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Title: Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures

Authors:
 [1]; ; ; ;
  1. Department of Materials Science and Engineering, North Carolina State University, 1001 Capability Drive, Raleigh, North Carolina 27695
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1417700
Grant/Contract Number:  
NA-22-WMS-#66204
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics Journal Volume: 36 Journal Issue: 3; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Klump, Andrew, Zhou, Chuanzhen, Stevie, Frederick A., Collazo, Ramón, and Sitar, Zlatko. Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures. United States: N. p., 2018. Web. doi:10.1116/1.5013001.
Klump, Andrew, Zhou, Chuanzhen, Stevie, Frederick A., Collazo, Ramón, & Sitar, Zlatko. Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures. United States. doi:10.1116/1.5013001.
Klump, Andrew, Zhou, Chuanzhen, Stevie, Frederick A., Collazo, Ramón, and Sitar, Zlatko. Tue . "Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures". United States. doi:10.1116/1.5013001.
@article{osti_1417700,
title = {Improvement in detection limit for time-of-flight SIMS analysis of dopants in GaN structures},
author = {Klump, Andrew and Zhou, Chuanzhen and Stevie, Frederick A. and Collazo, Ramón and Sitar, Zlatko},
abstractNote = {},
doi = {10.1116/1.5013001},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
number = 3,
volume = 36,
place = {United States},
year = {Tue May 01 00:00:00 EDT 2018},
month = {Tue May 01 00:00:00 EDT 2018}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on January 22, 2019
Publisher's Accepted Manuscript

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