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Title: Tracking of Polycarbonate Films using Low-energy Ions Final Report CRADA No. TC-774-94

Abstract

Ion tracking is performed almost exclusively using ions with energies near or above the maximum in electronic stopping. For the present study, we have examined the results of etching ion tracks created by ions bombarding polycarbonate films with energies corresponding to stopping well below the maximum and just above the anticipated threshold for creating etchable latent tracks. Low-energy neon and argon ions with 18-60 keV /amu and fluences of about 10 8/cm 2 were used to examine the limits for producing etchable tracks in polycarbonate films. By concentrating on the early stages of etching (i.e., -20 nm < SEM hole diameter < -100 nm), we can directly relate the energy deposition calculated for the incident ion to the creation of etchable tracks. The experimental results will be discussed with regard to the energy losses of the ions in the polycarbonate films and to the formation of continuous latent tracks through the entire thickness the films. These results have significant implications with respect to the threshold for formation of etchable tracks and to the use of low-energy ions for lithographic applications.

Authors:
 [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1418953
Report Number(s):
LLNL-TR-745046
DOE Contract Number:
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS

Citation Formats

Musket, R. G. Tracking of Polycarbonate Films using Low-energy Ions Final Report CRADA No. TC-774-94. United States: N. p., 2018. Web. doi:10.2172/1418953.
Musket, R. G. Tracking of Polycarbonate Films using Low-energy Ions Final Report CRADA No. TC-774-94. United States. doi:10.2172/1418953.
Musket, R. G. Wed . "Tracking of Polycarbonate Films using Low-energy Ions Final Report CRADA No. TC-774-94". United States. doi:10.2172/1418953. https://www.osti.gov/servlets/purl/1418953.
@article{osti_1418953,
title = {Tracking of Polycarbonate Films using Low-energy Ions Final Report CRADA No. TC-774-94},
author = {Musket, R. G.},
abstractNote = {Ion tracking is performed almost exclusively using ions with energies near or above the maximum in electronic stopping. For the present study, we have examined the results of etching ion tracks created by ions bombarding polycarbonate films with energies corresponding to stopping well below the maximum and just above the anticipated threshold for creating etchable latent tracks. Low-energy neon and argon ions with 18-60 keV /amu and fluences of about 108/cm2 were used to examine the limits for producing etchable tracks in polycarbonate films. By concentrating on the early stages of etching (i.e., -20 nm < SEM hole diameter < -100 nm), we can directly relate the energy deposition calculated for the incident ion to the creation of etchable tracks. The experimental results will be discussed with regard to the energy losses of the ions in the polycarbonate films and to the formation of continuous latent tracks through the entire thickness the films. These results have significant implications with respect to the threshold for formation of etchable tracks and to the use of low-energy ions for lithographic applications.},
doi = {10.2172/1418953},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 24 00:00:00 EST 2018},
month = {Wed Jan 24 00:00:00 EST 2018}
}

Technical Report:

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