Review Article: Reactions of fluorine atoms with silicon, revisited, again
Journal Article
·
· Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Department of Chemical and Biomolecular Engineering, University of Houston, Engineering Bldg. D, 4800 Calhoun Rd., Houston, Texas 77204
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- SC0001319; DESC0001319
- OSTI ID:
- 1361942
- Alternate ID(s):
- OSTI ID: 1420717
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Vol. 35 Journal Issue: 5; ISSN 0734-2101
- Publisher:
- American Vacuum SocietyCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 27 works
Citation information provided by
Web of Science
Web of Science
Similar Records
Studies of atomic and molecular fluorine reactions on silicon surfaces
Reaction of atomic fluorine with silicon: The gas phase products
Perspective: Time scales and clocks: ''Invited Review Article: The statistical modeling of atomic clocks and the design of time scales'' [Rev. Sci. Instrum. 83, 021101 (2012)] and ''Invited Review Article: The uncertainty in the realization and dissemination of the SI second from a systems point of view'' [Rev. Sci. Instrum. 83, 021102 (2012)]
Journal Article
·
Mon Mar 17 00:00:00 EST 1986
· Appl. Phys. Lett.; (United States)
·
OSTI ID:1361942
Reaction of atomic fluorine with silicon: The gas phase products
Journal Article
·
Sat May 01 00:00:00 EDT 1982
· J. Appl. Phys.; (United States)
·
OSTI ID:1361942
Perspective: Time scales and clocks: ''Invited Review Article: The statistical modeling of atomic clocks and the design of time scales'' [Rev. Sci. Instrum. 83, 021101 (2012)] and ''Invited Review Article: The uncertainty in the realization and dissemination of the SI second from a systems point of view'' [Rev. Sci. Instrum. 83, 021102 (2012)]
Journal Article
·
Wed Feb 15 00:00:00 EST 2012
· Review of Scientific Instruments
·
OSTI ID:1361942