Impact of deposition rate, underlayers, and substrates on β-tungsten formation in sputter deposited films

Barmak, Katayun; Liu, Jiaxing

doi:10.1116/1.5003628

Title: Impact of deposition rate, underlayers, and substrates on β-tungsten formation in sputter deposited films

Journal Article · Wed Nov 01 00:00:00 EDT 2017 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/1.5003628· OSTI ID:1420471

Barmak, Katayun ^[1]; Liu, Jiaxing ^[1]

Department of Applied Physics and Applied Mathematics, Columbia University, New York, New York 10027

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Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0012704

OSTI ID:: 1420471

Journal Information:: Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Vol. 35 Journal Issue: 6; ISSN 0734-2101

Publisher:: American Vacuum SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 9 works

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References (18)

Microstructure, growth, resistivity, and stresses in thin tungsten films deposited by rf sputtering Petroff, P.; Sheng, T. T.; Sinha, A. K. Journal of Applied Physics, Vol. 44, Issue 6 https://doi.org/10.1063/1.1662611	journal	June 1973
Current-induced spin orientation of electrons in semiconductors Dyakonov, M. I.; Perel, V. I. Physics Letters A, Vol. 35, Issue 6 https://doi.org/10.1016/0375-9601(71)90196-4	journal	July 1971
Sputter-deposited amorphous-like tungsten Radić, N.; Tonejc, A.; Ivkov, J. Surface and Coatings Technology, Vol. 180-181 https://doi.org/10.1016/j.surfcoat.2003.10.038	journal	March 2004
Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films Choi, Dooho; Wang, Bincheng; Chung, Suk Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 5 https://doi.org/10.1116/1.3622619	journal	September 2011
Structure and stability of sputter deposited beta‐tungsten thin films Weerasekera, I. A.; Shah, S. Ismat; Baxter, David V. Applied Physics Letters, Vol. 64, Issue 24 https://doi.org/10.1063/1.111318	journal	June 1994
Topologically close-packed phases: Deposition and formation mechanism of metastable β-W in thin films Liu, Jiaxing; Barmak, Katayun Acta Materialia, Vol. 104 https://doi.org/10.1016/j.actamat.2015.11.049	journal	February 2016
Growth and characterization of α and β -phase tungsten films on various substrates Lee, Jeong-Seop; Cho, Jaehun; You, Chun-Yeol Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 34, Issue 2 https://doi.org/10.1116/1.4936261	journal	March 2016
Beta (β) tungsten thin films: Structure, electron transport, and giant spin Hall effect Hao, Qiang; Chen, Wenzhe; Xiao, Gang Applied Physics Letters, Vol. 106, Issue 18 https://doi.org/10.1063/1.4919867	journal	May 2015
Spin transfer torque devices utilizing the giant spin Hall effect of tungsten Pai, Chi-Feng; Liu, Luqiao; Li, Y. Applied Physics Letters, Vol. 101, Issue 12 https://doi.org/10.1063/1.4753947	journal	September 2012
Structure and morphological study of nanometer W and W3O thin films Maillé, L.; Sant, C.; Le Paven-Thivet, C. Thin Solid Films, Vol. 428, Issue 1-2 https://doi.org/10.1016/S0040-6090(02)01277-4	journal	March 2003
XRD line profile analysis of tungsten thin films Djerdj, I.; Tonejc, A. M.; Tonejc, A. Vacuum, Vol. 80, Issue 1-3 https://doi.org/10.1016/j.vacuum.2005.08.017	journal	October 2005
Influence of microstructure on residual stress in tungsten thin films analyzed by X-ray diffraction Durand, N.; Badawi, K. F.; Goudeau, Ph. Thin Solid Films, Vol. 275, Issue 1-2 https://doi.org/10.1016/0040-6090(96)80096-4	journal	April 1996
Phase transformation of thin sputter-deposited tungsten films at room temperature Rossnagel, S. M.; Noyan, I. C.; Cabral, C. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 5 https://doi.org/10.1116/1.1506905	journal	January 2002
Transformation of topologically close-packed β-W to body-centered cubic α-W: Comparison of experiments and computations Barmak, Katayun; Liu, Jiaxing; Harlan, Liam The Journal of Chemical Physics, Vol. 147, Issue 15 https://doi.org/10.1063/1.4995261	journal	October 2017
β-phase tungsten nanorod formation by oblique-angle sputter deposition Karabacak, Tansel; Mallikarjunan, Anupama; Singh, Jitendra P. Applied Physics Letters, Vol. 83, Issue 15 https://doi.org/10.1063/1.1618944	journal	October 2003
Inhomogeneous strain states in sputter deposited tungsten thin films Noyan, I. C.; Shaw, T. M.; Goldsmith, C. C. Journal of Applied Physics, Vol. 82, Issue 9 https://doi.org/10.1063/1.366237	journal	November 1997
Stresses in sputtered tungsten thin films Haghiri-Gosnet, A. M.; Ladan, F. R.; Mayeux, C. Applied Surface Science, Vol. 38, Issue 1-4 https://doi.org/10.1016/0169-4332(89)90550-3	journal	September 1989
Annealing effects on the structural and electrical properties of sputtered tungsten thin films Kaidatzis, Andreas; Psycharis, Vassilios; Mergia, Konstantina Thin Solid Films, Vol. 619 https://doi.org/10.1016/j.tsf.2016.10.027	journal	November 2016

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