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Title: Laser-induced gas plasma machining

Patent ·
OSTI ID:1400251
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Techniques for removing material from a substrate are provided. A laser beam is focused at a distance from the surface to be treated. A gas is provided at the focus point. The gas is dissociated using the laser energy to generate gas plasma. The substrate is then brought in contact with the gas plasma to enable material removal.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
Assignee:
Lawrence Livermore National Security, LLC
Patent Number(s):
9,790,090
Application Number:
13/797,495
OSTI ID:
1400251
Resource Relation:
Patent File Date: 2013 Mar 12
Country of Publication:
United States
Language:
English

References (20)

Thin film deposition using plasma-generated source gas patent March 1985
Axial flow laser plasma spraying patent August 1991
Method for fabricating laser generated I.C. masks patent April 1992
Enhanced laser beam welding patent February 1999
Method and process gas for laser welding metal workpieces patent August 2001
Method and apparatus for laser welding with plasma suppression patent July 2007
Dry surface cleaning apparatus using a laser patent-application November 2002
Laser beam irradiating apparatus, laser beam irradiating method, and method of manufacturing a semiconductor device patent-application June 2003
Laser micromachining and methods and systems of same patent-application August 2003
Plasma etching method patent-application July 2004
Process monitor for laser and plasma materials processing of materials patent-application September 2004
Hybrid laser-arc welding method with gas flow rate adjustment patent-application January 2005
Method and laser system for production of laser-induced images inside and on the surface of transparent material patent-application December 2005
Method of forming substrate for fluid ejection device patent-application March 2006
Method for cutting substrate using femtosecond laser patent-application May 2006
Laser induced plasma machining with a process gas patent-application March 2007
Laser induced plasma machining with an optimized process gas patent-application March 2007
Arrangement and method for the on-line monitoring of the quality of a laser process exerted on a workpiece patent-application February 2009
Method and Apparatus for Cleaning a Substrate patent-application April 2009
Method and Apparatus for Laser Ablation patent-application September 2012

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Related Subjects

36 MATERIALS SCIENCE