/S0924-4247(01)00863-9	journal	April 2002
Transient Topographies of Ion Patterned Si(111) Brown, Ari-David; Erlebacher, Jonah; Chan, Wai-Lun Physical Review Letters, Vol. 95, Issue 5 https://doi.org/10.1103/PhysRevLett.95.056101	journal	July 2005
Study of focused ion beam response of GaAs in the nanoscale regime Lugstein, A.; Basnar, B.; Bertagnolli, E. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6 https://doi.org/10.1116/1.1517261	journal	January 2002
Patterning of diamond and amorphous carbon films using focused ion beams Stanishevsky, A. Thin Solid Films, Vol. 398-399 https://doi.org/10.1016/S0040-6090(01)01318-9	journal	November 2001
Surface Modification Energized by FIB: The Influence of Etch Rates & Aspect Ratio on Ripple Wavelengths MoberlyChan, Warren MRS Proceedings, Vol. 960 https://doi.org/10.1557/PROC-0960-N10-02-LL06-02	journal	January 2006
Morphology of ion-sputtered surfaces Makeev, Maxim A.; Cuerno, Rodolfo; Barabási, Albert-László Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 197, Issue 3-4 https://doi.org/10.1016/S0168-583X(02)01436-2	journal	December 2002
Characteristics of gas-assisted focused ion beam etching Young, R. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 11, Issue 2 https://doi.org/10.1116/1.586708	journal	March 1993
Effect of Crystal Orientation on Imaging Contrast and Sputter Results during Focused Ion Beam Milling of Cu studied by FIB, EBSD, SEM, and AFM Wendt, U.; Nolze, G.; Heyse, H. Microscopy and Microanalysis, Vol. 12, Issue S02 https://doi.org/10.1017/S1431927606061812	journal	July 2006
Study of precursor gases for focused ion beam insulator deposition Edinger, K. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6 https://doi.org/10.1116/1.590497	journal	November 1998
Microstructure of gold grown by ion-induced deposition Ro, Jae Sang; Thompson, Carl V.; Melngailis, J. Thin Solid Films, Vol. 258, Issue 1-2 https://doi.org/10.1016/0040-6090(94)06399-0	journal	March 1995
Laser assisted focused-ion-beam-induced deposition of copper Funatsu, Jun. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 1 https://doi.org/10.1116/1.589023	journal	January 1996
Effects of evolving surface morphology on yield during focused ion beam milling of carbon Adams, D. P.; Mayer, T. M.; Vasile, M. J. Applied Surface Science, Vol. 252, Issue 6 https://doi.org/10.1016/j.apsusc.2005.06.013	journal	January 2006
Surface kinetic study of ion-induced chemical vapor deposition of copper for focused ion beam applications Chiang, T. P.; Sawin, H. H.; Thompson, C. V. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 15, Issue 6 https://doi.org/10.1116/1.580853	journal	November 1997
Focused ion beam stimulated deposition of organic compounds Vasile, M. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 7, Issue 6 https://doi.org/10.1116/1.584655	journal	November 1989
Control of Coulomb blockade characteristics with dot size and density in planar metallic multiple tunnel junctions Ford, E. M.; Ahmed, H. Applied Physics Letters, Vol. 75, Issue 3 https://doi.org/10.1063/1.124395	journal	July 1999
Micromachining and Device Transplantation Using Focused Ion Beam Ishitani, Tohru; Ohnishi, Tsuyoshi; Kawanami, Yoshimi Japanese Journal of Applied Physics, Vol. 29, Issue Part 1, No. 10 https://doi.org/10.1143/JJAP.29.2283	journal	October 1990
Focused ion beam milling of diamond: Effects of H[sub 2]O on yield, surface morphology and microstructure Adams, D. P.; Vasile, M. J.; Mayer, T. M. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1619421	journal	January 2003
Gallium Phase Formation in Cu During 30kV Ga+ FIB Milling Michael, Jr Microscopy and Microanalysis, Vol. 12, Issue S02 https://doi.org/10.1017/S1431927606062015	journal	July 2006
Kinetics of ion-induced ripple formation on Cu(001) surfaces Chan, Wai Lun; Pavenayotin, Niravun; Chason, Eric Physical Review B, Vol. 69, Issue 24 https://doi.org/10.1103/PhysRevB.69.245413	journal	June 2004
Morphology evolution on diamond surfaces during ion sputtering Mayer, T. M.; Adams, D. P.; Vasile, M. J. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 23, Issue 6 https://doi.org/10.1116/1.2110386	journal	November 2005
FIBSIM – dynamic Monte Carlo simulation of compositional and topography changes caused by focused ion beam milling Boxleitner, W.; Hobler, G. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 180, Issue 1-4 https://doi.org/10.1016/S0168-583X(01)00406-2	journal	June 2001
Enhancing semiconductor device performance using ordered dopant arrays Shinada, Takahiro; Okamoto, Shintaro; Kobayashi, Takahiro Nature, Vol. 437, Issue 7062 https://doi.org/10.1038/nature04086	journal	October 2005
Modeling of sputtering erosion/redeposition—status and implications for fusion design Brooks, Jeffrey N. Fusion Engineering and Design, Vol. 60, Issue 4 https://doi.org/10.1016/S0920-3796(02)00007-8	journal	July 2002
Purification of platinum and gold structures after electron-beam-induced deposition Botman, A.; Mulders, J. J. L.; Weemaes, R. Nanotechnology, Vol. 17, Issue 15 https://doi.org/10.1088/0957-4484/17/15/028	journal	July 2006
The role of the ion‐solid interaction in ion‐beam‐induced deposition of gold Dubner, A. D.; Wagner, A.; Melngailis, J. Journal of Applied Physics, Vol. 70, Issue 2 https://doi.org/10.1063/1.349671	journal	July 1991
Focused ion beam sculpting curved shape cavities in crystalline and amorphous targets Adams, D. P.; Vasile, M. J.; Mayer, T. M. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 4 https://doi.org/10.1116/1.2210000	journal	January 2006
Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ion-beam chemical vapor deposition Nakamatsu, Ken-ichiro; Nagase, Masao; Igaki, Jun-ya Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6 https://doi.org/10.1116/1.2132329	journal	January 2005
Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited material Reyntjens, S.; Puers, R. Journal of Micromechanics and Microengineering, Vol. 10, Issue 2, p. 181-188 https://doi.org/10.1088/0960-1317/10/2/314	journal	May 2000
Roughening instability and ion‐induced viscous relaxation of SiO ₂ surfaces Mayer, T. M.; Chason, E.; Howard, A. J. Journal of Applied Physics, Vol. 76, Issue 3 https://doi.org/10.1063/1.357748	journal	August 1994
Ion beams in silicon processing and characterization Chason, E.; Picraux, S. T.; Poate, J. M. Journal of Applied Physics, Vol. 81, Issue 10 https://doi.org/10.1063/1.365193	journal	May 1997
Advances In Focused-Ion-Beam Repair Techniques Economou, Nicholas P.; Shaver, David C.; Ward, Bill Microlithography Conference, SPIE Proceedings https://doi.org/10.1117/12.940372	conference	June 1987
Lateral control of self-assembled island nucleation by focused-ion-beam micropatterning Kammler, M.; Hull, R.; Reuter, M. C. Applied Physics Letters, Vol. 82, Issue 7 https://doi.org/10.1063/1.1542680	journal	February 2003
Scanning probe tips formed by focused ion beams Vasile, M. J.; Grigg, D. A.; Griffith, J. E. Review of Scientific Instruments, Vol. 62, Issue 9 https://doi.org/10.1063/1.1142334	journal	September 1991
Gas delivery and virtual process chamber concept for gas-assisted material processing in a focused ion beam system Ray, Valery Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 6 https://doi.org/10.1116/1.1815306	journal	January 2004
Focused ion beam induced deposition: a review Melngailis, John Micro - DL tentative, SPIE Proceedings https://doi.org/10.1117/12.47341	conference	August 1991
Depth control of focused ion-beam milling from a numerical model of the sputter process Vasile, Michael J.; Xie, Jushan; Nassar, Raja Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue 6 https://doi.org/10.1116/1.590959	journal	January 1999
Real-time observation of ripple structure formation on a diamond surface under focused ion-beam bombardment Datta, A.; Wu, Yuh-Renn; Wang, Y. L. Physical Review B, Vol. 63, Issue 12 https://doi.org/10.1103/PhysRevB.63.125407	journal	March 2001
Fabrication of nanomagnetic probes via focused ion beam etching and deposition Khizroev, S.; Bain, J. A.; Litvinov, D. Nanotechnology, Vol. 13, Issue 5 https://doi.org/10.1088/0957-4484/13/5/315	journal	September 2002
Principles and mechanisms of ion induced electron emission Baragiola, Raúl A. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 78, Issue 1-4 https://doi.org/10.1016/0168-583X(93)95803-D	journal	May 1993
High brightness inductively coupled plasma source for high current focused ion beam applications Smith, N. S.; Skoczylas, W. P.; Kellogg, S. M. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6 https://doi.org/10.1116/1.2366617	journal	January 2006
A mechanism of surface micro-roughening by ion bombardment Sigmund, Peter Journal of Materials Science, Vol. 8, Issue 11 https://doi.org/10.1007/BF00754888	journal	November 1973
Integration of Scanning Probes and Ion Beams Persaud, A.; Park, S. J.; Liddle, J. A. Nano Letters, Vol. 5, Issue 6 https://doi.org/10.1021/nl0506103	journal	June 2005
Kalypso: a software package for molecular dynamics simulation of atomic collisions at surfaces Karolewski, M. A. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 230, Issue 1-4 https://doi.org/10.1016/j.nimb.2004.12.074	journal	April 2005
Surface Rippling & Ion Etch Yields of Diamond Using a Focused Ion Beam: With or Without Enhanced-Chemistry, Aspect Ratio Regulates Ion Etching MoberlyChan, W. J.; Felter, T. E.; Wall, M. A. Microscopy Today, Vol. 14, Issue 6 https://doi.org/10.1017/S1551929500058855	journal	November 2006
Cross-sectional sample preparation by focused ion beam: A review of ion-sample interaction Ishitani, Tohru; Yaguchi, Toshie Microscopy Research and Technique, Vol. 35, Issue 4 https://doi.org/10.1002/(SICI)1097-0029(19961101)35:4<320::AID-JEMT3>3.0.CO;2-Q	journal	November 1996

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Using coupled micropillar compression and micro-Laue diffraction to investigate deformation mechanisms in a complex metallic alloy Al ₁₃ Co ₄ Bhowmik, Ayan; Dolbnya, Igor P.; Britton, T. Ben Applied Physics Letters, Vol. 108, Issue 11 https://doi.org/10.1063/1.4944486	journal	March 2016
Comparison of technologies for nano device prototyping with a special focus on ion beams: A review Bruchhaus, L.; Mazarov, P.; Bischoff, L. Applied Physics Reviews, Vol. 4, Issue 1 https://doi.org/10.1063/1.4972262	journal	March 2017
Ion irradiation of III–V semiconductor surfaces: From self-assembled nanostructures to plasmonic crystals Kang, M.; Goldman, R. S. Applied Physics Reviews, Vol. 6, Issue 4 https://doi.org/10.1063/1.5079908	journal	December 2019
Artifacts from manganese reduction in rock samples prepared by focused ion beam (FIB) slicing for X-ray microspectroscopy Macholdt, Dorothea S.; Förster, Jan-David; Müller, Maren Geoscientific Instrumentation, Methods and Data Systems, Vol. 8, Issue 1 https://doi.org/10.5194/gi-8-97-2019	journal	January 2019
Nanopore Electrochemistry: A Nexus for Molecular Control of Electron Transfer Reactions Fu, Kaiyu; Bohn, Paul W. ACS Central Science, Vol. 4, Issue 1 https://doi.org/10.1021/acscentsci.7b00576	journal	December 2017
Light Transmission via Subwavelength Apertures in Metallic Thin Films G. Rivera, V. A.; A., F.; B., O. Plasmonics - Principles and Applications https://doi.org/10.5772/50807	book	October 2012

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