Large area nanoimprint enables ultra-precise x-ray diffraction gratings
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- AC02-05CH11231
- OSTI ID:
- 1390385
- Journal Information:
- Optics Express, Journal Name: Optics Express Vol. 25 Journal Issue: 19; ISSN 1094-4087
- Publisher:
- Optical Society of AmericaCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 13 works
Citation information provided by
Web of Science
Web of Science
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