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Tunnel barrier schottky

Patent ·
OSTI ID:1422743
A diode includes: a semiconductor substrate; a cathode metal layer contacting a bottom of the substrate; a semiconductor drift layer on the substrate; a graded aluminum gallium nitride (AlGaN) semiconductor barrier layer on the drift layer and having a larger bandgap than the drift layer, the barrier layer having a top surface and a bottom surface between the drift layer and the top surface, the barrier layer having an increasing aluminum composition from the bottom surface to the top surface; and an anode metal layer directly contacting the top surface of the barrier layer.
Research Organization:
HRL Laboratories, LLC, Malibu, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AR0000450
Assignee:
HRL Laboratories, LLC (Malibu, CA)
Patent Number(s):
9,899,482
Application Number:
15/093,710
OSTI ID:
1422743
Country of Publication:
United States
Language:
English

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