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Title: Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]

Abstract

Radio frequency microelectromechanical system (RF MEMS) devices are microscale devices that achieve superior performance relative to other technologies by taking advantage of the accuracy, precision, materials, and miniaturization available through microfabrication. To do this, these devices use their mechanical and electrical properties to perform a specific RF electrical function such as switching, transmission, or filtering. RF MEMS has been a popular area of research since the early 1990s, and within the last several years, the technology has matured sufficiently for commercialization and use in commercial market systems.

Authors:
 [1];  [2]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  2. Defense Advanced Research Projects Agency (DARPA), Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1426903
Report Number(s):
SAND-2014-16492J
534434
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Book
Resource Relation:
Related Information: Part of Wiley Encyclopedia of Electrical and Electronics Engineering
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; radio frequency microelectromechanical systems; micromachining; acoustic filters; microwave switches

Citation Formats

Nordquist, Christopher, and Olsson, Roy H. Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]. United States: N. p., 2014. Web. doi:10.1002/047134608X.W8229.
Nordquist, Christopher, & Olsson, Roy H. Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]. United States. doi:10.1002/047134608X.W8229.
Nordquist, Christopher, and Olsson, Roy H. Mon . "Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]". United States. doi:10.1002/047134608X.W8229. https://www.osti.gov/servlets/purl/1426903.
@article{osti_1426903,
title = {Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]},
author = {Nordquist, Christopher and Olsson, Roy H.},
abstractNote = {Radio frequency microelectromechanical system (RF MEMS) devices are microscale devices that achieve superior performance relative to other technologies by taking advantage of the accuracy, precision, materials, and miniaturization available through microfabrication. To do this, these devices use their mechanical and electrical properties to perform a specific RF electrical function such as switching, transmission, or filtering. RF MEMS has been a popular area of research since the early 1990s, and within the last several years, the technology has matured sufficiently for commercialization and use in commercial market systems.},
doi = {10.1002/047134608X.W8229},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {12}
}

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  • Herrick, K. J.; Schwarz, T. A.; Katehi, L. P. B.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 46, Issue 6
  • DOI: 10.1109/22.681198

Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications
journal, November 2012

  • Pulskamp, Jeffrey S.; Polcawich, Ronald G.; Rudy, Ryan Q.
  • MRS Bulletin, Vol. 37, Issue 11
  • DOI: 10.1557/mrs.2012.269

Positioning FBAR technology in the frequency and timing domain
journal, March 2012

  • Ruby, R.; Small, M.; Bi, F.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 59, Issue 3
  • DOI: 10.1109/TUFFC.2012.2202

PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)
journal, May 1999

  • Ruby, R.; Bradley, P.; Larson, J.D.
  • Electronics Letters, Vol. 35, Issue 10, p. 794-795
  • DOI: 10.1049/el:19990559

A low-loss silicon-on-silicon DC-110-GHz resonance-free package
journal, February 2006

  • Byung-Wook Min, ; Rebeiz, G. M.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 54, Issue 2
  • DOI: 10.1109/TMTT.2005.862655

A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation
journal, January 1999

  • Zhou, Shifang; Sun, Xi-Qing; Carr, William N.
  • Journal of Micromechanics and Microengineering, Vol. 9, Issue 1
  • DOI: 10.1088/0960-1317/9/1/305

Self-assembling MEMS variable and fixed RF inductors
journal, January 2001

  • Lubecke, V. M.; Barber, B.; Chan, E.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 49, Issue 11
  • DOI: 10.1109/22.963142

Noncontact measurement of charge induced voltage shift in capacitive MEM-switches
journal, September 2003

  • Reid, J. R.; Webster, R. T.; Starman, L. A.
  • IEEE Microwave and Wireless Components Letters, Vol. 13, Issue 9
  • DOI: 10.1109/LMWC.2003.817124

Low-Loss Analog and Digital Reflection-Type MEMS Phase Shifters With 1 : 3 Bandwidth
journal, January 2004

  • Lee, S.; Park, J. -H.; Kim, H. -T.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 52, Issue 1
  • DOI: 10.1109/TMTT.2003.821275

Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation
journal, April 2005


High-Reliability Miniature RF-MEMS Switched Capacitors
journal, April 2008

  • Lakshminarayanan, B.; Mercier, D.; Rebeiz, G. M.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 56, Issue 4
  • DOI: 10.1109/TMTT.2008.919076