Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film

Germer, Thomas A.; Sharma, Katelynn A.; Brown, Thomas G.; Oliver, James B.

doi:10.1364/JOSAA.34.001974

Title: Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film

Journal Article · Wed Oct 18 00:00:00 EDT 2017 · Journal of the Optical Society of America. A, Optics, Image Science, and Vision

DOI:https://doi.org/10.1364/JOSAA.34.001974· OSTI ID:1400250

Germer, Thomas A. ^[1]; Sharma, Katelynn A. ^[2]; Brown, Thomas G. ^[2]; Oliver, James B. ^[2]

National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States)
Univ. of Rochester, Rochester, NY (United States)

We extend the theory for scattering by oblique columnar structure thin films to include the induced form birefringence and the propagation of radiation in those films. We generalize the 4 × 4 matrix theory to include arbitrary sources in the layer, which are necessary to determine the Green function for the inhomogeneous wave equation. We further extend first-order vector perturbation theory for scattering by roughness in the smooth surface limit, when the layer is anisotropic. Scattering by an inhomogeneous medium is approximated by a distorted Born approximation, where effective medium theory is used to determine the effective properties of the medium and strong fluctuation theory is used to determine the inhomogeneous sources. In this manner, we develop a model for scattering by inhomogeneous films, with anisotropic correlation functions. Here, the results are compared to Mueller matrix bidirectional scattering distribution function measurements for a glancing-angle deposition (GLAD) film. While the results are applied to the GLAD film example, the development of the theory is general enough that it can guide simulations for scattering in other anisotropic thin films.

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Research Organization:: Univ. of Rochester, NY (United States). Lab. for Laser Energetics

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Contributing Organization:: Laboratory for Laser Energetics, University of Rochester

Grant/Contract Number:: NA0001944

OSTI ID:: 1400250

Alternate ID(s):: OSTI ID: 1399644

Report Number(s):: 2017-116, 1355; JOAOD6; 2017-116, 2310, 1355

Journal Information:: Journal of the Optical Society of America. A, Optics, Image Science, and Vision, Vol. 34, Issue 11; ISSN 1084-7529

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 3 works

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Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity Barnes, Bryan M.; Henn, Mark-Alexander; Sohn, Martin Y. Physical Review Applied, Vol. 11, Issue 6 https://doi.org/10.1103/physrevapplied.11.064056	journal	June 2019

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Title: Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film

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