skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Black silicon: fabrication methods, properties and solar energy applications

Journal Article · · Energy & Environmental Science
DOI:https://doi.org/10.1039/C4EE01152J· OSTI ID:1396263
 [1];  [2];  [3];  [3];  [4];  [2]
  1. Univ. of Cambridge (United Kingdom). Cavendish Lab., Dept. of Physics; National Univ. of Singapore (Singapore). Solar Energy Research Inst. of Singapore (SERIS)
  2. Univ. of Cambridge (United Kingdom). Dept. of Materials Science and Metallurgy
  3. National Univ. of Singapore (Singapore). Solar Energy Research Inst. of Singapore (SERIS)
  4. Univ. of Cambridge (United Kingdom). Cavendish Lab., Dept. of Physics; Argonne National Lab. (ANL), Argonne, IL (United States)

Black silicon (BSi) represents a very active research area in renewable energy materials. The rise of BSi as a focus of study for its fundamental properties and potentially lucrative practical applications is shown by several recent results ranging from solar cells and light-emitting devices to antibacterial coatings and gas-sensors. Here in this article, the common BSi fabrication techniques are first reviewed, including electrochemical HF etching, stain etching, metal-assisted chemical etching, reactive ion etching, laser irradiation and the molten salt Fray-Farthing-Chen-Cambridge (FFC-Cambridge) process. The utilization of BSi as an anti-reflection coating in solar cells is then critically examined and appraised, based upon strategies towards higher efficiency renewable solar energy modules. Methods of incorporating BSi in advanced solar cell architectures and the production of ultra-thin and flexible BSi wafers are also surveyed. Particular attention is given to routes leading to passivated BSi surfaces, which are essential for improving the electrical properties of any devices incorporating BSi, with a special focus on atomic layer deposition of Al2O3. Finally, three potential research directions worth exploring for practical solar cell applications are highlighted, namely, encapsulation effects, the development of micro-nano dual-scale BSi, and the incorporation of BSi into thin solar cells. It is intended that this paper will serve as a useful introduction to this novel material and its properties, and provide a general overview of recent progress in research currently being undertaken for renewable energy applications.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States); Univ. of Cambridge (United Kingdom); National Univ. of Singapore (Singapore)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National University of Singapore (NUS); Singapore Economic Development Board (SEDB); Fulbright Commission
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1396263
Journal Information:
Energy & Environmental Science, Vol. 7, Issue 10; ISSN 1754-5692
Publisher:
Royal Society of ChemistryCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 338 works
Citation information provided by
Web of Science

References (298)

Anti-reflective coatings: A critical, in-depth review journal January 2011
HITTM cells—high-efficiency crystalline Si cells with novel structure journal January 2000
Effective passivation of Si surfaces by plasma deposited SiOx/a-SiNx:H stacks journal May 2011
Excellent surface passivation of heavily doped p+ silicon by low-temperature plasma-deposited SiOx/SiNy dielectric stacks with optimised antireflective performance for solar cell application journal January 2014
On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching journal May 2013
Black silicon layer formation for application in solar cells journal November 2006
Tandem Structure of Porous Silicon Film on Single-Walled Carbon Nanotube Macrofilms for Lithium-Ion Battery Applications journal July 2010
Black silicon: substrate for laser 3D micro/nano-polymerization journal January 2013
Optimization of porous silicon multilayer as antireflection coatings for solar cells journal November 2011
Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3 journal October 2011
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control journal June 1995
Porous silicon in solar cell structures: a review of achievements and modern directions of further use journal December 1999
Injection moulding antireflective nanostructures journal June 2014
24% efficient perl silicon solar cell: Recent improvements in high efficiency silicon cell research journal June 1996
Excellent passivation of highly doped p-type Si surfaces by the negative-charge-dielectric Al2O3 journal September 2007
Anodic dissolution of silicon in hydrofluoric acid solutions journal March 1966
Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching journal November 2008
Two-dimensional LBIC and internal quantum efficiency investigations of porous silicon-based gettering procedure in multicrystalline silicon journal November 2008
Silicon surface texturing by electro-deoxidation of a thin silica layer in molten salt journal October 2010
Combinational Approach of Electrochemical Etching and Metal-Assisted Chemical Etching for p-Type Silicon Wire Formation journal January 2011
Direct electrolytic reduction of solid SiO2 in molten CaCl2 for the production of solar grade silicon journal November 2007
Realization of effective light trapping and omnidirectional antireflection in smooth surface silicon nanowire arrays journal January 2011
Metal-assisted chemical etching in HF/H2O2 produces porous silicon journal October 2000
Surface passivation of high-efficiency silicon solar cells by atomic-layer-deposited Al 2 O 3 journal September 2008
Applications of porous silicon thin films in solar cells and biosensors journal June 2010
Formation of porous silicon by metal particle enhanced chemical etching in HF solution and its application for efficient solar cells journal August 2003
A simple method to produce dual-scale silicon surfaces for solar cells journal August 2013
Crystalline silicon solar cells with micro/nano texture journal February 2013
A simple and cost-effective approach for fabricating pyramids on crystalline silicon wafers journal August 2009
Silicon nanostructures from electroless electrochemical etching journal February 2005
Analyzing the effects of front-surface fields on back-junction silicon solar cells using the charge-collection probability and the reciprocity theorem journal March 2008
High efficiency n-type Si solar cells on Al2O3-passivated boron emitters journal June 2008
Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3 journal July 2006
Chemical Etching of Silicon journal January 1961
Overview on SiN surface passivation of crystalline silicon solar cells journal January 2001
Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks journal October 2010
The structural and luminescence properties of porous silicon journal August 1997
Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules journal September 2009
Silver catalyzed nano-texturing of silicon surfaces for solar cell applications journal May 2012
Silicon columnar microstructures induced by an SF 6 /O 2 plasma journal September 2005
Femtosecond laser-induced formation of spikes on silicon journal April 2000
Optical Sensors for Vapors, Liquids, and Biological Molecules Based on Porous Silicon Technology journal March 2004
Experimental Demonstration of 4 n 2 Classical Absorption Limit in Nanotextured Ultrathin Solar Cells with Dielectric Omnidirectional Back Reflector journal February 2014
Optical reflectance and transmission of a textured surface journal August 1977
Chemical and structural study of electrically passivating Al 2 O 3 /Si interfaces prepared by atomic layer deposition
  • Naumann, Volker; Otto, Martin; Wehrspohn, Ralf B.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 4 https://doi.org/10.1116/1.4704601
journal July 2012
Electrochemical etching in HF solution for silicon micromachining journal December 2002
Surface passivation of silicon solar cells using plasma-enhanced chemical-vapour-deposited SiN films and thin thermal SiO 2 /plasma SiN stacks journal February 2001
Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties journal January 1999
Lift-off of Free-standing Layers in the Kerfless Porous Silicon Process journal January 2013
Gettering of transition metals by porous silicon in epitaxial silicon solar cells journal September 2012
Lifetime Measurements on Attached Epilayers and Detached Epifoils Grown on Reorganised Porous Silicon Showing a Bulk Lifetime Exceeding 100μs journal January 2013
Generally Applicable Self-Masked Dry Etching Technique for Nanotip Array Fabrication journal March 2004
Tandem Solar Cell Concept Using Black Silicon for Enhanced Infrared Absorption journal January 2012
Screen-Printed Aluminum-Alloyed $\hbox{P}^{+}$ Emitter on High-Efficiency N-Type Interdigitated Back-Contact Silicon Solar Cells journal June 2010
Photon management in nanostructured solar cells journal January 2014
Multicrystalline silicon solar cells with porous silicon emitter journal February 2000
Photonic assisted light trapping integrated in ultrathin crystalline silicon solar cells by nanoimprint lithography journal September 2012
Direct femtosecond laser surface nano/microstructuring and its applications: Direct femtosecond laser surface nano/microstructuring and its applications journal August 2012
Coulomb Screening in Intrinsic Medium-Gap Semiconductors and the Electrical Conductivity of Silicon at Elevated Temperatures journal September 1969
Selective nano-emitter fabricated by silver assisted chemical etch-back for multicrystalline solar cells journal January 2013
Passivation of Textured Silicon Wafers:Influence of Pyramid Size Distribution, a-Si:H Deposition Temperature, and Post-treatment journal January 2013
Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving journal November 2004
Electrodeposition of Crystalline and Photoactive Silicon Directly from Silicon Dioxide Nanoparticles in Molten CaCl 2 journal November 2012
Conformal Al2O3 Coatings on Black Silicon by Thermal ALD for Surface Passivation journal January 2012
Direct creation of black silicon using femtosecond laser pulses journal June 2011
Black silicon on emitter diminishes the lateral electric field and enhances the blue response of a solar cell by optimizing depletion region uniformity journal February 2013
Texturisation of multicrystalline silicon wafers for solar cells by reactive ion etching through colloidal masks journal March 2003
Analysis of thin-film silicon solar cells with plasma textured front surface and multi-layer porous silicon back reflector journal May 2010
Dynamic etching of silicon for broadband antireflection applications journal October 2002
Facile synthesis of freestanding Si nanowire arrays by one-step template-free electro-deoxidation of SiO2 in a molten salt journal January 2013
Optical modeling of needle like silicon surfaces produced by an ICP-RIE process conference May 2010
SiOxFy passivation layer in silicon cryoetching journal November 2005
Sulfur-doped black silicon formed by metal-assist chemical etching and ion implanting journal April 2013
Texturing of large area multi-crystalline silicon wafers through different chemical approaches for solar cell fabrication journal August 2008
Surface chemistry of Luminescent Silicon Nanocrystallites journal January 1997
Microstructuring of silicon with femtosecond laser pulses journal September 1998
17.6% Conversion Efficiency Multicrystalline Silicon Solar Cells Using the Reactive Ion Etching with the Damage Removal Etching journal January 2012
Chemical Etching of Silicon journal January 1960
On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2O3 journal December 2008
Record low surface recombination velocities on 1 Ω cm p ‐silicon using remote plasma silicon nitride passivation journal February 1996
Highly Luminescent and Nontoxic Amine-Capped Nanoparticles from Porous Silicon: Synthesis and Their Use in Biomedical Imaging journal June 2012
Back-contact back-junction silicon solar cells under UV illumination journal October 2010
Effective Passivation of Large Area Black Silicon Solar Cells by SiO 2 / SiN x :H Stacks journal January 2014
SHORT COMMUNICATION: ACCELERATED PUBLICATION: Multicrystalline silicon solar cells exceeding 20% efficiency journal January 2004
Passivation mechanisms in cryogenic SF 6 /O 2 etching process journal October 2003
Structural and Optical Properties of Annealed Porous Silicon Bragg Reflector for Thin-Film Crystalline Silicon Solar Cells journal January 2011
Scaling of black silicon processing time by high repetition rate femtosecond lasers journal January 2013
Emergence of very broad infrared absorption band by hyperdoping of silicon with chalcogens journal June 2013
Pinpoint and bulk electrochemical reduction of insulating silicon dioxide to silicon journal May 2003
Back-junction back-contact n-type silicon solar cells with screen-printed aluminum-alloyed emitter journal June 2010
Improved Black Silicon for Photovoltaic Applications journal April 2013
Porous silicon biosensors on the advance journal April 2009
Laser Processed Black Silicon for Photovoltaic Applications journal January 2012
Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment journal February 2009
Improvement of Ge-on-Si photodiodes by black silicon light trapping journal March 2013
Chemical Etching of Silicon journal January 1976
Atomic layer deposited ZnO:Al for nanostructured silicon heterojunction solar cells journal August 2012
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures journal August 2002
Silicon nanostructures for photonics and photovoltaics journal January 2014
The operation of the semiconductor‐insulator‐semiconductor (SIS) solar cell: Theory journal February 1978
Defect generation at the Si–SiO2 interface following corona charging journal June 2007
Extremely low surface recombination velocities in black silicon passivated by atomic layer deposition journal May 2012
19.8% efficient “honeycomb” textured multicrystalline and 24.4% monocrystalline silicon solar cells journal October 1998
Characterization of a-Si:H∕c-Si interfaces by effective-lifetime measurements journal November 2005
Silicon-based visible light-emitting devices integrated into microelectronic circuits journal November 1996
Laser-beam-induced current mapping evaluation of porous silicon-based passivation in polycrystalline silicon solar cells journal May 2009
Application of nanostructured porous silicon in the field of optics. A review journal February 2010
Nanostructured black silicon and the optical reflectance of graded-density surfaces journal June 2009
Surface passivation properties of boron-doped plasma-enhanced chemical vapor deposited hydrogenated amorphous silicon films on p-type crystalline Si substrates journal January 2006
Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle journal August 2008
On the Mechanism of Chemically Etching Germanium and Silicon journal January 1960
Electrochemical Preparation of Silicon and Its Alloys from Solid Oxides in Molten Calcium Chloride journal January 2004
Crystal grain nucleation in amorphous silicon journal November 1998
Monocrystalline silicon surface passivation by Al2O3/porous silicon combined treatment journal May 2013
Influence of the texturing structure on the properties of black silicon solar cell journal January 2013
Chemical and Biological Applications of Porous Silicon Technology journal June 2000
Optical Performance of Solar Modules journal January 2013
Improving the Quality of Epitaxial Foils Produced Using a Porous Silicon-based Layer Transfer Process for High-Efficiency Thin-Film Crystalline Silicon Solar Cells journal January 2014
Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells journal September 2011
Efficiency improved by acid texturization for multi-crystalline silicon solar cells journal January 2011
Characterization of PIII textured industrial multicrystalline silicon solar cells journal October 2012
Efficient light trapping in silicon solar cells by ultrafast-laser-induced self-assembled micro/nano structures journal January 2011
Recombination at the silicon nitride/silicon interface
  • Elmiger, J. R.; Schieck, R.; Kunst, M.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 15, Issue 4 https://doi.org/10.1116/1.580757
journal July 1997
Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures journal December 2007
Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide: Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide journal August 2013
Nanostructure Formation and Passivation of Large-Area Black Silicon for Solar Cell Applications journal February 2012
Optimization of silicon pyramidal emitter by self-selective Ag-assisted chemical etching journal January 2014
Formation of three-dimensional microstructures by electrochemical etching of silicon journal September 2001
Direct electrochemical reduction of titanium dioxide to titanium in molten calcium chloride journal September 2000
Reactive Ion Etching Texturing for Multicrystalline Silicon Solar Cells Using a SF 6 /O 2 /Cl 2 Gas Mixture journal March 2013
Status and prospects of Al 2 O 3 -based surface passivation schemes for silicon solar cells journal July 2012
Gettering impurities from crystalline silicon by phosphorus diffusion using a porous silicon layer journal May 2005
Atomic layer deposited Al2O3 films for anti-reflectance and surface passivation applications journal January 2014
Nanostructured photon management for high performance solar cells journal November 2010
Black surface structures for crystalline silicon solar cells journal March 2009
Effect of porous silicon on the performances of silicon solar cells during the porous silicon-based gettering procedure journal October 2009
Design, fabrication and optical characterization of photonic crystal assisted thin film monocrystalline-silicon solar cells journal January 2012
Broadband light trapping with disordered photonic structures in thin-film silicon solar cells: Broadband light trapping with disordered photonic structures in thin-film silicon solar cells journal May 2013
Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs journal October 2008
Photoluminescence and formation mechanism of chemically etched silicon journal April 1992
The study of defect removal etching of black silicon for solar cells journal June 2014
Visible light emission due to quantum size effects in highly porous crystalline silicon journal September 1991
Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching
  • Hsu, C. H.; Huang, Y. F.; Chen, L. C.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 1 https://doi.org/10.1116/1.2163894
journal January 2006
Erratum: Enhanced absorption and carrier collection in Si wire arrays for photovoltaic applications journal February 2010
The path to 25% silicon solar cell efficiency: History of silicon cell evolution journal May 2009
Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching journal August 2009
Controlled photon emission in porous silicon microcavities journal November 1995
Back-contact solar cells: a review
  • Kerschaver, Emmanuel Van; Beaucarne, Guy
  • Progress in Photovoltaics: Research and Applications, Vol. 14, Issue 2, p. 107-123 https://doi.org/10.1002/pip.657
journal January 2006
Vapour-etching-based porous silicon: a new approach journal February 2002
Nanoporous black silicon photocathode for H2 production by photoelectrochemical water splitting journal January 2011
Properties of ultrafast laser textured silicon for photovoltaics journal October 2011
Black silicon with controllable macropore array for enhanced photoelectrochemical performance journal September 2012
Ultrahigh Throughput Silicon Nanomanufacturing by Simultaneous Reactive Ion Synthesis and Etching journal September 2011
Biodegradable luminescent porous silicon nanoparticles for in vivo applications journal February 2009
Fabrication and Characterizations of Black Hybrid Silicon Nanomaterials as Light-Trapping Textures for Silicon Solar Cells journal January 2009
Mechanically robust superhydrophobicity on hierarchically structured Si surfaces journal March 2010
Porous silicon in crystalline silicon solar cells: a review and the effect on the internal quantum efficiency journal July 1998
Antireflective porous-silicon coatings for multicrystalline solar cells: the effects of chemical etching and rapid thermal processing journal June 2001
Chalcogen doping of silicon via intense femtosecond-laser irradiation journal February 2007
Desorption–ionization mass spectrometry on porous silicon journal May 1999
Wide-band “black silicon” based on porous silicon journal April 2006
Optical and electrical properties of laser texturing for high-efficiency solar cells journal January 2006
Optimal proportional relation between laser power and pulse number for the fabrication of surface-microstructured silicon journal January 2011
Near-unity below-band-gap absorption by microstructured silicon journal March 2001
Model for a-Si:H/c-Si interface recombination based on the amphoteric nature of silicon dangling bonds journal July 2007
Formation of luminescent (NH4)2SiF6 phase from vapour etching-based porous silicon journal April 2003
An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures journal September 2012
Excellent antireflection properties of vertical silicon nanowire arrays journal September 2010
Diffractive gratings for crystalline silicon solar cells-optimum parameters and loss mechanisms: Diffractive gratings for crystalline silicon solar cells journal August 2011
Application to optical components of dielectric porous silicon multilayers journal November 1995
Hierarchical robust textured structures for large scale self-cleaning black silicon solar cells journal January 2014
Industrially Feasible Rear Passivation and Contacting Scheme for High-Efficiency n-Type Solar Cells Yielding a $V_{\rm oc}$ of 700 mV journal August 2010
Photothermal Characteristics of Novel Flexible Black Silicon for Solar Thermal Receiver journal October 2012
Defect Generation at Charge-Passivated $\hbox{Si}$–$\hbox{SiO}_{2}$ Interfaces by Ultraviolet Light journal August 2010
Liquid silicate additive for alkaline texturing of mono-Si wafers to improve process bath lifetime and reduce IPA consumption journal June 2013
Fabrication and assembly of ultrathin high-efficiency silicon solar microcells integrating electrical passivation and anti-reflection coatings journal January 2013
Chemical Etching of Silicon journal January 1959
Review of porous silicon preparation and its application for lithium-ion battery anodes journal September 2013
A normal-incidence PtSi photoemissive detector with black silicon light-trapping journal November 2013
Light trapping effect of submicron surface textures in crystalline Si solar cells journal January 2007
A comparative study based on optical and electrical performance of micro- and nano-textured surfaces for silicon solar cells journal November 2013
Textured silicon: A selective absorber for solar thermal conversion journal November 1979
Nanostructured SIS solar cells conference May 2010
Three novel ways of making thin-film crystalline-silicon layers on glass for solar cell applications journal May 2011
Effect of electrolysis potential on reduction of solid silicon dioxide in molten CaCl2 journal February 2005
Selective emitter using porous silicon for crystalline silicon solar cells journal June 2009
Conductive Black Silicon Surface Made by Silver Nanonetwork Assisted Etching journal June 2013
Black thin film silicon journal August 2011
Surface Passivation of Efficient Nanotextured Black Silicon Solar Cells Using Thermal Atomic Layer Deposition journal September 2013
High-Efficiency 6′′ Multicrystalline Black Solar Cells Based on Metal-Nanoparticle-Assisted Chemical Etching journal January 2012
Optical properties of “black silicon” formed by catalytic etching of Au/Si(100) wafers journal May 2013
Large-Area Three-Dimensional Structuring by Electrochemical Etching and Lithography journal October 2004
Low Temperature Surface Passivation of Black Silicon Solar Cells by High-Pressure O2 Thermal Oxidation journal January 2013
Strong infrared photoluminescence from black silicon made with femtosecond laser irradiation journal January 2013
Observation of competing etches in chemically etched porous silicon journal July 1997
Evaporation and deposition of alkyl-capped silicon nanocrystals in ultrahigh vacuum journal July 2007
The morphological and optical characteristics of femtosecond laser-induced large-area micro/nanostructures on GaAs, Si, and brass journal January 2010
Fabrication of micro/nano dual-scale structures by improved deep reactive ion etching journal June 2010
Reduction of optical losses in colored solar cells with multilayer antireflection coatings journal September 2011
Toward the formation of three-dimensional nanostructures by electrochemical etching of silicon journal May 2005
Low damage reactive ion etching for photovoltaic applications journal May 1999
Very low bulk and surface recombination in oxidized silicon wafers journal December 2001
Porosity superlattices: a new class of Si heterostructures journal June 1994
Porous Silicon: From Luminescence to LEDs journal January 1997
19.7% Efficient All-Screen-Printed Back-Contact Back-Junction Silicon Solar Cell With Aluminum-Alloyed Emitter journal March 2011
Porous Silicon—A Versatile Host Material journal February 2010
Preparation and characterisation of luminescent alkylated-silicon quantum dots journal December 2002
Compact monocrystalline silicon solar modules with high voltage outputs and mechanically flexible designs journal January 2010
Metal-Assisted Chemical Etching of Silicon: A Review journal September 2010
Influence of surface structure on the performance of black-silicon solar cell journal October 2010
Damage studies in dry etched textured silicon surfaces journal April 2004
Characterization of random reactive ion etched-textured silicon solar cells journal June 2001
Dielectric filters made of PS: advanced performance by oxidation and new layer structures journal April 1997
Conformal Transparent Conducting Oxides on Black Silicon journal September 2010
Passivation of Optically Black Silicon by Atomic Layer Deposited Al2O3 journal January 2013
Black silicon with high density and high aspect ratio nanowhiskers journal April 2011
Mechanism of Direct Electrolytic Reduction of Solid SiO[sub 2] to Si in Molten CaCl[sub 2] journal January 2005
Femtosecond laser for black silicon and photovoltaic cells conference February 2008
Methodology for vetting heavily doped semiconductors for intermediate band photovoltaics: A case study in sulfur-hyperdoped silicon journal September 2013
N-type Black Silicon Solar Cells journal January 2013
Porous Silicon Formation and Electropolishing of Silicon by Anodic Polarization in HF Solution journal January 1989
Novel Silicon Nanohemisphere-Array Solar Cells with Enhanced Performance journal September 2011
Bactericidal activity of black silicon journal November 2013
Design and optimization of antireflecting coatings from nanostructured porous silicon dielectric multilayers journal April 2014
Black Silicon formation using dry etching for solar cells applications journal September 2012
Porous silicon formation by stain etching journal June 2001
Sub-100 nm nanostructuring of silicon by ultrashort laser pulses journal January 2005
Simple Approach to Wafer-Scale Self-Cleaning Antireflective Silicon Surfaces journal July 2009
Improvement of multicrystalline silicon solar cell performance via chemical vapor etching method-based porous silicon nanostructures journal May 2012
Reactive ion etching (RIE) technique for application in crystalline silicon solar cells journal April 2010
Highest-quality surface passivation of low-resistivity p-type silicon using stoichiometric PECVD silicon nitride journal January 2001
Electrowetting Properties of Micro/Nanostructured Black Silicon journal August 2010
Kinetics of solid phase crystallization in amorphous silicon journal January 1988
Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers journal September 1990
X-ray photoelectron spectroscopic studies of black silicon for solar cell journal January 2012
Silicon nanowire solar cells journal December 2007
Porous silicon formation mechanisms journal April 1992
Femtosecond laser-induced formation of submicrometer spikes on silicon in water journal December 2004
Recombination at the interface between silicon and stoichiometric plasma silicon nitride journal January 2002
Wideband anti-reflective micro/nano dual-scale structures: fabrication and optical properties journal January 2011
Black silicon for solar cell applications conference June 2012
Development of novel flexible black silicon journal February 2011
Plasma cryogenic etching of silicon: from the early days to today's advanced technologies journal March 2014
Damage-free reactive ion etch for high-efficiency large-area multi-crystalline silicon solar cells journal January 2011
Chemical vapour etching of silicon and porous silicon: silicon solar cells and micromachining applications journal June 2005
Enhanced lateral current transport via the front N + diffused layer of n-type high-efficiency back-junction back-contact silicon solar cells
  • Granek, Filip; Hermle, Martin; Huljić, Dominik M.
  • Progress in Photovoltaics: Research and Applications, Vol. 17, Issue 1 https://doi.org/10.1002/pip.862
journal January 2009
Investigation and design of optical properties of porosity superlattices journal January 1995
Modulation of atomic-layer-deposited Al 2 O 3 film passivation of silicon surface by rapid thermal processing journal August 2011
Tailoring Broadband Antireflection on a Silicon Surface through Two-Step Silver-Assisted Chemical Etching journal March 2012
The passivation layer formation in the cryo-etching plasma process journal May 2007
Absorption Enhancement in Ultrathin Crystalline Silicon Solar Cells with Antireflection and Light-Trapping Nanocone Gratings journal February 2012
Comparative Analysis of Chemically and Electrochemically Formed Porous Si Antireflection Coating for Solar Cells journal January 2003
Nanopore-type black silicon anti-reflection layers fabricated by a one-step silver-assisted chemical etching journal January 2013
Electro-deoxidation of thin silica layer in molten salt—Globular structures with effective light absorbance journal April 2012
Anti-reflecting and photonic nanostructures journal June 2010
Fabrication of nanoporous antireflection surfaces on silicon journal November 2008
Optical properties of silicon light trapping structures for photovoltaics journal December 2010
Effective Passivation of Black Silicon Surfaces by Atomic Layer Deposition journal January 2013
Silicon surface passivation by atomic layer deposited Al2O3 journal August 2008
Effect of boron concentration on recombination at the p -Si–Al 2 O 3 interface journal March 2014
Cost-effective methods of texturing for silicon solar cells journal April 2002
Porous silicon layer transfer processes for solar cells journal June 2004
Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes journal January 2005
A novel method to produce black silicon for solar cells journal July 2011
Enhancement of photovoltaic properties of multicrystalline silicon solar cells by combination of buried metallic contacts and thin porous silicon journal March 2010
Flexible concentrator photovoltaics based on microscale silicon solar cells embedded in luminescent waveguides journal June 2011
Controlled electroluminescence spectra of porous silicon diodes with a vertical optical cavity journal November 1996
Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask journal March 2003
Surface texturing of large area multicrystalline silicon solar cells using reactive ion etching method journal November 1997
Efficient Light Trapping in Inverted Nanopyramid Thin Crystalline Silicon Membranes for Solar Cell Applications journal May 2012
Black nonreflecting silicon surfaces for solar cells journal May 2006
Optimization of roughness, reflectance and photoluminescence for acid textured mc-Si solar cells etched at different HF/HNO3 concentrations journal March 2009
Design of optical path for wide-angle gradient-index antireflection coatings journal January 2007
Application of the chemical vapor-etching in polycrystalline silicon solar cells journal October 2005
Broadband antireflection and absorption enhancement of ultrathin silicon solar microcells enabled with density-graded surface nanostructures journal June 2014
Performance improvements of crystalline silicon by iterative gettering process for short duration and with the use of porous silicon as sacrificial layer journal May 2005
Bioinspired silicon hollow-tip arrays for high performance broadband anti-reflective and water-repellent coatings journal January 2009
Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication journal August 2008
Formation of a silicon layer by electroreduction of SiO2 nanoparticles in CaCl2 molten salt journal March 2012
Optimal light trapping in ultra-thin photonic crystal crystalline silicon solar cells journal January 2010
Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon journal March 2004
The study on the properties of black multicrystalline silicon solar cell varying with the diffusion temperature journal January 2012
Large-area multicrystalline silicon solar cell fabrication using reactive ion etching (RIE) journal January 2011
Porous silicon in solar cells: A review and a description of its application as an AR coating journal April 1995
Updates on some technologies for c-Si based solar cells manufacturing journal January 2011
Morphology and Formation Mechanisms of Porous Silicon journal January 2004
Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses journal December 2002
Plasma immersion ion implantation for semiconductor processing journal November 1996
Perfect anti-reflection from first principles journal January 2013
Porous Electrode Materials for Lithium-Ion Batteries - How to Prepare Them and What Makes Them Special journal August 2012
Crystalline silicon photovoltaics: a cost analysis framework for determining technology pathways to reach baseload electricity costs journal January 2012
Thin-Film Optical Filters book March 2010
Electrodeposition of Crystalline and Photoactive Silicon Directly from Silicon Dioxide Nanoparticles in Molten CaCl 2 journal November 2012
Silicon Surface Texturing by Electro-Deoxidation of a Thin Silica Layer in Molten Salt book February 2011
Lift-off of free-standing layers in the kerfless porous silicon process other January 2013
Electrochemical Preparation of Silicon and Its Alloys from Solid Oxides in Molten Calcium Chloride journal January 2004
Scaling of black silicon processing time by high repetition rate femtosecond lasers journal January 2013
Plasma immersion ion implantation for semiconductor processing conference January 1996

Cited By (35)

Black Silicon Photovoltaics journal December 2014
Efficient Nanostructuring of Silicon by Electrochemical Alloying/Dealloying in Molten Salts for Improved Lithium Storage journal October 2018
Impact of black silicon on light‐ and elevated temperature‐induced degradation in industrial passivated emitter and rear cells
  • Pasanen, Toni P.; Modanese, Chiara; Vähänissi, Ville
  • Progress in Photovoltaics: Research and Applications, Vol. 27, Issue 11 https://doi.org/10.1002/pip.3088
journal October 2018
Black Silicon With Ultra-Low Surface Recombination Velocity Fabricated by Inductively Coupled Power Plasma journal November 2018
Synthesis of gold particles at room temperature ionic liquid–ethylene glycol interfaces: effect of processing time and concentration journal August 2018
Diffusive growth of successive bubbles in confinement journal November 2019
Near-unity quantum efficiency of broadband black silicon photodiodes with an induced junction journal November 2016
Enhanced efficiency of crystalline Si solar cells based on kerfless-thin wafers with nanohole arrays journal February 2018
Black metal thin films by deposition on dielectric antireflective moth-eye nanostructures journal June 2015
Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching journal January 2016
Tuning antimicrobial properties of biomimetic nanopatterned surfaces journal January 2018
Modeling of silicon surface topographies induced by single nanosecond laser pulse induced melt-flows journal May 2019
Self-formation of a nanonet of fluorinated carbon nanowires on the Si surface by combined etching in fluorine-containing plasma journal February 2018
Photoresponse characteristics of MoS 2 QDs/Si nanocone heterojunctions utilizing geometry controlled light trapping mechanism in black Si journal September 2019
Reducing the Optical Reflectance of Kerf-Loss Free Silicon Wafers via Auto-Masked CF 4 /O 2 Plasma Etch journal January 2018
Silicon Nanowires for Solar Thermal Energy Harvesting: an Experimental Evaluation on the Trade-off Effects of the Spectral Optical Properties journal January 2016
Fabrication of broadband anti-reflective layers by mask-free etching TiO 2 films journal January 2018
Dual Protection Layer Strategy to Increase Photoelectrode–Catalyst Interfacial Stability: A Case Study on Black Silicon Photoelectrodes journal February 2019
Effective Passivation of Black Silicon Surfaces via Plasma‐Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer journal October 2019
Structural absorption by barbule microstructures of super black bird of paradise feathers journal January 2018
Synergy between nanomaterials and volatile organic compounds for non-invasive medical evaluation journal January 2018
Silicon: toward eco-friendly reduction techniques for lithium-ion battery applications journal January 2019
Understanding the optics of industrial black silicon
  • Payne, David; Fung, Tsun Hang; Khan, Muhammad Umair
  • SILICONPV 2018, THE 8TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS, AIP Conference Proceedings https://doi.org/10.1063/1.5049297
conference January 2018
Model for black silicon formation just from surface temperature non-uniformities journal December 2018
Auto-Masked Surface Texturing of Kerf-Loss Free Silicon Wafers Using Hexafluoroisopropanol in a Capacitively Coupled Plasma Etching System journal January 2019
Convergent evolution of super black plumage near bright color in 15 bird families journal September 2019
Greatly Enhanced Photovoltaic Performance of Crystalline Silicon Solar Cells via Metal Oxide journal July 2018
Minimization of Optical Reflectance by Copper Assisted Etching of Crystalline Silicon Surface journal January 2018
Black silicon significantly enhances phosphorus diffusion gettering journal January 2018
Tailoring the Charge Transport Properties of Printable Si‐NCs By Conjugated Organic Ligands journal April 2019
Maskless inverted pyramid texturization of silicon journal June 2015
TiO2 Self-Assembled, Thin-Walled Nanotube Arrays for Photonic Applications journal April 2019
Structural and light trapping properties of nanoporous silicon micro-pyramid patterns encrusted with silver nanoparticles journal May 2019
Photolithographic nanoseeding method for selective synthesis of metal-catalysed nanostructures journal October 2018
Economic Advantages of Dry-Etched Black Silicon in Passivated Emitter Rear Cell (PERC) Photovoltaic Manufacturing journal September 2018

Similar Records

Nanomaterials for LightManagement in Electro-Optical Devices
Journal Article · Sun Jan 01 00:00:00 EST 2012 · Journal of Nanomaterials · OSTI ID:1396263

Center for Energy Efficient Materials (CEEM) (Final Technical Report)
Technical Report · Wed Nov 26 00:00:00 EST 2014 · OSTI ID:1396263

Tandem particle-slurry batch reactors for solar water splitting (Final Scientific/Technical Report)
Technical Report · Thu Feb 13 00:00:00 EST 2020 · OSTI ID:1396263