Extracting interface locations in multilayer polymer waveguide films using scanning angle Raman spectroscopy

Bobbitt, Jonathan M.; Smith, Emily A.

doi:10.1002/jrs.5275

Title: Extracting interface locations in multilayer polymer waveguide films using scanning angle Raman spectroscopy

Journal Article · Thu Nov 09 00:00:00 EST 2017 · Journal of Raman Spectroscopy

DOI:https://doi.org/10.1002/jrs.5275· OSTI ID:1413139

Bobbitt, Jonathan M. ^[1];

^[1]

Ames Lab., Ames, IA (United States)

There is an increasing demand for nondestructive in situ techniques that measure chemical content, total thickness, and interface locations for multilayer polymer films, and SA Raman spectroscopy in combination with appropriate data models can provide this information. A scanning angle (SA) Raman spectroscopy method was developed to measure the chemical composition of multilayer polymer waveguide films and to extract the location of buried interfaces between polymer layers with 7–80-nm axial spatial resolution. The SA Raman method measures Raman spectra as the incident angle of light upon a prism-coupled thin film is scanned. Six multilayer films consisting of poly(methyl methacrylate)/polystyrene or poly(methyl methacrylate)/polystyrene/poly(methyl methacrylate) were prepared with total thicknesses ranging from 330-1260 nm. The interface locations were varied by altering the individual layer thicknesses between 140-680 nm. The Raman amplitude ratio of the 1605 cm^-1 peak for PS and 812 cm^-1 peak for PMMA was used in calculations of the electric field intensity within the polymer layers to model the SA Raman data and extract the total thickness and interface locations. There is an average 8% and 7% difference in the measured thickness between the SA Raman and profilometry measurements for bilayer and trilayer films, respectively.

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Research Organization:: Ames Lab., Ames, IA (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-07CH11358

OSTI ID:: 1413139

Report Number(s):: IS-J-9334; TRN: US1800415

Journal Information:: Journal of Raman Spectroscopy, Vol. 49, Issue 2; ISSN 0377-0486

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 6 works

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Title: Extracting interface locations in multilayer polymer waveguide films using scanning angle Raman spectroscopy

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