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Title: Development of Scanning Force Microscope For Inspection of Inner Surfaces Final Report CRADA No. TSB-1451-97

Abstract

LLNL submitted a DOE Patent Docket No.: S-83,902 (RL-13125), Title: Scanning Probe Microscope (SPM) for Inspection of Inner Surfaces of Objects, LLNL Docket No. IL 9720, detailing how existing SPM technology could be modified to allow inspection of inner surfaces. Digital Instruments is the major U.S. manufacturer of SPM instruments and holds a patent that allows manufacture of the key part of an SPM, i.e., the cantilever carrying the sensor-tip in the smallest possible space. This made it possible to construct an SPM that could be brought into the inside of DOE devices of interest.

Authors:
 [1];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Veeco Metrology LLC, Santa Barbara, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1424639
Report Number(s):
LLNL-TR-746150
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Balooch, M., and Kania, D.. Development of Scanning Force Microscope For Inspection of Inner Surfaces Final Report CRADA No. TSB-1451-97. United States: N. p., 2018. Web. doi:10.2172/1424639.
Balooch, M., & Kania, D.. Development of Scanning Force Microscope For Inspection of Inner Surfaces Final Report CRADA No. TSB-1451-97. United States. doi:10.2172/1424639.
Balooch, M., and Kania, D.. Fri . "Development of Scanning Force Microscope For Inspection of Inner Surfaces Final Report CRADA No. TSB-1451-97". United States. doi:10.2172/1424639. https://www.osti.gov/servlets/purl/1424639.
@article{osti_1424639,
title = {Development of Scanning Force Microscope For Inspection of Inner Surfaces Final Report CRADA No. TSB-1451-97},
author = {Balooch, M. and Kania, D.},
abstractNote = {LLNL submitted a DOE Patent Docket No.: S-83,902 (RL-13125), Title: Scanning Probe Microscope (SPM) for Inspection of Inner Surfaces of Objects, LLNL Docket No. IL 9720, detailing how existing SPM technology could be modified to allow inspection of inner surfaces. Digital Instruments is the major U.S. manufacturer of SPM instruments and holds a patent that allows manufacture of the key part of an SPM, i.e., the cantilever carrying the sensor-tip in the smallest possible space. This made it possible to construct an SPM that could be brought into the inside of DOE devices of interest.},
doi = {10.2172/1424639},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Feb 09 00:00:00 EST 2018},
month = {Fri Feb 09 00:00:00 EST 2018}
}

Technical Report:

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