Power dissipation, gas temperatures and electron densities of cold atmospheric pressure helium and argon RF plasma jets
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November 2011 |
A model for plasma modification of polypropylene using atmospheric pressure discharges
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February 2003 |
Temporally resolved ozone distribution of a time modulated RF atmospheric pressure argon plasma jet: flow, chemical reaction, and transient vortex
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July 2015 |
Contact-free cold atmospheric plasma treatment of Deinococcus radiodurans
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May 2012 |
Plasma-Surface Interactions in Plasma Catalysis
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October 2015 |
Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C[sub 4]F[sub 8]- and CF[sub 4]-based discharges
- Engelmann, S.; Bruce, R. L.; Weilnboeck, F.
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 3
https://doi.org/10.1116/1.3137012
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January 2009 |
Influence of C4F8/Ar-based etching and H2-based remote plasma ashing processes on ultralow k materials modifications
- Kuo, Ming-Shu; Hua, Xuefeng; Oehrlein, G. S.
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 2
https://doi.org/10.1116/1.3308623
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March 2010 |
Real-time measurements of plasma photoresist modifications: The role of plasma vacuum ultraviolet radiation and ions
- Weilnboeck, F.; Kumar, N.; Oehrlein, G. S.
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 3
https://doi.org/10.1116/1.3697752
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May 2012 |
Etching materials with an atmospheric-pressure plasma jet
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August 1998 |
Nonthermal Plasma Technology as a Versatile Strategy for Polymeric Biomaterials Surface Modification: A Review
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August 2009 |
Atmospheric plasmas for thin film deposition: A critical review
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April 2012 |
Atomic oxygen in a cold argon plasma jet: TALIF spectroscopy in ambient air with modelling and measurements of ambient species diffusion
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April 2012 |
Reaction Chemistry in the Afterglow of an Oxygen−Helium, Atmospheric-Pressure Plasma
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August 2000 |
Nitric oxide density distributions in the effluent of an RF argon APPJ: effect of gas flow rate and substrate
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December 2014 |
Plasma etching—A discussion of mechanisms
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March 1979 |
Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor
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December 2016 |
Cold Atmospheric Plasma for Surface Disinfection
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December 2011 |
Plasmas for medicine
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September 2013 |
Electrohydraulic Discharge and Nonthermal Plasma for Water Treatment
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February 2006 |
Cold atmospheric plasma for the ablative treatment of neuroblastoma
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January 2013 |
Focus on Plasma Medicine
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November 2009 |
Separation of VUV/UV photons and reactive particles in the effluent of a He/O 2 atmospheric pressure plasma jet
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June 2011 |
Surface conductivity dependent dynamic behaviour of an ultrafine atmospheric pressure plasma jet for microscale surface processing
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December 2016 |
In situ absolute air, O 3 and NO densities in the effluent of a cold RF argon atmospheric pressure plasma jet obtained by molecular beam mass spectrometry
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May 2014 |
On the Interaction of Cold Atmospheric Pressure Plasma with Surfaces of Bio-molecules and Model Polymers
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October 2015 |
Additive Nitrogen Effects on Oxygen Plasma Downstream Ashing
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October 1990 |
Spatially resolved ozone densities and gas temperatures in a time modulated RF driven atmospheric pressure plasma jet: an analysis of the production and destruction mechanisms
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May 2013 |
Oxidative Removal of Photoresist by Oxygen/Freon® 116 Discharge Products
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January 1984 |
Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry
- Weilnboeck, F.; Bruce, R. L.; Engelmann, S.
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 5
https://doi.org/10.1116/1.3484249
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September 2010 |
The atmospheric-pressure plasma jet: a review and comparison to other plasma sources
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January 1998 |
Plasma-polymer interactions: A review of progress in understanding polymer resist mask durability during plasma etching for nanoscale fabrication
- Oehrlein, Gottlieb S.; Phaneuf, Raymond J.; Graves, David B.
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 1
https://doi.org/10.1116/1.3532949
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January 2011 |
Investigations of surface reactions during C2F6 plasma etching of SiO2 with equipment and feature scale models
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March 2001 |
The emerging role of reactive oxygen and nitrogen species in redox biology and some implications for plasma applications to medicine and biology
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June 2012 |
Real time characterization of polymer surface modifications by an atmospheric-pressure plasma jet: Electrically coupled versus remote mode
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October 2014 |
Large Etch Rate Enhancement by NO-Induced Surface Chemical Reaction during Chemical Dry Etching of Silicon Oxide in F[sub 2] Remote Plasmas
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January 2007 |
Propagation mechanisms of guided streamers in plasma jets: the influence of electronegativity of the surrounding gas
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May 2015 |
Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O 2 plasma jet
- Luan, Pingshan; Knoll, Andrew J.; Bruggeman, Peter J.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 35, Issue 5
https://doi.org/10.1116/1.5000691
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September 2017 |
Identification of the biologically active liquid chemistry induced by a nonthermal atmospheric pressure plasma jet
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June 2015 |
Investigation of Surface Etching of Poly(Ether Ether Ketone) by Atmospheric-Pressure Plasmas
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November 2012 |
Etching polyimide with a nonequilibrium atmospheric-pressure plasma jet
- Jeong, J. Y.; Babayan, S. E.; Schütze, A.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 17, Issue 5
https://doi.org/10.1116/1.581999
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September 1999 |
Test for bacterial resistance build-up against plasma treatment
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July 2012 |
Biodeactivation of Lipopolysaccharide Correlates with Surface-Bound NO 3 After Cold Atmospheric Plasma Treatment : Biodeactivation of Lipopolysaccharide Correlates …
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November 2015 |
Electric field measurements in a kHz-driven He jet—the influence of the gas flow speed
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November 2016 |
Numerical analysis of the NO and O generation mechanism in a needle-type plasma jet
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June 2014 |
Cold Atmospheric Pressure Plasma VUV Interactions With Surfaces: Effect of Local Gas Environment and Source Design: Cold Atmospheric Pressure Plasma VUV Interactions…
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journal
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August 2016 |
Plasma-surface interactions of model polymers for advanced photoresists using C[sub 4]F[sub 8]∕Ar discharges and energetic ion beams
- Engelmann, S.; Bruce, R. L.; Kwon, T.
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 4
https://doi.org/10.1116/1.2759935
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January 2007 |
Cold Plasma Decontamination of Foods
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April 2012 |
Transitions Between and Control of Guided and Branching Streamers in DC Nanosecond Pulsed Excited Plasma Jets
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November 2012 |
Breakdown simulation of electronegative gases in non-uniform field
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journal
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March 1985 |
Gas flow characteristics of a time modulated APPJ: the effect of gas heating on flow dynamics
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journal
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December 2014 |
Surface etching mechanism of silicon nitride in fluorine and nitric oxide containing plasmas
- Kastenmeier, B. E. E.; Matsuo, P. J.; Oehrlein, G. S.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 19, Issue 1
https://doi.org/10.1116/1.1329118
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January 2001 |
A Review of the Properties and Applications of Poly (Methyl Methacrylate) (PMMA)
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June 2015 |
Plasma chemistry model of surface microdischarge in humid air and dynamics of reactive neutral species
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October 2012 |
Unexpected O and O 3 production in the effluent of He/O 2 microplasma jets emanating into ambient air
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May 2012 |
The Role of VUV Radiation in the Inactivation of Bacteria with an Atmospheric Pressure Plasma Jet
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December 2011 |
Electron spectroscopic analysis of the human lipid skin barrier: cold atmospheric plasma-induced changes in lipid composition
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November 2012 |
Plasma-modified polymer surfaces: Characterization using XPS
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May 2010 |
Measurement of hydroxyl radical (OH) concentration in an argon RF plasma jet by laser-induced fluorescence
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March 2013 |
Separation of VUV/UV photons and reactive particles in the effluent of a He/O 2 atmospheric pressure plasma jet
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journal
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August 2011 |
Plasmaätzen dünner Schichten organischer Polymere. Teil IX: Temperaturabhängigkeiten der Ätzrate von Polymeren verschiedener Struktur
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journal
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June 1991 |
A review of the molecular diffusivities of H2O, CO2, CH4, CO, O3, SO2, NH3, N2O, NO, and NO2 in air, O2 and N2 near STP
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March 1998 |