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Title: Methods for using atomic layer deposition to produce a film for solid state electrolytes and protective electrode coatings for lithium batteries

Patent ·
OSTI ID:1425947

A method for using atomic layer deposition to produce a film configured for use in an anode, cathode, or solid state electrolyte of a lithium-ion battery or a lithium-sulfur battery. The method includes repeating a cycle for a predetermined number of times in an inert atmosphere. The cycle includes exposing a substrate to a first precursor, purging the substrate with inert gas, exposing the substrate to a second precursor, and purging the substrate with inert gas. The film is a metal sulfide.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Number(s):
9,917,295
Application Number:
14/711,504
OSTI ID:
1425947
Resource Relation:
Patent File Date: 2015 May 13
Country of Publication:
United States
Language:
English

References (18)

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