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Title: Microwave Sintering of Ceramic Materials for Industrial Application Final Report CRADA No. TC-1116-95

Abstract

The goal of this project was to develop the commercial capability in the US to sinter alumina oxide ceramic parts for the semiconductor manufacturing equipment industry. We planned to use the millimeter microwave (30 GHz) sintering system first developed by IAP in Russia.

Authors:
 [1];  [1];  [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1406412
Report Number(s):
LLNL-TR-740367
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Caplan, M., Tandon, R., and Callis, R.. Microwave Sintering of Ceramic Materials for Industrial Application Final Report CRADA No. TC-1116-95. United States: N. p., 2017. Web. doi:10.2172/1406412.
Caplan, M., Tandon, R., & Callis, R.. Microwave Sintering of Ceramic Materials for Industrial Application Final Report CRADA No. TC-1116-95. United States. doi:10.2172/1406412.
Caplan, M., Tandon, R., and Callis, R.. Thu . "Microwave Sintering of Ceramic Materials for Industrial Application Final Report CRADA No. TC-1116-95". United States. doi:10.2172/1406412. https://www.osti.gov/servlets/purl/1406412.
@article{osti_1406412,
title = {Microwave Sintering of Ceramic Materials for Industrial Application Final Report CRADA No. TC-1116-95},
author = {Caplan, M. and Tandon, R. and Callis, R.},
abstractNote = {The goal of this project was to develop the commercial capability in the US to sinter alumina oxide ceramic parts for the semiconductor manufacturing equipment industry. We planned to use the millimeter microwave (30 GHz) sintering system first developed by IAP in Russia.},
doi = {10.2172/1406412},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Oct 19 00:00:00 EDT 2017},
month = {Thu Oct 19 00:00:00 EDT 2017}
}

Technical Report:

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