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Title: A Concept for Zero-Alignment Micro Optical Systems

Abstract

We are developing a method of constructing compact, three-dimensional photonics systems consisting of optical elements, e.g., lenses and mirrors, photo-detectors, and light sources, e.g., VCSELS or circular-grating lasers. These optical components, both active and passive, are mounted on a lithographically prepared silicon substrate. We refer to the substrate as a micro-optical table (MOT) in analogy with the macroscopic version routinely used in optics laboratories. The MOT is a zero-alignment, microscopic optical-system concept. The position of each optical element relative to other optical elements on the MOT is determined in the layout of the MOT photomask. Each optical element fits into a slot etched in the silicon MOT. The slots are etched using a high-aspect-ratio silicon etching (HARSE) process. Additional positioning features in each slot's cross-section and complementary features on each optical element permit accurate placement of that element's aperture relative to the MOT substrate. In this paper we present the results of the first fabrication and micro-assembly experiments of a silicon-wafer based MOT. Based on these experiments, estimates of position accuracy are reported. We also report on progress in fabrication of lens elements in a hybrid sol-gel material (HSGM). Diffractive optical elements have been patterned in a 13-micron thick HSGMmore » layer on a 150-micron thick soda-lime glass substrate. The measured ms surface roughness was 20 nm. Finally, we describe modeling of MOT systems using non-sequential ray tracing (NSRT).« less

Authors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
14031
Report Number(s):
SAND99-2462C
TRN: AH200136%%284
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: SPIE Micromachine Technology for Diffractive and Holographic Optics, Santa Clara, CA (US), 09/20/1999--09/22/1999; Other Information: PBD: 16 Sep 1999
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; APERTURES; ETCHING; FABRICATION; LASERS; LENSES; LIGHT SOURCES; MIRRORS; OPTICAL SYSTEMS; POSITIONING; ROUGHNESS; SILICON; SUBSTRATES; MICRO-OPTICAL SYSTEMS; HYBRID SOL-GEL MATERIAL; SYSTEMS WITH DIFFRACTIVE OPTICS

Citation Formats

DESCOUR, MICHAEL R., KOLOLUOMA,TERHO, LEVEY,RAVIV, RANTALA,JUHA T., SHUL,RANDY J., WARREN,MIAL E., and WILLISON,CHRISTI LEE. A Concept for Zero-Alignment Micro Optical Systems. United States: N. p., 1999. Web.
DESCOUR, MICHAEL R., KOLOLUOMA,TERHO, LEVEY,RAVIV, RANTALA,JUHA T., SHUL,RANDY J., WARREN,MIAL E., & WILLISON,CHRISTI LEE. A Concept for Zero-Alignment Micro Optical Systems. United States.
DESCOUR, MICHAEL R., KOLOLUOMA,TERHO, LEVEY,RAVIV, RANTALA,JUHA T., SHUL,RANDY J., WARREN,MIAL E., and WILLISON,CHRISTI LEE. Thu . "A Concept for Zero-Alignment Micro Optical Systems". United States. https://www.osti.gov/servlets/purl/14031.
@article{osti_14031,
title = {A Concept for Zero-Alignment Micro Optical Systems},
author = {DESCOUR, MICHAEL R. and KOLOLUOMA,TERHO and LEVEY,RAVIV and RANTALA,JUHA T. and SHUL,RANDY J. and WARREN,MIAL E. and WILLISON,CHRISTI LEE},
abstractNote = {We are developing a method of constructing compact, three-dimensional photonics systems consisting of optical elements, e.g., lenses and mirrors, photo-detectors, and light sources, e.g., VCSELS or circular-grating lasers. These optical components, both active and passive, are mounted on a lithographically prepared silicon substrate. We refer to the substrate as a micro-optical table (MOT) in analogy with the macroscopic version routinely used in optics laboratories. The MOT is a zero-alignment, microscopic optical-system concept. The position of each optical element relative to other optical elements on the MOT is determined in the layout of the MOT photomask. Each optical element fits into a slot etched in the silicon MOT. The slots are etched using a high-aspect-ratio silicon etching (HARSE) process. Additional positioning features in each slot's cross-section and complementary features on each optical element permit accurate placement of that element's aperture relative to the MOT substrate. In this paper we present the results of the first fabrication and micro-assembly experiments of a silicon-wafer based MOT. Based on these experiments, estimates of position accuracy are reported. We also report on progress in fabrication of lens elements in a hybrid sol-gel material (HSGM). Diffractive optical elements have been patterned in a 13-micron thick HSGM layer on a 150-micron thick soda-lime glass substrate. The measured ms surface roughness was 20 nm. Finally, we describe modeling of MOT systems using non-sequential ray tracing (NSRT).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {9}
}

Conference:
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