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Title: Ultrananocrystalline diamond contacts for electronic devices

Abstract

A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.

Inventors:
; ;
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1413200
Patent Number(s):
9,842,958
Application Number:
15/339,295
Assignee:
UChicago Argonne, LLC (Chicago, IL); Brookhaven Science Associates, LLC (Upton, NY); The Research Foundation for the State University of New York (Albany, NY) BNL
DOE Contract Number:  
AC02-98CH10886; SC0012704; AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2016 Oct 31
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Sumant, Anirudha V., Smedley, John, and Muller, Erik. Ultrananocrystalline diamond contacts for electronic devices. United States: N. p., 2017. Web.
Sumant, Anirudha V., Smedley, John, & Muller, Erik. Ultrananocrystalline diamond contacts for electronic devices. United States.
Sumant, Anirudha V., Smedley, John, and Muller, Erik. Tue . "Ultrananocrystalline diamond contacts for electronic devices". United States. doi:. https://www.osti.gov/servlets/purl/1413200.
@article{osti_1413200,
title = {Ultrananocrystalline diamond contacts for electronic devices},
author = {Sumant, Anirudha V. and Smedley, John and Muller, Erik},
abstractNote = {A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 12 00:00:00 EST 2017},
month = {Tue Dec 12 00:00:00 EST 2017}
}

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Works referenced in this record:

Single crystal diamond prepared by CVD
patent-application, November 2004


Piezoresistivity in vapor‐deposited diamond films
journal, June 1992

  • Aslam, M.; Taher, I.; Masood, A.
  • Applied Physics Letters, Vol. 60, Issue 23, p. 2923-2925
  • DOI: 10.1063/1.106821

Planar ultrananocrystalline diamond field emitter in accelerator radio frequency electron injector: Performance metrics
journal, November 2014

  • Baryshev, Sergey V.; Antipov, Sergey; Shao, Jiahang
  • Applied Physics Letters, Vol. 105, Issue 20, Article No. 203505
  • DOI: 10.1063/1.4901723

Optically Transparent Diamond Electrode for Use in IR Transmission Spectroelectrochemical Measurements
journal, October 2007

  • Dai, Yingrui; Proshlyakov, Denis A.; Zak, Jerzy K.
  • Analytical Chemistry, Vol. 79, Issue 19, p. 7526-7533
  • DOI: 10.1021/ac071161p

Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys
journal, August 1996

  • Fischetti, M. V.; Laux, S. E.
  • Journal of Applied Physics, Vol. 80, Issue 4, p. 2234-2252
  • DOI: 10.1063/1.363052

Electrical contacts to ultrananocrystalline diamond
journal, September 2003

  • Gerbi, J. E.; Auciello, O.; Birrell, J.
  • Applied Physics Letters, Vol. 83, Issue 10, p. 2001-2003
  • DOI: 10.1063/1.1609043

Direct Low-Temperature Integration of Nanocrystalline Diamond with GaN Substrates for Improved Thermal Management of High-Power Electronics
journal, February 2012

  • Goyal, Vivek; Sumant, Anirudha V.; Teweldebrhan, Desalegne
  • Advanced Functional Materials, Vol. 22, Issue 7, p. 1525-1530
  • DOI: 10.1002/adfm.201102786

Configurational, electronic entropies and the thermoelectric properties of nanocarbon ensembles
journal, April 2008

  • Gruen, Dieter M.; Bruno, Paola; Xie, Ming
  • Applied Physics Letters, Vol. 92, Issue 14, Article No. 143118
  • DOI: 10.1063/1.2909150

Giant piezoresistance effect in silicon nanowires
journal, October 2006


Silicon Device Scaling to the Sub-10-nm Regime
journal, December 2004

  • Ieong, Meikei; Doris, Bruce; Kedzierski, Jakub
  • Science, Vol. 306, Issue 5704, p. 2057-2060
  • DOI: 10.1126/science.1100731

High quantum efficiency ultrananocrystalline diamond photocathode for photoinjector applications
journal, September 2014

  • Pérez Quintero, Kenneth J.; Antipov, Sergey; Sumant, Anirudha V.
  • Applied Physics Letters, Vol. 105, Issue 12, Article No. 123103
  • DOI: 10.1063/1.4896418

Properties of Hydrogen Terminated Diamond as a Photocathode
journal, March 2011


Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films
journal, September 2001

  • Bhattacharyya, S.; Auciello, O.; Birrell, J.
  • Applied Physics Letters, Vol. 79, Issue 10, p. 1441-1443
  • DOI: 10.1063/1.1400761

Optical and Electrochemical Properties of Optically Transparent, Boron-Doped Diamond Thin Films Deposited on Quartz
journal, December 2002

  • Stotter, Jason; Zak, Jerzy; Behler, Zack
  • Analytical Chemistry, Vol. 74, Issue 23, p. 5924-5930
  • DOI: 10.1021/ac0203544

Polycrystalline diamond films as prospective UV photocathodes
conference, December 2000

  • Tremsin, Anton S.; Siegmund, Oswald H. W.
  • Instrumentation for UV/EUV Astronomy and Solar Missions
  • DOI: 10.1117/12.410530

Review on diamond based piezoresistive sensors
conference, January 1998