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Title: Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li 2 Si 2 O 5 to lithium-rich Li 8 SiO 6

Authors:
 [1];  [2];  [3];  [3];  [1]
  1. Department of Mechanical Engineering, University of Colorado Boulder, 1111 Engineering Dr. UCB 427, Boulder, Colorado 80309
  2. Sandia National Laboratories, 1515 Eubank Blvd SE, MS 0613, Albuquerque, New Mexico 87123
  3. Sandia National Laboratories, 1515 Eubank Blvd SE, MS 0886, Albuquerque, New Mexico 87123
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1399049
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 6; Related Information: CHORUS Timestamp: 2018-02-14 09:35:31; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Coyle, Jaclyn, Apblett, Christopher, Brumbach, Michael, Ohlhausen, James, and Stoldt, Conrad. Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li 2 Si 2 O 5 to lithium-rich Li 8 SiO 6. United States: N. p., 2017. Web. doi:10.1116/1.4998726.
Coyle, Jaclyn, Apblett, Christopher, Brumbach, Michael, Ohlhausen, James, & Stoldt, Conrad. Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li 2 Si 2 O 5 to lithium-rich Li 8 SiO 6. United States. doi:10.1116/1.4998726.
Coyle, Jaclyn, Apblett, Christopher, Brumbach, Michael, Ohlhausen, James, and Stoldt, Conrad. Wed . "Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li 2 Si 2 O 5 to lithium-rich Li 8 SiO 6". United States. doi:10.1116/1.4998726.
@article{osti_1399049,
title = {Structural and compositional characterization of RF magnetron cosputtered lithium silicate films: From Li 2 Si 2 O 5 to lithium-rich Li 8 SiO 6},
author = {Coyle, Jaclyn and Apblett, Christopher and Brumbach, Michael and Ohlhausen, James and Stoldt, Conrad},
abstractNote = {},
doi = {10.1116/1.4998726},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 6,
volume = 35,
place = {United States},
year = {Wed Nov 01 00:00:00 EDT 2017},
month = {Wed Nov 01 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on October 11, 2018
Publisher's Accepted Manuscript

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