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Title: Electron energy distributions and electron impact source functions in Ar/N 2 inductively coupled plasmas using pulsed power

Authors:
ORCiD logo [1];  [1]
  1. Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122, USA
Publication Date:
Sponsoring Org.:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
OSTI Identifier:
1421247
Grant/Contract Number:  
SC0001319
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Name: Journal of Applied Physics Journal Volume: 117 Journal Issue: 4; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Logue, Michael D., and Kushner, Mark J. Electron energy distributions and electron impact source functions in Ar/N 2 inductively coupled plasmas using pulsed power. United States: N. p., 2015. Web. doi:10.1063/1.4904935.
Logue, Michael D., & Kushner, Mark J. Electron energy distributions and electron impact source functions in Ar/N 2 inductively coupled plasmas using pulsed power. United States. doi:10.1063/1.4904935.
Logue, Michael D., and Kushner, Mark J. Wed . "Electron energy distributions and electron impact source functions in Ar/N 2 inductively coupled plasmas using pulsed power". United States. doi:10.1063/1.4904935.
@article{osti_1421247,
title = {Electron energy distributions and electron impact source functions in Ar/N 2 inductively coupled plasmas using pulsed power},
author = {Logue, Michael D. and Kushner, Mark J.},
abstractNote = {},
doi = {10.1063/1.4904935},
journal = {Journal of Applied Physics},
number = 4,
volume = 117,
place = {United States},
year = {Wed Jan 28 00:00:00 EST 2015},
month = {Wed Jan 28 00:00:00 EST 2015}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1063/1.4904935

Citation Metrics:
Cited by: 2 works
Citation information provided by
Web of Science

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