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Title: A Unique 3D Integration Approach for SOI Substrates.

Abstract

Abstract not provided.

Authors:
; ; ; ; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
IARPA
OSTI Identifier:
1397106
Report Number(s):
SAND2016-9589C
647747
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the PRiME 2016 held October 2-7, 2016 in Honolulu, Hawaii, United States.
Country of Publication:
United States
Language:
English

Citation Formats

Hollowell, Andrew E, Arrington, Christian Lew, Bauer, Todd, Blain, Matthew G., Dominguez, Jason James, Goeke, Ronald S., Heller, Edwin J., Jarecki, Robert L.,, Loviza, Becky G, McClain, Jaime L., Menk, Lyle Alexander, Ortega, Anathea C, Pillars, Jamin Ryan, Resnick, Paul J., and Timon, Robert P.. A Unique 3D Integration Approach for SOI Substrates.. United States: N. p., 2016. Web.
Hollowell, Andrew E, Arrington, Christian Lew, Bauer, Todd, Blain, Matthew G., Dominguez, Jason James, Goeke, Ronald S., Heller, Edwin J., Jarecki, Robert L.,, Loviza, Becky G, McClain, Jaime L., Menk, Lyle Alexander, Ortega, Anathea C, Pillars, Jamin Ryan, Resnick, Paul J., & Timon, Robert P.. A Unique 3D Integration Approach for SOI Substrates.. United States.
Hollowell, Andrew E, Arrington, Christian Lew, Bauer, Todd, Blain, Matthew G., Dominguez, Jason James, Goeke, Ronald S., Heller, Edwin J., Jarecki, Robert L.,, Loviza, Becky G, McClain, Jaime L., Menk, Lyle Alexander, Ortega, Anathea C, Pillars, Jamin Ryan, Resnick, Paul J., and Timon, Robert P.. Thu . "A Unique 3D Integration Approach for SOI Substrates.". United States. doi:. https://www.osti.gov/servlets/purl/1397106.
@article{osti_1397106,
title = {A Unique 3D Integration Approach for SOI Substrates.},
author = {Hollowell, Andrew E and Arrington, Christian Lew and Bauer, Todd and Blain, Matthew G. and Dominguez, Jason James and Goeke, Ronald S. and Heller, Edwin J. and Jarecki, Robert L., and Loviza, Becky G and McClain, Jaime L. and Menk, Lyle Alexander and Ortega, Anathea C and Pillars, Jamin Ryan and Resnick, Paul J. and Timon, Robert P.},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Sep 01 00:00:00 EDT 2016},
month = {Thu Sep 01 00:00:00 EDT 2016}
}

Conference:
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