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Title: Patterned growth of p-type MoS2 atomic layers using sol-gel as precursor

Journal Article · · Advanced Functional Materials
 [1];  [2];  [1];  [3];  [1];  [1];  [1];  [3];  [2];  [3];  [1]
  1. Harbin Institute of Technology, Harbin (People's Republic of China)
  2. Vanderbilt Univ., Nashville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

2D layered MoS2 has drawn intense attention for its applications in flexible electronic, optoelectronic, and spintronic devices. Most of the MoS2 atomic layers grown by conventional chemical vapor deposition techniques are n-type due to the abundant sulfur vacancies. Facile production of MoS2 atomic layers with p-type behavior, however, remains challenging. Here, a novel one-step growth has been developed to attain p-type MoS2 layers in large scale by using Mo-containing sol–gel, including 1% tungsten (W). Atomic-resolution electron microscopy characterization reveals that small tungsten oxide clusters are commonly present on the as-grown MoS2 film due to the incomplete reduction of W precursor at the reaction temperature. These omnipresent small tungsten oxide clusters contribute to the p-type behavior, as verified by density functional theory calculations, while preserving the crystallinity of the MoS2 atomic layers. The Mo containing sol–gel precursor is compatible with the soft-lithography techniques, which enables patterned growth of p-type MoS2 atomic layers into regular arrays with different shapes, holding great promise for highly integrated device applications. Lastly, an atomically thin p–n junction is fabricated by the as-prepared MoS2, which shows strong rectifying behavior.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS); Vanderbilt Univ., Nashville, TN (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
AC05-00OR22725; DE‐FG02‐09ER46554; FG02-09ER46554
OSTI ID:
1329138
Alternate ID(s):
OSTI ID: 1401451; OSTI ID: 1597789
Journal Information:
Advanced Functional Materials, Vol. 26, Issue 35; ISSN 1616-301X
Publisher:
WileyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 29 works
Citation information provided by
Web of Science

References (53)

Electronic structures of defects and magnetic impurities in MoS2 monolayers journal December 2014
Large-Area Vapor-Phase Growth and Characterization of MoS2 Atomic Layers on a SiO2 Substrate journal February 2012
Origin of the n -type and p -type conductivity of MoS 2 monolayers on a SiO 2 substrate journal April 2013
Patternable Large-Scale Molybdenium Disulfide Atomic Layers Grown by Gold-Assisted Chemical Vapor Deposition journal January 2014
Projector augmented-wave method journal December 1994
MoS 2 Transistors Fabricated via Plasma-Assisted Nanoprinting of Few-Layer MoS 2 Flakes into Large-Area Arrays journal June 2013
Emerging Photoluminescence in Monolayer MoS2 journal April 2010
Growth of Large-Area and Highly Crystalline MoS2 Thin Layers on Insulating Substrates journal February 2012
Back Gated Multilayer InSe Transistors with Enhanced Carrier Mobilities via the Suppression of Carrier Scattering from a Dielectric Interface journal August 2014
p-type doping of MoS 2 thin films using Nb journal March 2014
Highly Flexible MoS 2 Thin-Film Transistors with Ion Gel Dielectrics journal July 2012
Large area single crystal (0001) oriented MoS 2 journal June 2013
Improved Carrier Mobility in Few-Layer MoS 2 Field-Effect Transistors with Ionic-Liquid Gating journal April 2013
Doping against the Native Propensity of MoS 2 : Degenerate Hole Doping by Cation Substitution journal November 2014
Low-temperature photocarrier dynamics in monolayer MoS 2 journal September 2011
Atomically Thin MoS2 A New Direct-Gap Semiconductor journal September 2010
Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition journal March 2012
Ab initiomolecular dynamics for liquid metals journal January 1993
High mobility and high on/off ratio field-effect transistors based on chemical vapor deposited single-crystal MoS 2 grains journal April 2013
Stable few-layer MoS 2 rectifying diodes formed by plasma-assisted doping journal September 2013
High-mobility and low-power thin-film transistors based on multilayer MoS2 crystals journal January 2012
Atomically thin layers of MoS2 via a two step thermal evaporation–exfoliation method journal January 2012
From Bulk to Monolayer MoS2: Evolution of Raman Scattering journal January 2012
van der Waals Epitaxy of MoS2 Layers Using Graphene As Growth Templates journal May 2012
Vapour phase growth and grain boundary structure of molybdenum disulphide atomic layers journal June 2013
Generalized Gradient Approximation Made Simple [Phys. Rev. Lett. 77, 3865 (1996)] journal February 1997
Lateral MoS 2 p–n Junction Formed by Chemical Doping for Use in High-Performance Optoelectronics journal August 2014
Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set journal July 1996
Vertical and in-plane heterostructures from WS2/MoS2 monolayers journal September 2014
Electrochemical quartz crystal microbalance study of the electrodeposition mechanism of molybdenum oxide thin films from peroxo-polymolybdate solution journal October 2003
Encapsulated Nanoparticles Produced by Pulsed Laser Ablation of MoS 2 −Te Composite Target journal August 2008
Optoelectronic devices based on electrically tunable p–n diodes in a monolayer dichalcogenide journal March 2014
Wafer-scale MoS2 thin layers prepared by MoO3 sulfurization journal January 2012
Detailed photocurrent spectroscopy of the semiconducting group VIB transition metal dichalcogenides journal February 1982
Epitaxial Monolayer MoS 2 on Mica with Novel Photoluminescence journal July 2013
Dependence of atomic oxygen resistance and the tribological properties on microstructures of WS2 films journal April 2014
Controlled Growth of High-Quality Monolayer WS 2 Layers on Sapphire and Imaging Its Grain Boundary journal September 2013
Formation of Nanooctahedra in Molybdenum Disulfide and Molybdenum Diselenide Using Pulsed Laser Vaporization journal April 2004
Ultrasensitive photodetectors based on monolayer MoS2 journal June 2013
Characterisation of r.f. sputtered tungsten disulfide and oxysulfide thin films journal September 2002
Intrinsic Structural Defects in Monolayer Molybdenum Disulfide journal May 2013
Single-layer MoS2 transistors journal January 2011
High Performance Multilayer MoS2Transistors with Scandium Contacts journal December 2012
Thermal Evaporation Deposition of Few-layer MoS2 Films journal June 2013
Formation of Nanooctahedra in Molybdenum Disulfide and Molybdenum Diselenide Using Pulsed Laser Vaporization journal April 2004
Preparation of MoS 2 -MoO 3 Hybrid Nanomaterials for Light-Emitting Diodes journal July 2014
Leaning on a ledge journal November 2020
High-resolution X-ray luminescence extension imaging journal February 2021
Electronic structure of AlFeN films exhibiting crystallographic orientation change from c- to a-axis with Fe concentrations and annealing effect journal February 2020
Low-temperature photocarrier dynamics in monolayer MoS2 text January 2011
Patternable Large-Scale Molybdenium Disulfide Atomic Layers Grown by Gold-Assisted Chemical Vapor Deposition journal January 2014
Vapor Phase Growth and Grain Boundary Structure of Molybdenum Disulfide Atomic Layers text January 2013
Improved Carrier Mobility in Few-Layer MoS2 Field-Effect Transistors with Ionic-Liquid Gating preprint January 2013

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Self-Limited Epitaxial Growth of Ultrathin Nonlayered CdS Flakes for High-Performance Photodetectors journal March 2018
Tuning electrochemical catalytic activity of defective 2D terrace MoSe 2 heterogeneous catalyst via cobalt doping journal January 2017
Temperature-dependent growth of few layer β -InSe and α -In 2 Se 3 single crystals for optoelectronic device journal October 2018
Controlled growth of six-point stars MoS 2 by chemical vapor deposition and its shape evolution mechanism journal September 2017
Interfacial Engineering for Fabricating High-Performance Field-Effect Transistors Based on 2D Materials journal April 2018
The vertical growth of MoS 2 layers at the initial stage of CVD from first-principles journal April 2018