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Title: TEM Sample Preparation and FIB-Induced Damage


Abstract not provided.

; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
Report Number(s):
Journal ID: ISSN 0883-7694; applab; 524111
DOE Contract Number:
Resource Type:
Journal Article
Resource Relation:
Journal Name: MRS Bulletin; Journal Volume: 32; Journal Issue: 05
Country of Publication:
United States

Citation Formats

Mayer, Joachim, Giannuzzi, Lucille A., Kamino, Takeo, and Michael, Joseph. TEM Sample Preparation and FIB-Induced Damage. United States: N. p., 2007. Web. doi:10.1557/mrs2007.63.
Mayer, Joachim, Giannuzzi, Lucille A., Kamino, Takeo, & Michael, Joseph. TEM Sample Preparation and FIB-Induced Damage. United States. doi:10.1557/mrs2007.63.
Mayer, Joachim, Giannuzzi, Lucille A., Kamino, Takeo, and Michael, Joseph. Tue . "TEM Sample Preparation and FIB-Induced Damage". United States. doi:10.1557/mrs2007.63.
title = {TEM Sample Preparation and FIB-Induced Damage},
author = {Mayer, Joachim and Giannuzzi, Lucille A. and Kamino, Takeo and Michael, Joseph},
abstractNote = {Abstract not provided.},
doi = {10.1557/mrs2007.63},
journal = {MRS Bulletin},
number = 05,
volume = 32,
place = {United States},
year = {Tue May 01 00:00:00 EDT 2007},
month = {Tue May 01 00:00:00 EDT 2007}
  • A recent emergence of a cross-beam scanning electron microscopy (SEM)/focused-ion-beam (FIB) system have given choice to fabricate cross-sectional transmission electron microscopy (TEM) specimen of thin film multilayer sample. A 300 layer pair thin film multilayer sample of W/B{sub 4}C was used to demonstrate the specimen lift-out technique in very short time as compared to conventional cross-sectional sample preparation technique. To get large area electron transparent sample, sample prepared by FIB is followed by Ar{sup +} ion polishing at 2 kV with grazing incident. The prepared cross-sectional sample was characterized by transmission electron microscope.
  • Preparing high-quality transmission electron microscopy (TEM) specimens is of paramount importance in TEM studies. The development of the focused ion beam (FIB) microscope has greatly enhanced TEM specimen preparation capabilities. In recent years, various FIB-TEM foil preparation techniques have been developed. However, the currently available techniques fail to produce TEM specimens from fragile and ultra-fine specimens such as fine fibers. In this paper, the conventional FIB-TEM specimen preparation techniques are reviewed, and their advantages and shortcomings are compared. In addition, a new technique suitable to prepare TEM samples from ultra-fine specimens is demonstrated.
  • Cited by 3
  • TEM sample preparation using focused ion beam technology has become widely utilized in the semiconductor industry. Common problems or artifacts associated with TEM sample preparation using the focused ion beam technique are reported. Examples of such problems and artifacts observed are given. Based on the qualitative results of the study of some of the problems/artifacts, ways to avoid/minimize them are suggested. Some application examples of this technique for preparing very difficult samples for TEM analysis are described.