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Title: Ion-beam induced effects in multi-layered semiconductor systems: Ion-beam induced effects in multi-layered semiconductor systems

Journal Article · · Physica Status Solidi B. Basic Solid State Physics
 [1];  [2];  [3];  [4]
  1. Institut für Festkörperphysik, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1 07743 Jena Germany
  2. Departamento de Física, i3N, Universidade de Aveiro, 3810-193 Aveiro Portugal
  3. Departamento de Física Aplicada y Centro de Microanálisis of Materiales, Universidad Autónoma de Madrid, 28049 Madrid Spain
  4. IPFN, Instituto Superior Técnico, Universidade de Lisboa, Estrada National, 2695-066 Bobadela LRS Portugal

Sponsoring Organization:
USDOE Office of Nuclear Energy (NE), Fuel Cycle Technologies (NE-5)
Grant/Contract Number:
UID/CTM/50025/2013; JCI-2012-14509
OSTI ID:
1400771
Journal Information:
Physica Status Solidi B. Basic Solid State Physics, Journal Name: Physica Status Solidi B. Basic Solid State Physics Vol. 253 Journal Issue: 11; ISSN 0370-1972
Publisher:
Wiley Blackwell (John Wiley & Sons)Copyright Statement
Country of Publication:
Germany
Language:
English
Citation Metrics:
Cited by: 3 works
Citation information provided by
Web of Science

References (24)

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Two-beam irradiation chamber for in situ ion-implantation and RBS at temperatures from 15 K to 300 K journal March 2001
Quantum well intermixing journal June 1993
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Mechanisms of Implantation Damage Formation in Al x Ga 1– x N Compounds journal March 2016
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Mechanisms of ion beam mixing in metals and semiconductors journal February 1998
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Fabrication of amorphous‐crystalline superlattices in GeSi‐Si and GaAs‐AlAs journal February 1991
Comparison of low- and room-temperature damage formation in Ar ion implanted GaN and ZnO journal July 2013
Interfacial damage in ion-irradiated GaAs/AlAs superlattices journal December 1993
Ar implantation of InSb and AlN at 15K journal January 2006
Ion damage buildup and amorphization processes in AlxGa1−xAs journal January 1995
Analysis of the stability of InGaN/GaN multiquantum wells against ion beam intermixing journal September 2015
Temperature dependence of ion‐beam mixing in III–V semiconductors journal April 1995
Mechanisms of damage formation in semiconductors journal August 2009
Crystalline-to-amorphous phase transformation in ion-irradiated GaAs journal September 2001
Implantation-produced structural damage in InxGa1−xN journal July 2001
Damage and lattice strain in ion‐irradiated AlAs journal July 1994
History of industrial and commercial ion implantation 1906–1978 journal July 2000
Damage buildup in GaN under ion bombardment journal September 2000

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