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Title: Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge

Abstract

In this paper, the spatial structure and temporal evolution of the electric fields in a sheath formed in a dual frequency, 300 mm capacitive argon discharge are measured as functions of relative mixing between a low frequency current and a high frequency current. It is found that the overall structure of the sheath (potential across the sheath and the thickness of the sheath) are dominated by the lower frequency component while (smaller) oscillations in these quantities are dictated by the higher frequency component. Finally, comparisons of the measured spatial and temporal profiles are made for Lieberman's and Robiche et al sheath model and with a particle in a cell calculation.

Authors:
 [1];  [1];  [1];  [2];  [2];  [2];  [2]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  2. Applied Materials, Sunnyvale, CA (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Applied Materials, Sunnyvale, CA (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1426991
Report Number(s):
SAND2007-0646J
Journal ID: ISSN 0963-0252; 524094
Grant/Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 16; Journal Issue: 2; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats

Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, T., Hammond, E., and Holland, J. Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge. United States: N. p., 2007. Web. doi:10.1088/0963-0252/16/2/016.
Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, T., Hammond, E., & Holland, J. Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge. United States. doi:10.1088/0963-0252/16/2/016.
Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, T., Hammond, E., and Holland, J. Mon . "Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge". United States. doi:10.1088/0963-0252/16/2/016. https://www.osti.gov/servlets/purl/1426991.
@article{osti_1426991,
title = {Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge},
author = {Barnat, E. V. and Miller, P. A. and Hebner, G. A. and Paterson, A. M. and Panagopoulos, T. and Hammond, E. and Holland, J.},
abstractNote = {In this paper, the spatial structure and temporal evolution of the electric fields in a sheath formed in a dual frequency, 300 mm capacitive argon discharge are measured as functions of relative mixing between a low frequency current and a high frequency current. It is found that the overall structure of the sheath (potential across the sheath and the thickness of the sheath) are dominated by the lower frequency component while (smaller) oscillations in these quantities are dictated by the higher frequency component. Finally, comparisons of the measured spatial and temporal profiles are made for Lieberman's and Robiche et al sheath model and with a particle in a cell calculation.},
doi = {10.1088/0963-0252/16/2/016},
journal = {Plasma Sources Science and Technology},
number = 2,
volume = 16,
place = {United States},
year = {Mon Mar 12 00:00:00 EDT 2007},
month = {Mon Mar 12 00:00:00 EDT 2007}
}

Journal Article:
Free Publicly Available Full Text
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Cited by: 15 works
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