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Title: In-situ Synchrotron X-ray Studies of the Microstructure and Stability of In 2O 3 Epitaxial Films

Abstract

Here, we report on the synthesis, stability, and local structure of In 2O 3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In 2O 3 deposited onto (001)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski–Krastanov growth mode at a temperature of 850°C, resulting in epitaxial, truncated square pyramids with (111) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In 2O 3 from the magnetron source. Lastly, we also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In 2O 3 nanostructures and films.

Authors:
 [1];  [1];  [1]; ORCiD logo [2];  [1];  [1];  [1];  [1]; ORCiD logo [3]; ORCiD logo [3];  [3];  [3];  [4];  [1];  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
  2. Northern Illinois Univ., DeKalb, IL (United States). Dept. of Physics
  3. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  4. Argonne National Lab. (ANL), Argonne, IL (United States). X-ray Science Division
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1413931
Alternate Identifier(s):
OSTI ID: 1400329
Report Number(s):
BNL-114467-2017-JA
Journal ID: ISSN 0003-6951; TRN: US1800592
Grant/Contract Number:
SC0012704
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 111; Journal Issue: 16; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; X-rays; Epitaxy; Synchrotrons; Thin films; Radiowave and microwave technology

Citation Formats

Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., and Eastman, J. A. In-situ Synchrotron X-ray Studies of the Microstructure and Stability of In2O3 Epitaxial Films. United States: N. p., 2017. Web. doi:10.1063/1.4997773.
Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., & Eastman, J. A. In-situ Synchrotron X-ray Studies of the Microstructure and Stability of In2O3 Epitaxial Films. United States. doi:10.1063/1.4997773.
Highland, M. J., Hruszkewycz, S. O., Fong, D. D., Thompson, Carol, Fuoss, P. H., Calvo-Almazan, I., Maddali, S., Ulvestad, A., Nazaretski, E., Huang, X., Yan, H., Chu, Y. S., Zhou, H., Baldo, P. M., and Eastman, J. A. Mon . "In-situ Synchrotron X-ray Studies of the Microstructure and Stability of In2O3 Epitaxial Films". United States. doi:10.1063/1.4997773.
@article{osti_1413931,
title = {In-situ Synchrotron X-ray Studies of the Microstructure and Stability of In2O3 Epitaxial Films},
author = {Highland, M. J. and Hruszkewycz, S. O. and Fong, D. D. and Thompson, Carol and Fuoss, P. H. and Calvo-Almazan, I. and Maddali, S. and Ulvestad, A. and Nazaretski, E. and Huang, X. and Yan, H. and Chu, Y. S. and Zhou, H. and Baldo, P. M. and Eastman, J. A.},
abstractNote = {Here, we report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (001)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski–Krastanov growth mode at a temperature of 850°C, resulting in epitaxial, truncated square pyramids with (111) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. Lastly, we also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films.},
doi = {10.1063/1.4997773},
journal = {Applied Physics Letters},
number = 16,
volume = 111,
place = {United States},
year = {Mon Oct 16 00:00:00 EDT 2017},
month = {Mon Oct 16 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on October 16, 2018
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