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Title: Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features

Authors:
 [1];  [2];  [2];  [2];  [1]
  1. Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122
  2. Lam Research Corp., 4650 Cushing Parkway, Fremont, California 94538
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1420714
Grant/Contract Number:
SC000319
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 5; Related Information: CHORUS Timestamp: 2018-02-14 19:02:16; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Huard, Chad M., Zhang, Yiting, Sriraman, Saravanapriyan, Paterson, Alex, and Kushner, Mark J. Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features. United States: N. p., 2017. Web. doi:10.1116/1.4973953.
Huard, Chad M., Zhang, Yiting, Sriraman, Saravanapriyan, Paterson, Alex, & Kushner, Mark J. Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features. United States. doi:10.1116/1.4973953.
Huard, Chad M., Zhang, Yiting, Sriraman, Saravanapriyan, Paterson, Alex, and Kushner, Mark J. Fri . "Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features". United States. doi:10.1116/1.4973953.
@article{osti_1420714,
title = {Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features},
author = {Huard, Chad M. and Zhang, Yiting and Sriraman, Saravanapriyan and Paterson, Alex and Kushner, Mark J.},
abstractNote = {},
doi = {10.1116/1.4973953},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 5,
volume = 35,
place = {United States},
year = {Fri Sep 01 00:00:00 EDT 2017},
month = {Fri Sep 01 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1116/1.4973953

Citation Metrics:
Cited by: 6 works
Citation information provided by
Web of Science

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