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Title: Soft X-Ray Lens Development For Point Sources 0.25 (mu)m X-RAY LITHOGRAPHY Final Report CRADA No. TSB-0992-94

Abstract

The purpose of the project was to validate a compact, low -cost, soft x-ray lens design that can provide significant product enhancement to the JTC point x-ray source for submicron lithography. There

Authors:
 [1];  [2]
  1. JMAT Technology Co., San Diego, CA (United States)
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1424643
Report Number(s):
LLNL-TR-746154
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Foster, R., and Lane, S. Soft X-Ray Lens Development For Point Sources 0.25 (mu)m X-RAY LITHOGRAPHY Final Report CRADA No. TSB-0992-94. United States: N. p., 2018. Web. doi:10.2172/1424643.
Foster, R., & Lane, S. Soft X-Ray Lens Development For Point Sources 0.25 (mu)m X-RAY LITHOGRAPHY Final Report CRADA No. TSB-0992-94. United States. doi:10.2172/1424643.
Foster, R., and Lane, S. Fri . "Soft X-Ray Lens Development For Point Sources 0.25 (mu)m X-RAY LITHOGRAPHY Final Report CRADA No. TSB-0992-94". United States. doi:10.2172/1424643. https://www.osti.gov/servlets/purl/1424643.
@article{osti_1424643,
title = {Soft X-Ray Lens Development For Point Sources 0.25 (mu)m X-RAY LITHOGRAPHY Final Report CRADA No. TSB-0992-94},
author = {Foster, R. and Lane, S.},
abstractNote = {The purpose of the project was to validate a compact, low -cost, soft x-ray lens design that can provide significant product enhancement to the JTC point x-ray source for submicron lithography. There},
doi = {10.2172/1424643},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Feb 09 00:00:00 EST 2018},
month = {Fri Feb 09 00:00:00 EST 2018}
}

Technical Report:

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