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Title: Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality

Authors:
ORCiD logo [1];  [1];  [1];  [2];  [1]
  1. Department of Materials Science and Engineering and the Institute for Research in Electronics and Applied Physics, University of Maryland, College Park Maryland
  2. IBM TJ Watson Research Center, Yorktown Heights New York
Publication Date:
Sponsoring Org.:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
OSTI Identifier:
1423710
Grant/Contract Number:
SC0001939
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Plasma Processes and Polymers
Additional Journal Information:
Journal Volume: 15; Journal Issue: 5; Related Information: CHORUS Timestamp: 2018-05-31 13:32:45; Journal ID: ISSN 1612-8850
Publisher:
Wiley Blackwell (John Wiley & Sons)
Country of Publication:
Country unknown/Code not available
Language:
English

Citation Formats

Knoll, Andrew J., Luan, Pingshan, Pranda, Adam, Bruce, Robert L., and Oehrlein, Gottlieb S.. Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality. Country unknown/Code not available: N. p., 2018. Web. doi:10.1002/ppap.201700217.
Knoll, Andrew J., Luan, Pingshan, Pranda, Adam, Bruce, Robert L., & Oehrlein, Gottlieb S.. Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality. Country unknown/Code not available. doi:10.1002/ppap.201700217.
Knoll, Andrew J., Luan, Pingshan, Pranda, Adam, Bruce, Robert L., and Oehrlein, Gottlieb S.. Mon . "Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality". Country unknown/Code not available. doi:10.1002/ppap.201700217.
@article{osti_1423710,
title = {Polymer etching by atmospheric-pressure plasma jet and surface micro-discharge sources: Activation energy analysis and etching directionality},
author = {Knoll, Andrew J. and Luan, Pingshan and Pranda, Adam and Bruce, Robert L. and Oehrlein, Gottlieb S.},
abstractNote = {},
doi = {10.1002/ppap.201700217},
journal = {Plasma Processes and Polymers},
number = 5,
volume = 15,
place = {Country unknown/Code not available},
year = {Mon Mar 05 00:00:00 EST 2018},
month = {Mon Mar 05 00:00:00 EST 2018}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on March 5, 2019
Publisher's Accepted Manuscript

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