A novel polyimide based micro heater with high temperature uniformity

Yu, Shifeng; Wang, Shuyu; Lu, Ming; Zuo, Lei

doi:10.1016/j.sna.2017.02.006

Title: A novel polyimide based micro heater with high temperature uniformity

Journal Article · Mon Feb 06 00:00:00 EST 2017 · Sensors and Actuators. A, Physical

DOI:https://doi.org/10.1016/j.sna.2017.02.006· OSTI ID:1392269

Yu, Shifeng ^[1]; Wang, Shuyu ^[2]; Lu, Ming ^[3]; Zuo, Lei ^[1]

Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)
Stony Brook Univ., NY (United States)
Brookhaven National Lab. (BNL), Upton, NY (United States)

MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature-dependent measurements. In this study, we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as a simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. Finally, this design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving.

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Research Organization:: Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States); Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); AbbVie Inc. (United States)

Grant/Contract Number:: SC0012704; IDBR-1530508; AC02-98CH10886

OSTI ID:: 1392269

Alternate ID(s):: OSTI ID: 1412563

Report Number(s):: BNL-114325-2017-JA; KC0403020

Journal Information:: Sensors and Actuators. A, Physical, Vol. 257; ISSN 0924-4247

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 18 works

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Nanocalorimeters for biomolecular analysis and cell metabolism monitoring Wang, Shuyu; Sha, Xiaopeng; Yu, Shifeng Biomicrofluidics, Vol. 14, Issue 1 https://doi.org/10.1063/1.5134870	journal	January 2020
Development of a high throughput micro-heater array with controllable temperature for each heating unit Bai, Yiwei; Tian, Jiaojiao; Lin, Zude Microsystem Technologies, Vol. 26, Issue 3 https://doi.org/10.1007/s00542-019-04607-9	journal	September 2019
A comprehensive methodology for design and development of an integrated microheater for on-chip DNA amplification Barman, Ujjal; Wiederkehr, Rodrigo Sergio; Fiorini, Paolo Journal of Micromechanics and Microengineering, Vol. 28, Issue 8 https://doi.org/10.1088/1361-6439/aabd2c	journal	May 2018
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