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Title: Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis

Authors:
 [1];  [1];  [1];  [1];  [1]
  1. School of Chemical and Biomolecular Engineering Cornell University, Ithaca, New York 14853
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1420472
Grant/Contract Number:
DESC0006647
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 6; Related Information: CHORUS Timestamp: 2018-02-14 09:42:47; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Chen, Jiun-Ruey, Zhang, Wenyu, Nahm, Rambert K., DiFeo, Michael A., and Engstrom, James R. Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis. United States: N. p., 2017. Web. doi:10.1116/1.4996553.
Chen, Jiun-Ruey, Zhang, Wenyu, Nahm, Rambert K., DiFeo, Michael A., & Engstrom, James R. Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis. United States. doi:10.1116/1.4996553.
Chen, Jiun-Ruey, Zhang, Wenyu, Nahm, Rambert K., DiFeo, Michael A., and Engstrom, James R. Wed . "Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis". United States. doi:10.1116/1.4996553.
@article{osti_1420472,
title = {Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis},
author = {Chen, Jiun-Ruey and Zhang, Wenyu and Nahm, Rambert K. and DiFeo, Michael A. and Engstrom, James R.},
abstractNote = {},
doi = {10.1116/1.4996553},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 6,
volume = 35,
place = {United States},
year = {Wed Nov 01 00:00:00 EDT 2017},
month = {Wed Nov 01 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on November 16, 2018
Publisher's Accepted Manuscript

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