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Title: Atomic structure considerations for the low-temperature opacity of Sn

Abstract

Here, we have begun a preliminary investigation into the opacity of Sn at low temperatures (< 50 eV). The emissivity and opacity of Sn is a crucial factor in determining the utility of Sn in EUV lithography, with numerous industrial implications. To this end, we have been exploring the accuracy of some approximations used in opacity models for the relevant ion stages of Sn (neutral through ~ 18 times ionized). We also find that the use of intermediate-coupling, as compared to full configuration-interaction, is not adequate to obtain accurate line positions of the important bound-bound transitions in Sn. One requires full configuration-interaction to properly describe the strong mixing between the various n=4 sub-shells that give rise to the Δn= 0 transitions that dominate the opacity spectrum at low temperatures. Furthermore, since calculations that include full configuration-interaction for large numbers of configurations quickly become computationally prohibitive, we have explored hybrid calculations, in which full configuration-interaction is retained for the most important transitions, while intermediate-coupling is employed for all other transitions. After extensive exploration of the atomic structure properties, local-thermodynamic-equilibrium (LTE) opacities are generated using the ATOMIC code at selected temperatures and densities and compared to experiment.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [2]
  1. Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
  2. Los Alamos National Lab. (LANL), Los Alamos, NM (United States); Kansas State Univ., Manhattan, KS (United States). J.R. Macdonald Lab.
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1352383
Alternate Identifier(s):
OSTI ID: 1419534
Report Number(s):
LA-UR-17-21866
Journal ID: ISSN 1574-1818; TRN: US1700562
Grant/Contract Number:  
AC52-06NA25396
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
High Energy Density Physics
Additional Journal Information:
Journal Volume: 23; Journal Issue: C; Journal ID: ISSN 1574-1818
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; opacity

Citation Formats

Colgan, J., Kilcrease, D. P., Abdallah, J., Sherrill, M. E., Fontes, C. J., Hakel, P., and Armstrong, G. S. J. Atomic structure considerations for the low-temperature opacity of Sn. United States: N. p., 2017. Web. doi:10.1016/j.hedp.2017.03.009.
Colgan, J., Kilcrease, D. P., Abdallah, J., Sherrill, M. E., Fontes, C. J., Hakel, P., & Armstrong, G. S. J. Atomic structure considerations for the low-temperature opacity of Sn. United States. https://doi.org/10.1016/j.hedp.2017.03.009
Colgan, J., Kilcrease, D. P., Abdallah, J., Sherrill, M. E., Fontes, C. J., Hakel, P., and Armstrong, G. S. J. 2017. "Atomic structure considerations for the low-temperature opacity of Sn". United States. https://doi.org/10.1016/j.hedp.2017.03.009. https://www.osti.gov/servlets/purl/1352383.
@article{osti_1352383,
title = {Atomic structure considerations for the low-temperature opacity of Sn},
author = {Colgan, J. and Kilcrease, D. P. and Abdallah, J. and Sherrill, M. E. and Fontes, C. J. and Hakel, P. and Armstrong, G. S. J.},
abstractNote = {Here, we have begun a preliminary investigation into the opacity of Sn at low temperatures (< 50 eV). The emissivity and opacity of Sn is a crucial factor in determining the utility of Sn in EUV lithography, with numerous industrial implications. To this end, we have been exploring the accuracy of some approximations used in opacity models for the relevant ion stages of Sn (neutral through ~ 18 times ionized). We also find that the use of intermediate-coupling, as compared to full configuration-interaction, is not adequate to obtain accurate line positions of the important bound-bound transitions in Sn. One requires full configuration-interaction to properly describe the strong mixing between the various n=4 sub-shells that give rise to the Δn= 0 transitions that dominate the opacity spectrum at low temperatures. Furthermore, since calculations that include full configuration-interaction for large numbers of configurations quickly become computationally prohibitive, we have explored hybrid calculations, in which full configuration-interaction is retained for the most important transitions, while intermediate-coupling is employed for all other transitions. After extensive exploration of the atomic structure properties, local-thermodynamic-equilibrium (LTE) opacities are generated using the ATOMIC code at selected temperatures and densities and compared to experiment.},
doi = {10.1016/j.hedp.2017.03.009},
url = {https://www.osti.gov/biblio/1352383}, journal = {High Energy Density Physics},
issn = {1574-1818},
number = C,
volume = 23,
place = {United States},
year = {Fri Mar 31 00:00:00 EDT 2017},
month = {Fri Mar 31 00:00:00 EDT 2017}
}

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Cited by: 17 works
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Works referenced in this record:

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Works referencing / citing this record:

Spectral characterization of an industrial EUV light source for nanolithography
journal, November 2019


Short-wavelength out-of-band EUV emission from Sn laser-produced plasma
journal, January 2018


Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
journal, August 2019


Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma
journal, September 2019