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Title: Improvement of Ohmic contacts on Ga 2 O 3 through use of ITO-interlayers

Authors:
; ; ; ; ;  [1];  [2]
  1. Tamura Corporation, Sayama, Saitama 350-1328, Japan and Novel Crystal Technology, Inc., Sayama, Saitama 350-1328, Japan
  2. Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1396066
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics Journal Volume: 35 Journal Issue: 6; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Carey, IV, Patrick H., Yang, Jiancheng, Ren, Fan, Hays, David C., Pearton, Stephen J., Kuramata, Akito, and Kravchenko, Ivan I.. Improvement of Ohmic contacts on Ga 2 O 3 through use of ITO-interlayers. United States: N. p., 2017. Web. doi:10.1116/1.4995816.
Carey, IV, Patrick H., Yang, Jiancheng, Ren, Fan, Hays, David C., Pearton, Stephen J., Kuramata, Akito, & Kravchenko, Ivan I.. Improvement of Ohmic contacts on Ga 2 O 3 through use of ITO-interlayers. United States. doi:10.1116/1.4995816.
Carey, IV, Patrick H., Yang, Jiancheng, Ren, Fan, Hays, David C., Pearton, Stephen J., Kuramata, Akito, and Kravchenko, Ivan I.. Wed . "Improvement of Ohmic contacts on Ga 2 O 3 through use of ITO-interlayers". United States. doi:10.1116/1.4995816.
@article{osti_1396066,
title = {Improvement of Ohmic contacts on Ga 2 O 3 through use of ITO-interlayers},
author = {Carey, IV, Patrick H. and Yang, Jiancheng and Ren, Fan and Hays, David C. and Pearton, Stephen J. and Kuramata, Akito and Kravchenko, Ivan I.},
abstractNote = {},
doi = {10.1116/1.4995816},
journal = {Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics},
issn = {2166-2746},
number = 6,
volume = 35,
place = {United States},
year = {2017},
month = {11}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1116/1.4995816

Citation Metrics:
Cited by: 5 works
Citation information provided by
Web of Science

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