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Title: Tailoring nanopore formation in atomic layer deposited ultrathin films

Authors:
 [1]; ; ; ;  [2]; ; ; ; ;  [3]
  1. Department of Applied Physics, University of Technology Eindhoven, P.O. Box 503, Eindhoven 5600MB
  2. Department of Chemical and Materials Engineering, University of Alabama in Huntsville, Huntsville, Alabama 35899
  3. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1421079
Grant/Contract Number:
AC02-06CH11357
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 36; Journal Issue: 1; Related Information: CHORUS Timestamp: 2018-02-14 21:21:12; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Karwal, Saurabh, Li, Tao, Yanguas-Gil, Angel, Canlas, Christian P., Lei, Yu, Mane, Anil U., Libera, Joseph A., Seifert, Soenke, Winans, Randall E., and Elam, Jeffrey W. Tailoring nanopore formation in atomic layer deposited ultrathin films. United States: N. p., 2018. Web. doi:10.1116/1.5003360.
Karwal, Saurabh, Li, Tao, Yanguas-Gil, Angel, Canlas, Christian P., Lei, Yu, Mane, Anil U., Libera, Joseph A., Seifert, Soenke, Winans, Randall E., & Elam, Jeffrey W. Tailoring nanopore formation in atomic layer deposited ultrathin films. United States. doi:10.1116/1.5003360.
Karwal, Saurabh, Li, Tao, Yanguas-Gil, Angel, Canlas, Christian P., Lei, Yu, Mane, Anil U., Libera, Joseph A., Seifert, Soenke, Winans, Randall E., and Elam, Jeffrey W. Mon . "Tailoring nanopore formation in atomic layer deposited ultrathin films". United States. doi:10.1116/1.5003360.
@article{osti_1421079,
title = {Tailoring nanopore formation in atomic layer deposited ultrathin films},
author = {Karwal, Saurabh and Li, Tao and Yanguas-Gil, Angel and Canlas, Christian P. and Lei, Yu and Mane, Anil U. and Libera, Joseph A. and Seifert, Soenke and Winans, Randall E. and Elam, Jeffrey W.},
abstractNote = {},
doi = {10.1116/1.5003360},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 1,
volume = 36,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2018},
month = {Mon Jan 01 00:00:00 EST 2018}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on November 15, 2018
Publisher's Accepted Manuscript

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