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Title: In-situ Synchrotron X-ray Studies of the Microstructure and Stability of In2O3 Epitaxial Films

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4997773· OSTI ID:1413931
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  1. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
  2. Northern Illinois Univ., DeKalb, IL (United States). Dept. of Physics
  3. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  4. Argonne National Lab. (ANL), Argonne, IL (United States). X-ray Science Division
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We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski-Krastanov growth mode at a temperature of 850 degrees C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films.

Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States); Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences and Engineering Division; USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
Grant/Contract Number:
SC0012704; AC02-06CH11357
OSTI ID:
1413931
Alternate ID(s):
OSTI ID: 1400329; OSTI ID: 1411041
Report Number(s):
BNL-114467-2017-JA; TRN: US1800592
Journal Information:
Applied Physics Letters, Vol. 111, Issue 16; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 8 works
Citation information provided by
Web of Science

References (20)

Growth of Microscale In 2 O 3 Islands on Y-Stabilized Zirconia(100) by Molecular Beam Epitaxy journal July 2008
Elements of Modern X-ray Physics book March 2011
In situ X-ray studies of vapor phase epitaxy of PbTiO3 journal August 2003
Orientation dependent ionization potential of In 2 O 3 : a natural source for inhomogeneous barrier formation at electrode interfaces in organic electronics journal August 2011
Multimodality hard-x-ray imaging of a chromosome with nanoscale spatial resolution journal February 2016
Thermal expansion coefficient of yttria stabilized zirconia for various yttria contents journal February 2005
Influence of temperature on the epitaxial growth of In2O3 thin films on Y-ZrO2(111) journal March 2011
Energy-dispersive absorption spectroscopy for hard-X-ray micro-XAS applications journal August 2006
Real-Time Monitoring of Growing Nanoparticles journal May 2003
Design and performance of an X-ray scanning microscope at the Hard X-ray Nanoprobe beamline of NSLS-II journal October 2017
Nucleation of islands and continuous high-quality In2O3(001) films during plasma-assisted molecular beam epitaxy on Y-stabilized ZrO2(001) journal June 2010
Synthesis of bulk In2O3–Sc2O3 and their transparent conducting oxide films journal July 2002
Effect of SrO Doping on LaGaO 3 Synthesis via Magnetron Sputtering journal November 2016
Epitaxial growth and properties of thin film oxides journal August 2000
Modular instrument mounting system for variable environment in operando X-ray experiments journal February 2013
Faceting control by the stoichiometry influence on the surface free energy of low-index bcc-In 2 O 3 surfaces journal March 2016
Size-Dependent Shape and Tilt Transitions in In 2 O 3 Nanoislands Grown on Cubic Y-Stabilized ZrO 2 (001) by Molecular Beam Epitaxy journal July 2012
Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering journal August 2009
Surface Energies Control the Self-Organization of Oriented In 2 O 3 Nanostructures on Cubic Zirconia journal September 2010
Physics of transparent conductors journal September 2016

Cited By (1)

Degradation Mechanism of Vanadium Oxide Films When Grown on Y‐Stabilized ZrO 2 Above 500 °C journal October 2019

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Related Subjects

36 MATERIALS SCIENCE
X-rays
Epitaxy
Synchrotrons
Thin films
Radiowave and microwave technology