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Title: First Principles Diffusion Modeling Final Report CRADA No. TC-1540-98

Abstract

The CRADA participants built on the capabilities LLNL had already developed for ab initio diffusion modeling, extending them to higher doping and damage levels, and applying them to improve the understanding of implant and annealing tradeoffs for technology-relevant conditions. The calculation results and some of the simulation capabilities developed here were transferred to Intel and Applied Materials.

Authors:
 [1];  [1];  [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1406450
Report Number(s):
LLNL-TR-740388
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

delaRubia, T. D., Foad, M., and Giles, M.. First Principles Diffusion Modeling Final Report CRADA No. TC-1540-98. United States: N. p., 2017. Web. doi:10.2172/1406450.
delaRubia, T. D., Foad, M., & Giles, M.. First Principles Diffusion Modeling Final Report CRADA No. TC-1540-98. United States. doi:10.2172/1406450.
delaRubia, T. D., Foad, M., and Giles, M.. Thu . "First Principles Diffusion Modeling Final Report CRADA No. TC-1540-98". United States. doi:10.2172/1406450. https://www.osti.gov/servlets/purl/1406450.
@article{osti_1406450,
title = {First Principles Diffusion Modeling Final Report CRADA No. TC-1540-98},
author = {delaRubia, T. D. and Foad, M. and Giles, M.},
abstractNote = {The CRADA participants built on the capabilities LLNL had already developed for ab initio diffusion modeling, extending them to higher doping and damage levels, and applying them to improve the understanding of implant and annealing tradeoffs for technology-relevant conditions. The calculation results and some of the simulation capabilities developed here were transferred to Intel and Applied Materials.},
doi = {10.2172/1406450},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Oct 19 00:00:00 EDT 2017},
month = {Thu Oct 19 00:00:00 EDT 2017}
}

Technical Report:

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